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1. 发明专利

DE4446890A1 Capacitive acceleration sensor for automobile air-bag restraint system 未知
公开(公告)号：DE4446890A1
公开(公告)日：1995-06-29
申请号：DE4446890
申请日：1994-12-27
申请人： HITACHI LTD , HITACHI AUTOMOTIVE ENG
发明人： SUZUKI MASAYOSHI , SASAYAMA TAKAO , HANZAWA KEIZI , ICHIKAWA NORIO , HORIE JUNICHI , SUGISAWA YUKIKO , OGASAWARA YUUJI
IPC分类号： G01P1/02 , G01P15/125 , H01L49/00 , B60R21/32
摘要： The acceleration sensor has a moveable capacitor electrode (5) acted on by the acceleration in the form of an etched silicon plate, inserted between a pair of solid dielectric plates (22, 23) of glass or silicon oxide, each with an attached fixed capacitor electrode (24, 25). Pref. the moveable capacitor electrode is supported by a pair of relatively spaced flexible arms (14) extending from a carrier section (20) clamped between the solid dielectric plates.

2. 发明专利

DE69116435T2 未知
公开(公告)号：DE69116435T2
公开(公告)日：1996-08-14
申请号：DE69116435
申请日：1991-05-24
申请人： HITACHI LTD , HITACHI AUTOMOTIVE ENG
发明人： TSUCHITANI SHIGEKI , SUZUKI SEIKO , MIKI MASAYUKI , TANAKA TOMOYUKI , MATSUMOTO MASAHIRO , ICHIKAWA NORIO , EBINE HIROMICHI , SUGISAWA YUKIKO , SATO KANEMASA , UENO SADAYASU , ASANO YASUHIRO , KUBOTA MASANORI , SUZUKI MASAYOSHI
IPC分类号： G01P1/00 , G01P15/125 , G01P15/13
摘要： A semiconductor acceleration sensor (1) is formed by a cantilever (4) having a conductive movable electrode (5) of predetermined mass at one end, at least one pair of fixed conductive electrodes (8, 9) which are stationary with respect to the movable electrode (5) located on opposing sides of the movable electrode, and gaps provided between the movable electrode and the fixed electrodes. To prevent the movable electrode becoming fused to the contacted fixed electrode, in a first aspect of this invention, an insulating layer (6) is provided between the movable electrode and fixed electrodes, the layer being either on the movable electrode or on the fixed electrodes and in a second aspect of this invention the movable electrode or, preferably, the fixed electrodes, are formed of a high melting point material. In such a second aspect, to improve adhesion between the high melting point material and a substrate (3a, 3b) to which the fixed electrodes (8 min , 9 min ) are mounted, a lower melting point material is firstly coated on said substrates. In a feature of the invention, a detector unit processing circuit (Figure 20) is described in which the output characteristic of the circuit may be digitally adjusted by suitable switching of a plurality of resistors (Rs, Rf), and in a second feature, the sensor chip and the detector unit integrated circuit are located on a common base (303) and mounted in a hermetically sealed chamber to prevent adverse environmental effects affecting operation of the sensor and detector unit assembly. A gas having a dew point of -40 DEG C or lower is, advantageously, charged into the hermetically sealed chamber.

