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1. 发明授权

US08232211B1 Methods for self-aligned self-assembled patterning enhancement 有权
标题翻译：自对准自组装图案增强方法
公开(公告)号：US08232211B1
公开(公告)日：2012-07-31
申请号：US13010326
申请日：2011-01-20
申请人： Larry Clevenger , Timothy J. Dalton , Carl J. Radens
发明人： Larry Clevenger , Timothy J. Dalton , Carl J. Radens
IPC分类号： H01L21/311
CPC分类号： B81C1/00031 , B81C2201/0149 , B81C2201/0198 , G03F1/36 , G03F7/0002
摘要： Methods for producing self-aligned, self-assembled sub-ground-rule features without the need to use additional lithographic patterning. Specifically, the present disclosure allows for the creation of assist features that are localized and self-aligned to a given structure. These assist features can either have the same tone or different tone to the given feature.
摘要翻译：用于生产自对准，自组装次地基规则特征的方法，而不需要使用附加的光刻图案。具体地，本公开允许创建对给定结构进行局部化和自对准的辅助特征。这些辅助功能可以具有与给定功能相同的音调或不同的音调。

2. 发明申请

US20120190205A1 METHODS FOR SELF-ALIGNED SELF-ASSEMBLED PATTERNING ENHANCEMENT 有权
标题翻译：自对准自组织图形增强的方法
公开(公告)号：US20120190205A1
公开(公告)日：2012-07-26
申请号：US13010326
申请日：2011-01-20
申请人： Larry Clevenger , Timothy J. Dalton , Carl J. Radens
发明人： Larry Clevenger , Timothy J. Dalton , Carl J. Radens
IPC分类号： H01L21/31
CPC分类号： B81C1/00031 , B81C2201/0149 , B81C2201/0198 , G03F1/36 , G03F7/0002
摘要： Methods for producing self-aligned, self-assembled sub-ground-rule features without the need to use additional lithographic patterning. Specifically, the present disclosure allows for the creation of assist features that are localized and self-aligned to a given structure. These assist features can either have the same tone or different tone to the given feature.
摘要翻译：用于生产自对准，自组装次地基规则特征的方法，而不需要使用附加的光刻图案。具体地，本公开允许创建对给定结构进行局部化和自对准的辅助特征。这些辅助功能可以具有与给定功能相同的音调或不同的音调。

3. 发明授权

US08486511B2 Pattern formation employing self-assembled material 有权
标题翻译：采用自组装材料的图案形成
公开(公告)号：US08486511B2
公开(公告)日：2013-07-16
申请号：US13430177
申请日：2012-03-26
申请人： Charles T. Black , Timothy J. Dalton , Bruce B. Doris , Carl J. Radens
发明人： Charles T. Black , Timothy J. Dalton , Bruce B. Doris , Carl J. Radens
IPC分类号： B32B3/00
CPC分类号： H01L21/0338 , B81B2203/0369 , B81C1/00031 , B81C2201/0149 , B81C2201/0198 , B82Y30/00 , H01L21/0337 , H01L51/0017 , Y10S977/882 , Y10S977/887 , Y10S977/888 , Y10T428/24479 , Y10T428/2457 , Y10T428/24612 , Y10T428/24736 , Y10T428/24802
摘要： In one embodiment, Hexagonal tiles encompassing a large are divided into three groups, each containing ⅓ of all hexagonal tiles that are disjoined among one another. Openings for the hexagonal tiles in each group are formed in a template layer, and a set of self-assembling block copolymers is applied and patterned within each opening. This process is repeated three times to encompass all three groups, resulting in a self-aligned pattern extending over a wide area. In another embodiment, the large area is divided into rectangular tiles of two non-overlapping and complementary groups. Each rectangular area has a width less than the range of order of self-assembling block copolymers. Self-assembled self-aligned line and space structures are formed in each group in a sequential manner so that a line and space pattern is formed over a large area extending beyond the range of order.
摘要翻译：在一个实施例中，包括大的六边形瓦片被分成三组，每组包含彼此分离的所有六边形瓦片的1/3。每个组中的六边形瓦片的开口形成在模板层中，并且在每个开口内施加并组合一组自组装嵌段共聚物。该过程重复三次以包含所有三组，导致在大面积上延伸的自对准图案。在另一个实施例中，大面积被分成两个不重叠和互补组的矩形瓦片。每个矩形区域的宽度小于自组装嵌段共聚物的顺序范围。在每组中以顺序的方式形成自组装的自对准线和空间结构，使得在超过有序范围的大面积上形成线和空间图案。

