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    • 7. 发明申请
    • FLAT PANEL DISPLAY AND METHOD OF MANUFACTURING THE SAME
    • 平板显示器及其制造方法
    • US20120326158A1
    • 2012-12-27
    • US13454965
    • 2012-04-24
    • Cheol-Ho Park
    • Cheol-Ho Park
    • H01L29/786H01L21/336
    • H01L27/1262H01L27/1274
    • A flat panel display having a thin-film transistor (TFT) and a pixel unit and a method of manufacturing the same are disclosed. In one embodiment, the method includes forming a step difference layer having a relatively high step and a relatively low step on a substrate and forming an amorphous silicon layer on the step difference layer along a height shape of the step difference layer. The method further includes crystallizing the amorphous silicon layer into a crystalline silicon layer and polishing the crystalline silicon layer to form a planarized surface of the crystalline silicon layer having no height differences so that the crystalline silicon layer remains on a region corresponding to the low step and an active layer is formed. According to this method, crystallization protrusions are effectively removed from the active layer, and thus, stable brightness characteristics of the display apparatus are guaranteed.
    • 公开了一种具有薄膜晶体管(TFT)和像素单元的平板显示器及其制造方法。 在一个实施例中,该方法包括在衬底上形成具有相对较高台阶和相对较低台阶的台阶差分层,并沿台阶差层的高度形状在台阶差层上形成非晶硅层。 该方法还包括将非晶硅层结晶成晶体硅层并抛光晶体硅层以形成不具有高度差的晶体硅层的平坦化表面,使得晶体硅层保留在对应于低阶的区域上, 形成有源层。 根据该方法,从有源层有效地去除了结晶化突起,保证了显示装置的稳定的亮度特性。
    • 9. 发明授权
    • Flat panel display and method of manufacturing the same
    • 平板显示器及其制造方法
    • US08703589B2
    • 2014-04-22
    • US13454965
    • 2012-04-24
    • Cheol-Ho Park
    • Cheol-Ho Park
    • H01L21/20H01L21/36H01L21/84
    • H01L27/1262H01L27/1274
    • A flat panel display having a thin-film transistor (TFT) and a pixel unit and a method of manufacturing the same are disclosed. In one embodiment, the method includes forming a step difference layer having a relatively high step and a relatively low step on a substrate and forming an amorphous silicon layer on the step difference layer along a height shape of the step difference layer. The method further includes crystallizing the amorphous silicon layer into a crystalline silicon layer and polishing the crystalline silicon layer to form a planarized surface of the crystalline silicon layer having no height differences so that the crystalline silicon layer remains on a region corresponding to the low step and an active layer is formed. According to this method, crystallization protrusions are effectively removed from the active layer, and thus, stable brightness characteristics of the display apparatus are guaranteed.
    • 公开了一种具有薄膜晶体管(TFT)和像素单元的平板显示器及其制造方法。 在一个实施例中,该方法包括在衬底上形成具有相对较高台阶和相对较低台阶的台阶差分层,并沿台阶差层的高度形状在台阶差层上形成非晶硅层。 该方法还包括将非晶硅层结晶成晶体硅层并抛光晶体硅层以形成不具有高度差的晶体硅层的平坦化表面,使得晶体硅层保留在对应于低阶的区域上, 形成有源层。 根据该方法,从有源层有效地去除了结晶化突起,保证了显示装置的稳定的亮度特性。
    • 10. 发明申请
    • Crystallization apparatus using sequential lateral solidification
    • 使用顺序横向凝固的结晶装置
    • US20120111267A1
    • 2012-05-10
    • US13317694
    • 2011-10-26
    • Cheol-Ho Park
    • Cheol-Ho Park
    • B05C9/00B05C11/00
    • B23K26/064H01L21/67115H01L27/1285
    • A crystallization apparatus that performs crystallization on a substrate using sequential lateral solidification (SLS) includes a laser generating device for emitting a laser beam, a first telescope lens module and a second telescope lens module at one side of the laser generating device for minimizing a divergent angle of a laser beam emitted by the laser generating device; and a main optical system at one side of the second telescope lens module for uniformizing and amplifying a laser beam transmitted through the second telescope lens module. The main optical system is rotatably formed with respect to the laser generating device.
    • 使用连续横向固化(SLS)在基板上进行结晶的结晶装置包括用于发射激光束的激光发生装置,第一望远镜透镜模块和第二望远镜透镜模块,其位于激光发生装置的一侧,以最小化发散 由激光发生装置发射的激光束的角度; 以及在第二望远镜透镜模块的一侧的主光学系统,用于使透射通过第二望远镜透镜模块的激光束均匀化和放大。 主光学系统相对于激光发生装置可旋转地形成。