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1. 发明申请

US20050194979A1 Online fiber optic sensor for detecting partial discharge and similar events in large utility station transformers and the like 有权
标题翻译：用于检测大型电站变压器等中的局部放电和类似事件的在线光纤传感器
公开(公告)号：US20050194979A1
公开(公告)日：2005-09-08
申请号：US10794177
申请日：2004-03-05
申请人： Harry Roman , Kenneth Farmer , Xiaodong Wang , Baoqing Li
发明人： Harry Roman , Kenneth Farmer , Xiaodong Wang , Baoqing Li
IPC分类号： G01R31/08 , G01R31/12 , H01H9/50
CPC分类号： G01R31/1272 , G01R31/1209
摘要： An approved method and apparatus for detecting partial discharge events within a transformer comprises asserting a MEMS acoustical probe through the wall of the transformer to optically measure partial discharge events. In an enhanced embodiment, temperature compensation is also possible, and detection may be confirmed via an independent electromagnetic or other sensor.
摘要翻译：用于检测变压器内的局部放电事件的认可方法和装置包括通过变压器的壁断言MEMS声学探针以光学地测量局部放电事件。在增强的实施例中，温度补偿也是可能的，并且可以通过独立的电磁或其它传感器来确认检测。

2. 发明授权

US07561277B2 MEMS fiber optic microphone 有权
标题翻译： MEMS光纤麦克风
公开(公告)号：US07561277B2
公开(公告)日：2009-07-14
申请号：US11750643
申请日：2007-05-18
申请人： Ken K. Chin , Guanhua Feng , Harry Roman
发明人： Ken K. Chin , Guanhua Feng , Harry Roman
IPC分类号： G01B9/02
CPC分类号： G01L9/0079 , G01H9/004
摘要： The theory, design, fabrication, and characterization of MEMS (micro electrical mechanical system) Fabry-Perot diaphragm-fiber optic microphone are described in the present invention. By using MEMS technology in processing and packaging, a square 1.9 mm×1.9 mm, 2 μ thick SiO2 diaphragm with a 350 μ square embossed center of silicon is mechanically clamped to the ferrule of a single mode fiber to keep its closeness (5 μ) and perpendicular orientation with respect to the diaphragm. Static measurement of optical output power versus the pressure on membrane reveals more than one period of Fabry-Perot interference, thereby generating a Fabry-Perot diaphragm-fiber interferometer device accurately reproducing audible acoustic wave.
摘要翻译：在本发明中描述了MEMS（微机电系统）法布里 - 珀罗隔膜 - 光纤麦克风的理论，设计，制造和表征。通过在加工和封装中使用MEMS技术，将一个方形的1.9mm×1.9mm的2μm厚的SiO 2隔膜与350μm方形的压花中心的硅片机械地夹紧到单模光纤的套圈上，以保持其接近（5μ）并且相对于隔膜垂直取向。光输出功率与膜上压力的静态测量显示了Fabry-Perot干涉的多于一个周期，从而生成准确再现声音波的法布里 - 珀罗光纤干涉仪。