4. 发明授权

US07105445B2 Interconnect structures with encasing cap and methods of making thereof 失效
标题翻译：具有封盖的互连结构及其制造方法
公开(公告)号：US07105445B2
公开(公告)日：2006-09-12
申请号：US11034890
申请日：2005-01-14
申请人： Kwong-Hon Wong , Louis C. Hsu , Timothy J. Dalton , Carl J. Radens , Chih-Chao Yang , Lawrence A. Clevenger , Theodorus E. Standaert
发明人： Kwong-Hon Wong , Louis C. Hsu , Timothy J. Dalton , Carl J. Radens , Chih-Chao Yang , Lawrence A. Clevenger , Theodorus E. Standaert
IPC分类号： H01L21/44
CPC分类号： H01L21/76852 , H01L21/288 , H01L21/2885 , H01L21/76885 , H01L23/5226 , H01L23/53238 , H01L2924/0002 , H01L2924/00
摘要： A method of making an interconnect which includes providing an interconnect structure in a dielectric material, recessing the dielectric material such that a portion of the interconnect structure extends above an upper surface of the dielectric and depositing an encasing cap over the extended portion of the interconnect structure.
摘要翻译：一种制造互连的方法，其包括在介电材料中提供互连结构，使所述电介质材料凹陷，使得所述互连结构的一部分在所述电介质的上表面上方延伸，并且在所述互连结构的所述延伸部分上沉积包封盖。

5. 发明授权

US08512849B2 Corrugated interfaces for multilayered interconnects 有权
公开(公告)号：US08512849B2
公开(公告)日：2013-08-20
申请号：US11836253
申请日：2007-08-09
申请人： Lawrence A. Clevenger , Timothy J. Dalton , Elbert E. Huang , Sampath Purushothaman , Carl J. Radens
发明人： Lawrence A. Clevenger , Timothy J. Dalton , Elbert E. Huang , Sampath Purushothaman , Carl J. Radens
IPC分类号： B32B3/30
CPC分类号： H05K3/40 , H01B17/66 , H01L21/0337 , H01L21/31144 , H01L21/76822 , H01L23/53295 , H01L2924/0002 , Y10T156/1039 , Y10T156/1082 , Y10T428/24521 , Y10T428/24529 , Y10T428/24537 , Y10T428/24612 , Y10T428/24711 , H01L2924/00
摘要： Dielectric composite structures comprising interfaces possessing nanometer scale corrugated interfaces in interconnect stack provide enhances adhesion strength and interfacial fracture toughness. Composite structures further comprising corrugated adhesion promoter layers to further increase intrinsic interfacial adhesion are also described. Methods to form the nanometer scale corrugated interfaces for enabling these structures using self assembling polymer systems and pattern transfer process are also described.

6. 发明授权

US08486512B2 Pattern formation employing self-assembled material 有权
公开(公告)号：US08486512B2
公开(公告)日：2013-07-16
申请号：US13430179
申请日：2012-03-26
申请人： Charles T. Black , Timothy J. Dalton , Bruce B. Doris , Carl J. Radens
发明人： Charles T. Black , Timothy J. Dalton , Bruce B. Doris , Carl J. Radens
IPC分类号： B32B3/00
CPC分类号： H01L21/0338 , B81B2203/0369 , B81C1/00031 , B81C2201/0149 , B81C2201/0198 , B82Y30/00 , H01L21/0337 , H01L51/0017 , Y10S977/882 , Y10S977/887 , Y10S977/888 , Y10T428/24479 , Y10T428/2457 , Y10T428/24612 , Y10T428/24736 , Y10T428/24802
摘要： In one embodiment, Hexagonal tiles encompassing a large are divided into three groups, each containing ⅓ of all hexagonal tiles that are disjoined among one another. Openings for the hexagonal tiles in each group are formed in a template layer, and a set of self-assembling block copolymers is applied and patterned within each opening. This process is repeated three times to encompass all three groups, resulting in a self-aligned pattern extending over a wide area. In another embodiment, the large area is divided into rectangular tiles of two non-overlapping and complementary groups. Each rectangular area has a width less than the range of order of self-assembling block copolymers. Self-assembled self-aligned line and space structures are formed in each group in a sequential manner so that a line and space pattern is formed over a large area extending beyond the range of order.

