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1. 发明授权

US07697797B2 Aligned embossed diaphragm based fiber optic sensor 失效
标题翻译：对准压花隔膜基光纤传感器
公开(公告)号：US07697797B2
公开(公告)日：2010-04-13
申请号：US12237744
申请日：2008-09-25
申请人： Ken K Chin , Guanhua Feng , Ivan Padron , Harry Roman
发明人： Ken K Chin , Guanhua Feng , Ivan Padron , Harry Roman
IPC分类号： G02B6/00 , G02B6/12 , G02B6/26 , G02B6/32 , G02B6/42 , G02B6/38 , G01B9/02
CPC分类号： G01J9/02 , G01H9/004 , G01J2009/023 , G01L9/0079
摘要： The present invention is a diaphragm-fiber optic sensor (DFOS), interferometric sensor. This DFOS is based on the principles of Fabry-Perot and Michelson/Mach-Zehnder. The sensor is low cost and is designed with high efficiency, reliability, and Q-point stability, fabricated using MEMS (micro mechanic-electrical system) technology, and has demonstrated excellent performance. A DFOS according to the invention includes a cavity between two surfaces: a diaphragm made of silicon or other material with a rigid body (or boss) at the center and clamped along its edge, and the endface of a single mode optic fiber. By utilizing MEMS technology, the gap width between the diaphragm and the fiber endface is made accurately, ranging from 1 micron to 10 microns. To stabilize the Q-point of the DFOS when in use as an acoustic sensor, a system of microchannels is built in the structure of the diaphragm so that the pressure difference on two sides of the diaphragm is kept a constant, independent of the hydraulic pressure and/or low frequency noise when the device is inserted in liquid mediums.
摘要翻译：本发明是一种隔膜光纤传感器（DFOS），干涉式传感器。该DFOS基于法布里 - 珀罗和迈克尔逊/马赫 - 曾德的原理。传感器成本低，采用MEMS（微机电系统）技术制造，具有高效率，可靠性和Q点稳定性设计，并表现出优异的性能。根据本发明的DFOS包括两个表面之间的空腔：由硅或其它材料制成的隔膜，其中心处具有刚性体（或凸起）并沿着其边缘夹持，并且单模光纤的端面。通过利用MEMS技术，隔膜和光纤端面之间的间隙宽度精确地制成，范围从1微米到10微米。为了在用作声学传感器时稳定DFOS的Q点，在隔膜的结构中建立了微通道系统，使隔膜两侧的压差保持恒定，与液压无关和/或当设备插入液体介质时的低频噪声。

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