3. 发明授权

US07697797B2 Aligned embossed diaphragm based fiber optic sensor 失效
标题翻译：对准压花隔膜基光纤传感器
公开(公告)号：US07697797B2
公开(公告)日：2010-04-13
申请号：US12237744
申请日：2008-09-25
申请人： Ken K Chin , Guanhua Feng , Ivan Padron , Harry Roman
发明人： Ken K Chin , Guanhua Feng , Ivan Padron , Harry Roman
IPC分类号： G02B6/00 , G02B6/12 , G02B6/26 , G02B6/32 , G02B6/42 , G02B6/38 , G01B9/02
CPC分类号： G01J9/02 , G01H9/004 , G01J2009/023 , G01L9/0079
摘要： The present invention is a diaphragm-fiber optic sensor (DFOS), interferometric sensor. This DFOS is based on the principles of Fabry-Perot and Michelson/Mach-Zehnder. The sensor is low cost and is designed with high efficiency, reliability, and Q-point stability, fabricated using MEMS (micro mechanic-electrical system) technology, and has demonstrated excellent performance. A DFOS according to the invention includes a cavity between two surfaces: a diaphragm made of silicon or other material with a rigid body (or boss) at the center and clamped along its edge, and the endface of a single mode optic fiber. By utilizing MEMS technology, the gap width between the diaphragm and the fiber endface is made accurately, ranging from 1 micron to 10 microns. To stabilize the Q-point of the DFOS when in use as an acoustic sensor, a system of microchannels is built in the structure of the diaphragm so that the pressure difference on two sides of the diaphragm is kept a constant, independent of the hydraulic pressure and/or low frequency noise when the device is inserted in liquid mediums.
摘要翻译：本发明是一种隔膜光纤传感器（DFOS），干涉式传感器。该DFOS基于法布里 - 珀罗和迈克尔逊/马赫 - 曾德的原理。传感器成本低，采用MEMS（微机电系统）技术制造，具有高效率，可靠性和Q点稳定性设计，并表现出优异的性能。根据本发明的DFOS包括两个表面之间的空腔：由硅或其它材料制成的隔膜，其中心处具有刚性体（或凸起）并沿着其边缘夹持，并且单模光纤的端面。通过利用MEMS技术，隔膜和光纤端面之间的间隙宽度精确地制成，范围从1微米到10微米。为了在用作声学传感器时稳定DFOS的Q点，在隔膜的结构中建立了微通道系统，使隔膜两侧的压差保持恒定，与液压无关和/或当设备插入液体介质时的低频噪声。

4. 发明申请

US20090086214A1 ALIGNED EMBOSSED DIAPHRAGM BASED FIBER OPTIC SENSOR 失效
标题翻译：对准基于印刷电路图的光纤传感器
公开(公告)号：US20090086214A1
公开(公告)日：2009-04-02
申请号：US12237744
申请日：2008-09-25
申请人： Ken K. Chin , Guanhua Feng , Ivan Pardon , Harry Roman
发明人： Ken K. Chin , Guanhua Feng , Ivan Pardon , Harry Roman
IPC分类号： G01B9/02 , B29D11/00
CPC分类号： G01J9/02 , G01H9/004 , G01J2009/023 , G01L9/0079
摘要： The present invention is a diaphragm-fiber optic sensor (DFOS), interferometric sensor. This DFOS is based on the principles of Fabry-Perot and Michelson/Mach-Zehnder. The sensor is low cost and is designed with high efficiency, reliability, and Q-point stability, fabricated using MEMS (micro mechanic-electrical system) technology, and has demonstrated excellent performance. A DFOS according to the invention includes a cavity between two surfaces: a diaphragm made of silicon or other material with a rigid body (or boss) at the center and clamped along its edge, and the endface of a single mode optic fiber. By utilizing MEMS technology, the gap width between the diaphragm and the fiber endface is made accurately, ranging from 1 micron to 10 microns. To stabilize the Q-point of the DFOS when in use as an acoustic sensor, a system of microchannels is built in the structure of the diaphragm so that the pressure difference on two sides of the diaphragm is kept a constant, independent of the hydraulic pressure and/or low frequency noise when the device is inserted in liquid mediums.
摘要翻译：本发明是一种隔膜光纤传感器（DFOS），干涉式传感器。该DFOS基于法布里 - 珀罗和迈克尔逊/马赫 - 曾德的原理。传感器成本低，采用MEMS（微机电系统）技术制造，具有高效率，可靠性和Q点稳定性设计，并表现出优异的性能。根据本发明的DFOS包括两个表面之间的空腔：由硅或其它材料制成的隔膜，其中心处具有刚性体（或凸起）并沿其边缘夹持，并且单模光纤的端面。通过利用MEMS技术，隔膜和光纤端面之间的间隙宽度精确地制成，范围从1微米到10微米。为了在用作声学传感器时稳定DFOS的Q点，在隔膜的结构中建立了微通道系统，使隔膜两侧的压差保持恒定，与液压无关和/或当设备插入液体介质时的低频噪声。

