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    • 2. 发明授权
    • Self-aligned method of fabricating terrace gate DMOS transistor
    • 制造平台门DMOS晶体管的自对准方法
    • US5879994A
    • 1999-03-09
    • US842661
    • 1997-04-15
    • Sze-Hon KwanIzak BencuyaSteven P. Sapp
    • Sze-Hon KwanIzak BencuyaSteven P. Sapp
    • H01L21/28H01L21/336H01L29/423H01L29/78
    • H01L29/66712H01L21/28114H01L29/42368H01L29/7802Y10S148/126Y10S438/975
    • An active mask is used to etch field oxide in active areas down to an n- epitaxial substrate. After gate oxide growth, a polysilicon layer is deposited and planarized. The active mask defines the polysilicon gate critical dimension for a terrace gate DMOS structure. The edges of the polysilicon gates are self-aligned to the edges of the thick terrace gate oxide. Because no interlayer alignment is required to delineate the polysilicon gate, the design need not provide for alignment tolerance. A non-critical mask is deposited overlapping the terrace oxide. An etch back to field oxide in exposed areas is performed. An oxide-selective etch is performed to reduce the oxide thickness in source regions. Self-aligned body implantation, body contact masking and implantation, and source masking and implantation are performed. A dielectric is deposited. A source contact mask is deposited and a contact etch is performed. Source metal is deposited, and passivation layer is formed. Gate-drain capacitance caused by polysilicon gate overlap of the substrate is minimized as the overlap is minimized. Because input capacitance is reduced, switching speed is increased. This self-aligned feature also results in a smaller cell pitch dimension and higher packing density. Therefore, the specific ON resistance is reduced and current driving capacity is also greatly elevated.
    • 使用有源掩模来蚀刻到n-外延衬底的有源区域中的场氧化物。 栅极氧化物生长后,沉积多晶硅层并进行平面化。 有源掩模定义了用于露台门DMOS结构的多晶硅栅极临界尺寸。 多晶硅栅极的边缘与厚平台栅极氧化物的边缘自对准。 由于不需要层间对准来描绘多晶硅栅极,所以设计不需要提供对准公差。 沉积与阳极氧化物重叠的非关键掩模。 执行在暴露区域中回到场氧化物的蚀刻。 进行氧化物选择性蚀刻以减少源极区域中的氧化物厚度。 进行自对准体植入,体接触掩蔽和植入,以及源掩蔽和植入。 沉积电介质。 沉积源极接触掩膜并进行接触蚀刻。 源金属被沉积,形成钝化层。 当重叠被最小化时,由衬底的多晶硅栅极重叠引起的栅 - 漏电容最小化。 由于输入电容降低,开关速度提高。 这种自对准特征还导致更小的电池间距尺寸和更高的包装密度。 因此,特定的导通电阻降低,电流驱动能力也大大提高。
    • 9. 发明授权
    • Fabrication of junction field effect transistor with filled grooves
    • 具有填充沟槽的结型场效应晶体管的制造
    • US4543706A
    • 1985-10-01
    • US583514
    • 1984-02-24
    • Izak BencuyaAdrian I. Cogan
    • Izak BencuyaAdrian I. Cogan
    • H01L29/10H01L21/223H01L21/31
    • H01L29/1066
    • Junction field effect transistor, specifically a static induction transistor and method of fabricating. A low resistivity N-type layer is formed at the surface of a high resistivity N-type epitaxial layer which has been grown on a low resistivity N-type substrate of silicon. The surface of the low resistivity N-type layer is coated with silicon nitride, portions of the silicon nitride are removed, and the silicon is etched to form parallel grooves with interposed ridges of silicon. Silicon dioxide is grown in the grooves, removed from the end walls of the grooves, and P-type zones are formed at the end walls of the grooves. Metal contacts are applied to the P-type zones at the end walls of the grooves. The grooves are filled with filler material and materials are etched away to produce a flat, planar surface with low resistivity N-type silicon of the ridges exposed in the surface and with filler material in the grooves also exposed at the surface. A large area metal contact is applied which extends across the surface and makes ohmic contact to the low resistivity N-type silicon of all the ridges.
    • 结型场效应晶体管,特别是静态感应晶体管及其制造方法。 在低电阻N型硅衬底上生长的高电阻率N型外延层的表面形成低电阻率N型层。 低电阻率N型层的表面涂覆有氮化硅,部分氮化硅被去除,并且蚀刻硅以形成具有插入的硅脊的平行凹槽。 在凹槽中生长二氧化硅,从凹槽的端壁移除,并且在凹槽的端壁处形成P型区域。 金属触点施加到槽的端壁处的P型区域。 凹槽填充有填充材料,并且材料被蚀刻掉以产生平坦的平坦表面,其表面露出的脊的电阻率低的N型硅,并且槽中的填充材料也暴露在表面。 施加大面积金属接触,其延伸穿过表面并与所有脊的低电阻率N型硅欧姆接触。