3. 发明专利

DE69116435D1 未知
公开(公告)号：DE69116435D1
公开(公告)日：1996-02-29
申请号：DE69116435
申请日：1991-05-24
申请人： HITACHI LTD , HITACHI AUTOMOTIVE ENG
发明人： TSUCHITANI SHIGEKI , SUZUKI SEIKO , MIKI MASAYUKI , TANAKA TOMOYUKI , MATSUMOTO MASAHIRO , ICHIKAWA NORIO , EBINE HIROMICHI , SUGISAWA YUKIKO , SATO KANEMASA , UENO SADAYASU , ASANO YASUHIRO , KUBOTA MASANORI , SUZUKI MASAYOSHI
IPC分类号： G01P1/00 , G01P15/125 , G01P15/13
摘要： A semiconductor acceleration sensor (1) is formed by a cantilever (4) having a conductive movable electrode (5) of predetermined mass at one end, at least one pair of fixed conductive electrodes (8, 9) which are stationary with respect to the movable electrode (5) located on opposing sides of the movable electrode, and gaps provided between the movable electrode and the fixed electrodes. To prevent the movable electrode becoming fused to the contacted fixed electrode, in a first aspect of this invention, an insulating layer (6) is provided between the movable electrode and fixed electrodes, the layer being either on the movable electrode or on the fixed electrodes and in a second aspect of this invention the movable electrode or, preferably, the fixed electrodes, are formed of a high melting point material. In such a second aspect, to improve adhesion between the high melting point material and a substrate (3a, 3b) to which the fixed electrodes (8 min , 9 min ) are mounted, a lower melting point material is firstly coated on said substrates. In a feature of the invention, a detector unit processing circuit (Figure 20) is described in which the output characteristic of the circuit may be digitally adjusted by suitable switching of a plurality of resistors (Rs, Rf), and in a second feature, the sensor chip and the detector unit integrated circuit are located on a common base (303) and mounted in a hermetically sealed chamber to prevent adverse environmental effects affecting operation of the sensor and detector unit assembly. A gas having a dew point of -40 DEG C or lower is, advantageously, charged into the hermetically sealed chamber.

4. 发明专利

JPS62195579A OBSTACLE DETECTING DEVICE FOR VEHICLE 失效
公开(公告)号：JPS62195579A
公开(公告)日：1987-08-28
申请号：JP3743086
申请日：1986-02-24
申请人： HITACHI LTD , HITACHI AUTOMOTIVE ENG
发明人： SUGISAWA YUKIKO , TAKEZAKI JIRO
IPC分类号： G01S17/93 , G01S17/88
摘要： PURPOSE:To reduce the size of a device while maintaining detection characteristics at long distance and short distance by varying the detection range for an obstacle by a single projection system according to the speed of a vehicle. CONSTITUTION:A laser diode LD 3 is driven with a specific-period pulse from a generator 1 and a beam is converged by a convex lens 4a for light transmission and projected. Reflected light from the obstacle is photodetected by an element 5b through a convex lens 4b for light reception, and a light receiving element 5a is also provided even on the light transmission side. Signals from the respective light receiving elements are made into pulses 7a and 7b, which are counted by an FF 8 and a counter 9; and a microcomputer 11 computes the distance to the obstacle. The device 11 varies the position of the LD 3 through a moving device 12 with the output of a vehicle speed sensor 10. Consequently, the angle of divergence of the beam is varied according to the vehicle speed.

5. 发明专利

JPH0447272A SEMICONDUCTOR ACCELERATION SENSOR 失效
公开(公告)号：JPH0447272A
公开(公告)日：1992-02-17
申请号：JP15521890
申请日：1990-06-15
申请人： HITACHI LTD , HITACHI AUTOMOTIVE ENG
发明人： ICHIKAWA NORIO , SUZUKI KIYOMITSU , TSUCHIYA SHIGEKI , MIKI MASAYUKI , EBINE HIROMICHI , SUGISAWA YUKIKO
IPC分类号： G01P15/125 , B81B3/00
摘要： PURPOSE:To reduce the cost of a sensor, to facilitate the mounting of the sensor to a car and to enhance reliability by forming the conductive fixed electrode opposed to a movable electrode as a single layer or multilayer structure using one or more kind of a metal material. CONSTITUTION:A metal having a high m.p. such as Ni, W or Pt is applied to a glass substrate as a fixed electrode material by sputtering. In order to enhance the film bonding strength to substrates 2, 3, a material having good film bonding properties to the substrates, for example, an Al alloy or Cr is applied to the substrates 2, 3 as an extremely thin layer and a high m.p. metal such as Mo or Ti is further applied thereto to form a two-layer structure consisting of the first and second layers. When acceleration is applied to a sensor 10 in a vertical direction, inertial force acts on an inertia body 5 and a cantilever 4 is bent to change the inertia body 5 in the direction reverse to the acceleration acting on the sensor 10. As a result, the electrostatic capacity of the condensor formed from two upper and lower electrodes 6, 7 and the inertia body 5 changes corresponding to the change of the magnitude of the gaps between the inertia body 5 and the electrodes 6, 7 provided to the substrates 2, 3 and acceleration is detected from the acceleration dependence thereof.