5. 发明申请

US20080075404A1 ALIGNED EMBOSSED DIAPHRAGM BASED FIBER OPTIC SENSOR 审中-公开
标题翻译：对准基于印刷电路图的光纤传感器
公开(公告)号：US20080075404A1
公开(公告)日：2008-03-27
申请号：US11750569
申请日：2007-05-18
申请人： Ken Chin , Guanhua Feng , Ivan Padron , Harry Roman
发明人： Ken Chin , Guanhua Feng , Ivan Padron , Harry Roman
IPC分类号： G02B6/00 , G01B9/02
CPC分类号： G01J9/02 , G01H9/004 , G01J2009/023 , G01L9/0079
摘要： The present invention is a diaphragm-fiber optic sensor (DFOS), interferometric sensor. This DFOS is based on the principles of Fabry-Perot and Michelson/Mach-Zehnder. The sensor is low cost and is designed with high efficiency, reliability, and Q-point stability, fabricated using MEMS (micro mechanic-electrical system) technology, and has demonstrated excellent performance. A DFOS according to the invention includes a cavity between two surfaces: a diaphragm made of silicon or other material with a rigid body (or boss) at the center and clamped along its edge, and the endface of a single mode optic fiber. By utilizing MEMS technology, the gap width between the diaphragm and the fiber endface is made accurately, ranging from 1 micron to 10 microns. To stabilize the Q-point of the DFOS when in use as an acoustic sensor, a system of microchannels is built in the structure of the diaphragm so that the pressure difference on two sides of the diaphragm is kept a constant, independent of the hydraulic pressure and/or low frequency noise when the device is inserted in liquid mediums.
摘要翻译：本发明是一种隔膜光纤传感器（DFOS），干涉式传感器。该DFOS基于法布里 - 珀罗和迈克尔逊/马赫 - 曾德的原理。传感器成本低，采用MEMS（微机电系统）技术制造，具有高效率，可靠性和Q点稳定性设计，并表现出优异的性能。根据本发明的DFOS包括两个表面之间的空腔：由硅或其它材料制成的隔膜，其中心处具有刚性体（或凸起）并沿着其边缘夹持，并且单模光纤的端面。通过利用MEMS技术，隔膜和光纤端面之间的间隙宽度精确地制成，范围从1微米到10微米。为了在用作声学传感器时稳定DFOS的Q点，在隔膜的结构中建立了微通道系统，使隔膜两侧的压差保持恒定，与液压无关和/或当设备插入液体介质时的低频噪声。

6. 发明申请

US20080049230A1 MEMS FIBER OPTIC MICROPHONE 有权
标题翻译： MEMS光纤麦克风
公开(公告)号：US20080049230A1
公开(公告)日：2008-02-28
申请号：US11750643
申请日：2007-05-18
申请人： Ken Chin , Guanhua Feng , Harry Roman
发明人： Ken Chin , Guanhua Feng , Harry Roman
IPC分类号： G01B9/02
CPC分类号： G01L9/0079 , G01H9/004
摘要： The theory, design, fabrication, and characterization of MEMS (micro electrical mechanical system) Fabry-Perot diaphragm-fiber optic microphone are described in the present invention. By using MEMS technology in processing and packaging, a square 1.9 mm×1.9 mm, 2μ thick SiO2 diaphragm with a 350μ square embossed center of silicon is mechanically clamped to the ferrule of a single mode fiber to keep its closeness (5μ) and perpendicular orientation with respect to the diaphragm. Static measurement of optical output power versus the pressure on membrane reveals more than one period of Fabry-Perot interference, thereby generating a Fabry-Perot diaphragm-fiber interferometer device accurately reproducing audible acoustic wave.
摘要翻译：在本发明中描述了MEMS（微机电系统）法布里 - 珀罗隔膜 - 光纤麦克风的理论，设计，制造和表征。通过在加工和封装中使用MEMS技术，将具有350μm方形压花中心的正方形1.9mm×1.9mm，2μm厚的SiO 2膜隔膜机械地夹紧到单模光纤的套圈，以保持其接近（5mu）和相对于隔膜的垂直取向。光输出功率与膜上压力的静态测量显示了Fabry-Perot干涉的多于一个周期，从而生成准确再现声音波的法布里 - 珀罗光纤干涉仪。

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