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1. 发明申请

US20130294677A1 DEFECT INSPECTION METHOD AND DEFECT INSPECTION DEVICE 审中-公开
标题翻译：缺陷检查方法和缺陷检查装置
公开(公告)号：US20130294677A1
公开(公告)日：2013-11-07
申请号：US13989840
申请日：2011-10-21
申请人： Takahiro Urano , Toshifumi Honda , Shunji Maeda
发明人： Takahiro Urano , Toshifumi Honda , Shunji Maeda
IPC分类号： G06T7/00
CPC分类号： G06T7/001 , G01N21/956 , G06T2207/30148 , H01L22/12 , H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： There is provided a defect inspection method including the steps of: acquiring image data sets of a sample under a plurality of imaging conditions; storing a plurality of image data sets acquired under the plurality of imaging conditions in an image storage unit; acquiring a defect candidate from each of the plurality of image data sets; cutting out, from the image data sets acquired under at least two imaging conditions and stored in the image storage unit, a partial images each including a position of the defect candidate detected in any of the plurality of image data sets and the periphery of the defect candidate position; and integrating the partial images acquired under at least two imaging conditions corresponding to the defect candidates, thereby classifying the defect candidates.
摘要翻译：提供了一种缺陷检查方法，包括以下步骤：在多个成像条件下获取样本的图像数据集; 将在所述多个成像条件下获取的多个图像数据集合存储在图像存储单元中; 从所述多个图像数据组中的每一个获取缺陷候选; 从在至少两个成像条件下获取并存储在图像存储单元中的图像数据集切割出包括在多个图像数据集中的任何一个中检测到的缺陷候选位置和缺陷周围的部分图像候选人职位; 并且对在与缺陷候选对应的至少两个成像条件下获取的部分图像进行积分，从而对缺陷候选进行分类。

2. 发明授权

US09075026B2 Defect inspection device and defect inspection method 有权
标题翻译：缺陷检查装置和缺陷检查方法
公开(公告)号：US09075026B2
公开(公告)日：2015-07-07
申请号：US13387369
申请日：2010-08-30
申请人： Takahiro Urano , Kaoru Sakai , Toshifumi Honda
发明人： Takahiro Urano , Kaoru Sakai , Toshifumi Honda
IPC分类号： G06K9/60 , G01N21/95 , G06T7/00 , G01N21/956 , G01N21/88 , H01L21/66
CPC分类号： G01N21/9501 , G01N21/95607 , G01N2021/8825 , G01N2021/9513 , G06T7/0004 , G06T2207/10061 , G06T2207/30121 , G06T2207/30148 , H01L22/12
摘要： Disclosed is a defect inspection device that has an illumination optical system; a detection optical system; and a processing unit which includes a defect feature quantity calculation unit that calculates the feature quantities of each defect candidate, a defect candidate grouping unit that groups the aforementioned defect candidates on the basis of the feature quantities, a defect classification evaluation value calculation unit that calculates defect classification evaluation values for the aforementioned defect candidates, a defect classification evaluation value updating unit that, on the basis of instructions, updates the evaluation values, a defect classification threshold determination unit that, on the basis of evaluation valued updated by the aforementioned defect classification evaluation value updating unit, determines a classification boundary that is a threshold for classifying defect types of the aforementioned defect candidates, and a defect detection unit that detects defects using the thresholds.
摘要翻译：公开了一种具有照明光学系统的缺陷检查装置，检测光学系统; 以及处理单元，其包括：缺陷特征量计算单元，其计算每个缺陷候选的特征量;缺陷候选分组单元，其基于所述特征量对所述缺陷候选进行分组;缺陷分类评估值计算单元，其计算上述缺陷候补的缺陷分类评价值，基于指示更新评价值的缺陷分类评价值更新部，基于上述缺陷分类更新的评价值的缺陷分类阈值判定部评估值更新单元，确定作为用于分类上述缺陷候选的缺陷类型的阈值的分类边界，以及使用阈值来检测缺陷的缺陷检测单元。

