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    • 1. 发明授权
    • Liquid crystal device with a reflective substrate with bumps of
photosensitive resin which have 2 or more heights and random
configuration
    • 具有反射基板的液晶装置,具有2个或更多高度和随机配置的感光树脂凸起
    • US5418635A
    • 1995-05-23
    • US19474
    • 1993-02-18
    • Seiichi MitsuiHisakazu NakamuraYasunori ShimadaKoji TaniguchiHirohisa TanakaNaofumi Kimura
    • Seiichi MitsuiHisakazu NakamuraYasunori ShimadaKoji TaniguchiHirohisa TanakaNaofumi Kimura
    • G02F1/1335G02F1/1362G02F1/13
    • G02F1/133553G02F1/136227G02F2203/02Y10S359/90
    • A reflective substrate is provided, in which an electrode made of a material having an optical reflecting function is provided above an insulating base substrate and an upper surface of the electrode has a continuous wave shape without any flat portions. A method for manufacturing the reflective substrate includes the steps of: forming a plurality of convex portions with two or more different heights in a region where the electrode is provided; forming a polymer resin film, which has an upper surface in a continuous wave shape without any flat portions, on the substrate with the convex portions; and forming the electrode made of a material having an optical reflecting function on the polymer resin film so that the electrode has a continuous wave shape. A liquid crystal display device using the reflective substrate is provided, which includes: a reflective substrate in which an electrode made of a material having an optical reflecting function is provided on an insulating base substrate, and an upper surface of the electrode has a continuous wave shape; a second substrate provided opposing the reflective substrate; and a liquid crystal layer sealed between the reflective substrate and the second substrate.
    • 提供了一种反射基板,其中由具有光学反射功能的材料制成的电极设置在绝缘基底基板上方,并且电极的上表面具有没有任何平坦部分的连续波形。 制造反射基板的方法包括以下步骤:在设置电极的区域中形成具有两个或多个不同高度的多个凸部; 在具有凸部的基板上形成具有连续波形的上表面而没有任何平坦部分的聚合物树脂膜; 并且在聚合物树脂膜上形成由具有光学反射功能的材料制成的电极,使得电极具有连续波形。 提供一种使用反射基板的液晶显示装置,其包括:反射基板,其中由绝缘基底基板上的具有光学反射功能的材料制成的电极,并且电极的上表面具有连续波 形状; 与所述反射基板相对设置的第二基板; 以及密封在反射基板和第二基板之间的液晶层。
    • 7. 发明授权
    • Illumination optical system, exposure apparatus, and device manufacturing method
    • 照明光学系统,曝光装置和装置制造方法
    • US08947635B2
    • 2015-02-03
    • US13168068
    • 2011-06-24
    • Hirohisa TanakaYasushi Mizuno
    • Hirohisa TanakaYasushi Mizuno
    • G03B27/72G02B27/09G03F7/20
    • G02B27/0966G03F7/70091G03F7/70191
    • According to one embodiment, an illumination optical system is provided with an optical integrator which forms a predetermined light intensity distribution on an illumination pupil plane in an illumination optical path of the illumination optical system with incidence of exposure light from a light source device thereinto; a transmission filter arranged on the reticle side with respect to the optical integrator and in a first adjustment region set including the illumination pupil plane in an optical-axis direction of the illumination optical system, and having a transmittance characteristic varying according to positions of the exposure light incident thereinto; and a movement mechanism which moves the transmission filter along the optical-axis direction in the first adjustment region.
    • 根据一个实施例,照明光学系统设置有光学积分器,其在照明光学系统的照明光路中在照明光瞳平面上形成预定的光强度分布,其中光源装置的曝光光入射到照明光学系统中; 相对于光积分器布置在光罩侧的透射滤光器和在照明光学系统的光轴方向上包括照明光瞳面的第一调整区域,并且具有根据曝光位置而变化的透射率特性 光线事件 以及在第一调整区域中沿着光轴方向移动发送滤波器的移动机构。
    • 10. 发明授权
    • Illumination optical apparatus, exposure apparatus, and device manufacturing method
    • 照明光学装置,曝光装置和装置的制造方法
    • US08094290B2
    • 2012-01-10
    • US12266321
    • 2008-11-06
    • Soichi OwaOsamu TanitsuHirohisa Tanaka
    • Soichi OwaOsamu TanitsuHirohisa Tanaka
    • G03B27/54G03B27/72G03B27/32
    • G02B27/0905G02B26/0833G02B27/0927G03F7/70075G03F7/70116G03F7/70583Y10T29/49826
    • An illumination optical system with a simple structure reduces the effects of illumination variations caused by a spatial coherency of illumination light, while maintaining a high usage efficiency of illumination light that is emitted in pulses. The illumination optical system illuminates an irradiated plane with pulse-emitted illumination light and includes a spatial light modulator including a plurality of mirror elements each of which spatially modulates the illumination light in accordance with an incident position of the illumination light. A modulation control unit controls the mirror elements, whenever at least one pulse of illumination light is emitted, in a manner such that the optical elements spatially modulate the pulses of illumination light differently from one another and form substantially the same intensity distribution for the pulses of illumination light on a predetermined plane.
    • 具有简单结构的照明光学系统降低了由照明光的空间相干性引起的照明变化的影响,同时保持以脉冲发射的照明光的高使用效率。 照明光学系统用脉冲发射的照明光照射被照射的平面,并且包括空间光调制器,其包括多个反射镜元件,每个反射镜元件根据照明光的入射位置对照明光进行空间调制。 每当发射照明光的至少一个脉冲时,调制控制单元控制镜元件,使得光学元件彼此空间地调制照明光的脉冲,并且形成基本相同的强度分布,用于脉冲的 在预定平面上的照明光。