7. 发明申请

US20090041989A1 CORRUGATED INTERFACES FOR MULTILAYERED INTERCONNECTS 有权
标题翻译：多层互连的接口接口
公开(公告)号：US20090041989A1
公开(公告)日：2009-02-12
申请号：US11836253
申请日：2007-08-09
申请人： Lawrence A. Clevenger , Timothy J. Dalton , Elbert E. Huang , Sampath Purushothaman , Carl J. Radens
发明人： Lawrence A. Clevenger , Timothy J. Dalton , Elbert E. Huang , Sampath Purushothaman , Carl J. Radens
IPC分类号： B32B3/28 , B05D3/04 , B05D3/06
CPC分类号： H05K3/40 , H01B17/66 , H01L21/0337 , H01L21/31144 , H01L21/76822 , H01L23/53295 , H01L2924/0002 , Y10T156/1039 , Y10T156/1082 , Y10T428/24521 , Y10T428/24529 , Y10T428/24537 , Y10T428/24612 , Y10T428/24711 , H01L2924/00
摘要： Dielectric composite structures comprising interfaces possessing nanometer scale corrugated interfaces in interconnect stack provide enhances adhesion strength and interfacial fracture toughness. Composite structures further comprising corrugated adhesion promoter layers to further increase intrinsic interfacial adhesion are also described. Methods to form the nanometer scale corrugated interfaces for enabling these structures using self assembling polymer systems and pattern transfer process are also described.
摘要翻译：包含在互连叠层中具有纳米级波纹界面的界面的介电复合结构提供了增强的粘合强度和界面断裂韧性。还描述了进一步包含波纹粘合促进剂层以进一步增加本征界面粘合性的复合结构。还描述了使用自组装聚合物体系和图案转移方法形成纳米级波纹界面以实现这些结构的方法。

8. 发明授权

US07394332B2 Micro-cavity MEMS device and method of fabricating same 有权
标题翻译：微腔MEMS器件及其制造方法
公开(公告)号：US07394332B2
公开(公告)日：2008-07-01
申请号：US11217163
申请日：2005-09-01
申请人： Louis C. Hsu , Lowrence A. Clevenger , Timothy J. Dalton , Carl J. Radens , Keith Kwong Hon Wong , Chih-Chao Yang
发明人： Louis C. Hsu , Lowrence A. Clevenger , Timothy J. Dalton , Carl J. Radens , Keith Kwong Hon Wong , Chih-Chao Yang
IPC分类号： H01P1/10
CPC分类号： H01H50/005 , H01H2050/007 , Y10T29/4902 , Y10T29/49105 , Y10T29/49147
摘要： A MEM switch is described having a free moving element within in micro-cavity, and guided by at least one inductive element. The switch consists of an upper inductive coil; an optional lower inductive coil, each having a metallic core preferably made of permalloy; a micro-cavity; and a free-moving switching element preferably also made of magnetic material. Switching is achieved by passing a current through the upper coil, inducing a magnetic field in the coil element. The magnetic field attracts the free-moving magnetic element upwards, shorting two open wires and thus, closing the switch. When the current flow stops or is reversed, the free-moving magnetic element drops back by gravity to the bottom of the micro-cavity and the wires open. When the chip is not mounted with the correct orientation, gravity cannot be used. In such an instance, a lower coil becomes necessary to pull the free-moving switching element back and holding it at its original position.
摘要翻译：描述了一种MEM开关，其具有在微腔内的自由移动元件，并由至少一个电感元件引导。开关由上感应线圈组成; 可选的下感应线圈，每个具有优选由坡莫合金制成的金属芯; 微腔; 以及优选也由磁性材料制成的自由移动的开关元件。通过使电流通过上部线圈来实现切换，从而在线圈元件中产生磁场。磁场向上吸引自由移动的磁性元件，短路两根开放的电线，从而闭合开关。当电流停止或反转时，自由移动的磁性元件通过重力返回到微腔的底部并且电线打开。当芯片未正确安装时，重力不能使用。在这种情况下，需要下部线圈将自由移动的开关元件拉回并将其保持在其原始位置。