3. 发明授权

US08908172B2 Defect inspection device and method of inspecting defect 有权
标题翻译：缺陷检查装置及缺陷检查方法
公开(公告)号：US08908172B2
公开(公告)日：2014-12-09
申请号：US13575050
申请日：2011-02-09
申请人： Takahiro Urano , Toshifumi Honda
发明人： Takahiro Urano , Toshifumi Honda
IPC分类号： G01N21/00 , G01N21/95
CPC分类号： G01N21/9501
摘要： Disclosed is a defect inspection device comprising: an illumination optical portion which illuminates an object to be inspected with illuminating light; a detection optical portion system illuminated by the illumination optical portion and provided with a plurality of detectors which respectively detects components of scattering light which scatter from the inspected object each in a different direction of azimuthal angle or in a different direction of angle of elevation with respect to a surface of the inspected object; and a signal processing portion which makes gain adjustments and defect decisions in parallel on plural signals based on the components of the scattering light from the inspected object detected by the detectors, respectively, the defect decisions being based on a threshold value decision, and which extracts defects based on results of the gain adjustments and of the defect decisions.
摘要翻译：公开了一种缺陷检查装置，包括：照明光学部，其利用照明光照射被检查物体; 由照明光学部分照射的检测光学部分系统，并且设置有多个检测器，其分别检测沿着方位角的不同方向或与不同的仰角方向相对地从被检查物体散射的散射光的分量到被检查物体的表面; 以及信号处理部分，分别基于由检测器检测到的来自被检查对象的散射光的分量，对多个信号并行地进行增益调整和缺陷判定，所述缺陷判定基于阈值判定，并且提取基于增益调整结果和缺陷决定的缺陷。

4. 发明申请

US20120293795A1 DEFECT INSPECTION DEVICE AND METHOD OF INSPECTING DEFECT 有权
标题翻译：缺陷检查装置和检查缺陷的方法
公开(公告)号：US20120293795A1
公开(公告)日：2012-11-22
申请号：US13575050
申请日：2011-02-09
申请人： Takahiro Urano , Toshifumi Honda
发明人： Takahiro Urano , Toshifumi Honda
IPC分类号： G01N21/956
CPC分类号： G01N21/9501
摘要： Disclosed is a defect inspection device comprising: an illumination optical portion which illuminates an object to be inspected with illuminating light; a detection optical portion system illuminated by the illumination optical portion and provided with a plurality of detectors which respectively detects components of scattering light which scatter from the inspected object each in a different direction of azimuthal angle or in a different direction of angle of elevation with respect to a surface of the inspected object; and a signal processing portion which makes gain adjustments and defect decisions in parallel on plural signals based on the components of the scattering light from the inspected object detected by the detectors, respectively, the defect decisions being based on a threshold value decision, and which extracts defects based on results of the gain adjustments and of the defect decisions.
摘要翻译：公开了一种缺陷检查装置，包括：照明光学部，其利用照明光照射被检查物体; 由照明光学部分照射的检测光学部分系统，并且设置有多个检测器，其分别检测沿着方位角的不同方向或与不同的仰角方向相对地从被检查物体散射的散射光的分量到被检查物体的表面; 以及信号处理部分，分别基于由检测器检测到的来自被检查对象的散射光的分量，对多个信号并行地进行增益调整和缺陷判定，所述缺陷判定基于阈值判定，并且提取基于增益调整结果和缺陷决定的缺陷。

5. 发明申请

US20120229618A1 DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD 有权
标题翻译：缺陷检查装置和缺陷检查方法
公开(公告)号：US20120229618A1
公开(公告)日：2012-09-13
申请号：US13387369
申请日：2010-08-30
申请人： Takahiro Urano , Kaoru Sakai , Toshifumi Honda
发明人： Takahiro Urano , Kaoru Sakai , Toshifumi Honda
IPC分类号： G06K9/60 , H04N7/18
CPC分类号： G01N21/9501 , G01N21/95607 , G01N2021/8825 , G01N2021/9513 , G06T7/0004 , G06T2207/10061 , G06T2207/30121 , G06T2207/30148 , H01L22/12
摘要： Disclosed is a defect inspection device that has an illumination optical system; a detection optical system; and a processing unit which includes a defect feature quantity calculation unit that calculates the feature quantities of each defect candidate, a defect candidate grouping unit that groups the aforementioned defect candidates on the basis of the feature quantities, a defect classification evaluation value calculation unit that calculates defect classification evaluation values for the aforementioned defect candidates, a defect classification evaluation value updating unit that, on the basis of instructions, updates the evaluation values, a defect classification threshold determination unit that, on the basis of evaluation valued updated by the aforementioned defect classification evaluation value updating unit, determines a classification boundary that is a threshold for classifying defect types of the aforementioned defect candidates, and a defect detection unit that detects defects using the thresholds.
摘要翻译：公开了一种具有照明光学系统的缺陷检查装置，检测光学系统; 以及处理单元，其包括：缺陷特征量计算单元，其计算每个缺陷候选的特征量;缺陷候选分组单元，其基于所述特征量对所述缺陷候选进行分组;缺陷分类评估值计算单元，其计算上述缺陷候补的缺陷分类评价值，基于指示更新评价值的缺陷分类评价值更新部，基于上述缺陷分类更新的评价值的缺陷分类阈值判定部评估值更新单元，确定作为用于分类上述缺陷候选的缺陷类型的阈值的分类边界，以及使用阈值来检测缺陷的缺陷检测单元。

6. 发明申请

US20120141012A1 APPARATUS AND METHOD FOR INSPECTING DEFECT 有权
标题翻译：检测缺陷的装置和方法
公开(公告)号：US20120141012A1
公开(公告)日：2012-06-07
申请号：US13378427
申请日：2010-06-18
申请人： Kaoru Sakai , Takahiro Urano
发明人： Kaoru Sakai , Takahiro Urano
IPC分类号： G06K9/62
CPC分类号： H01L22/20 , G01N21/9501 , G01N21/956 , G06T7/001 , G06T2207/20212 , G06T2207/30148 , H01L22/12
摘要： A defect inspection apparatus includes an illumination optical system which irradiates an inspection subject under a predetermined optical condition, a detection optical system which obtains image data by detecting a scattered light from the inspection subject irradiated by the illumination optical system, and an image processing unit provided with a defect candidate detection unit which detects defect candidates with respect to plural image data obtained by the detection optical system under different conditions, and a post-inspection processing unit which executes a defect determination by integrating the defect candidates with respect to the plural image data.
摘要翻译：缺陷检查装置包括：在预定的光学条件下照射检查对象的照明光学系统;检测光学系统，其通过检测由照明光学系统照射的检查对象物的散射光获得图像数据;以及图像处理单元，检测处理单元，其利用检测光学系统在不同条件下获得的多个图像数据检测缺陷候选的缺陷候选检测单元，以及检查后处理单元，其通过对所述多个图像数据进行积分而执行缺陷候选。

7. 发明授权

US08737718B2 Apparatus and method for inspecting defect 有权
标题翻译：用于检查缺陷的装置和方法
公开(公告)号：US08737718B2
公开(公告)日：2014-05-27
申请号：US13378427
申请日：2010-06-18
申请人： Kaoru Sakai , Takahiro Urano
发明人： Kaoru Sakai , Takahiro Urano
IPC分类号： G06K9/62
CPC分类号： H01L22/20 , G01N21/9501 , G01N21/956 , G06T7/001 , G06T2207/20212 , G06T2207/30148 , H01L22/12
摘要： A defect inspection apparatus includes an illumination optical system which irradiates an inspection subject under a predetermined optical condition, a detection optical system which obtains image data by detecting a scattered light from the inspection subject irradiated by the illumination optical system, and an image processing unit provided with a defect candidate detection unit which detects defect candidates with respect to plural image data obtained by the detection optical system under different conditions, and a post-inspection processing unit which executes a defect determination by integrating the defect candidates with respect to the plural image data.
摘要翻译：缺陷检查装置包括：在预定的光学条件下照射检查对象的照明光学系统;检测光学系统，其通过检测由照明光学系统照射的检查对象物的散射光获得图像数据;以及图像处理单元，检测处理单元，其利用检测光学系统在不同条件下获得的多个图像数据检测缺陷候选的缺陷候选检测单元，以及检查后处理单元，其通过对所述多个图像数据进行积分而执行缺陷候选。

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