9. 发明授权

US08754400B2 Two-dimensional patterning employing self-assembled material 失效
标题翻译：采用自组装材料的二维图案
公开(公告)号：US08754400B2
公开(公告)日：2014-06-17
申请号：US13432036
申请日：2012-03-28
申请人： Timothy J. Dalton , Bruce B. Doris , Ho-Cheol Kim , Carl J. Radens
发明人： Timothy J. Dalton , Bruce B. Doris , Ho-Cheol Kim , Carl J. Radens
IPC分类号： H01L29/06 , H01L31/0328 , H01L31/0336 , H01L31/072 , H01L31/109
CPC分类号： H01L21/0337 , B81C1/00031 , B81C2201/0149 , B82Y10/00 , B82Y30/00 , H01L21/0338 , Y10T428/24612
摘要： A first nanoscale self-aligned self-assembled nested line structure having a sublithographic width and a sublithographic spacing and running along a first direction is formed from first self-assembling block copolymers within a first layer. The first layer is filled with a filler material and a second layer is deposited above the first layer containing the first nanoscale nested line structure. A second nanoscale self-aligned self-assembled nested line structure having a sublithographic width and a sublithographic spacing and running in a second direction is formed from second self-assembling block copolymers within the second layer. The composite pattern of the first nanoscale nested line structure and the second nanoscale nested line structure is transferred into an underlayer beneath the first layer to form an array of structures containing periodicity in two directions.
摘要翻译：具有亚光刻宽度和亚光刻距离并沿着第一方向延伸的第一纳米级自对准自组装嵌套线结构由第一层内的第一自组装嵌段共聚物形成。第一层填充有填充材料，并且第二层沉积在包含第一纳米级嵌套线结构的第一层之上。具有亚光刻宽度和亚光刻距离并沿第二方向运行的第二纳米级自对准自组装嵌套线结构由第二层内的第二自组装嵌段共聚物形成。第一纳米级嵌套线结构和第二纳米级嵌套线结构的复合图案被转移到第一层下面的底层中以形成在两个方向上包含周期性的结构阵列。

10. 发明申请

US20110100420A1 PHOTOVOLTAIC MODULE WITH A CONTROLLABLE INFRARED PROTECTION LAYER 审中-公开
标题翻译：具有可控红外保护层的光伏模块
公开(公告)号：US20110100420A1
公开(公告)日：2011-05-05
申请号：US12887156
申请日：2010-09-21
申请人： Lawrence A. Clevenger , Timothy J. Dalton , Maxime Darnon , Rainer Krause , Gerd Pfeiffer , Kevin Prettyman , Carl J. Radens , Brian C. Sapp
发明人： Lawrence A. Clevenger , Timothy J. Dalton , Maxime Darnon , Rainer Krause , Gerd Pfeiffer , Kevin Prettyman , Carl J. Radens , Brian C. Sapp
IPC分类号： H01L31/052
CPC分类号： H01L31/0549 , G02B26/007 , H01L31/048 , H01L31/0488 , H01L31/049 , Y02E10/52
摘要： An apparatus, system, and method are disclosed for a photovoltaic module, the photovoltaic module comprising a plurality of photovoltaic cells, a controllable infrared protection layer, and a protection switching means. The controllable infrared protection layer is for reducing the infrared radiation absorbed by the photovoltaic module, where the controllable infrared protection layer has a first state and a second state. When the infrared protection layer is in the first state the transmission of infrared radiation to the photovoltaic cells is higher than when the infrared protection layer is in the second state. The protection switching means is for switching the controllable infrared protection layer between the first state and the second state.
摘要翻译：公开了一种用于光伏模块的装置，系统和方法，所述光伏模块包括多个光伏电池，可控红外保护层和保护开关装置。可控制的红外保护层用于减少由光伏组件吸收的红外线辐射，其中可控红外保护层具有第一状态和第二状态。当红外线保护层处于第一状态时，红外线辐射向光伏电池的传输比红外线保护层处于第二状态时高。保护切换装置用于在第一状态和第二状态之间切换可控红外保护层。

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