6. 发明专利

JPS63106587A DETECTING APPARATUS FOR OBSTACLE 失效
公开(公告)号：JPS63106587A
公开(公告)日：1988-05-11
申请号：JP25174886
申请日：1986-10-24
申请人： HITACHI LTD , HITACHI AUTOMOTIVE ENG
发明人： SUGISAWA YUKIKO , TAKEZAKI JIRO
IPC分类号： G01S17/93 , G01S17/88
摘要： PURPOSE:To lower the output of laser light except for a time when it needs to be maintained for safety, and thereby to ensure safety for eyes, by lessening the power of emitted light as a detection distance to an obstacle decreases. CONSTITUTION:Receiving a pulse from a pulse generator 1, a driver 2 outputs a prescribed amount of current to drive a laser diode 3. An emitted light passes through a convex lens 4a and irradiates front ward. A reflected light from an obstacle is condensed on a photodetector 5b through a convex lens 4b. An output signal thereof passes through amplifier circuits 6a, 6b and is converted into a pulse by threshold detectors 7a, 7b. FF 8 is set by a signal from the detector 7a and reset by a signal from the detector 7b. The number of pulses generated from a pulse generator 13 during FF being set is counted by a counter 9, and a microcomputer (CP) 10 calculates a distance to the obstacle, from a count value obtained by the counter. CP 10 controls a variable voltage device 11 in accordance with the distance so that the laser light of a power inversely proportional to the distance can be outputted.

7. 发明专利

JPH0432773A SEMICONDUCTOR ACCELERATION SENSOR AND VEHICLE CONTROL SYSTEM USING SAME 失效
公开(公告)号：JPH0432773A
公开(公告)日：1992-02-04
申请号：JP13849490
申请日：1990-05-30
申请人： HITACHI LTD , HITACHI AUTOMOTIVE ENG
发明人： TSUCHIYA SHIGEKI , SUZUKI KIYOMITSU , TANAKA TOMOYUKI , MIKI MASAYUKI , MATSUMOTO MASAHIRO , ICHIKAWA NORIO , EBINE HIROMICHI , SUGISAWA YUKIKO
IPC分类号： G01P15/12 , G01P15/125 , G01P15/13
摘要： PURPOSE:To eliminate a defect in the operation of a sensor due to melt-sticking by covering at least part of the surface of a conductive inertia body or/and conductive surfaces provided on an upper and a lower insulating substrate facing the inertia body, with an electric insulating material. CONSTITUTION:Laminate structure is formed of a semiconductor silicon plate 1 and two insulating plates 2 and 3 and a cantilever 4 and the inertial body 5 are formed on the plate 1. Electric insulating layers 6 and 7 are formed entirely on the top and reverse surfaces of the inertial body 5 and coupled with the main body of the plate 1 by a lever 4 which is thinner than the inertia body 5. Then when acceleration is applied in the up-down direction of the sensor, an inertial force operates on the inertia body 5 and the lever 4 deflects to displace the inertia body 5 in the opposite direction from the acceleration operating on the sensor. Consequently, the gaps between the inertia body 5 and electrodes 8 and 9 provided to the insulating plates 2 and 3 vary in size, so that capacitors formed of the two upper and lower electrodes 8 and 9 and inertial body 5 vary in electrostatic capacity. The electrostatic capacity type acceleration sensor detects the acceleration by an acceleration detecting circuit 10 from the acceleration dependency of the electrostatic capacity.

8. 发明专利

JPH07306222A ACCELERATION SENSOR 失效
公开(公告)号：JPH07306222A
公开(公告)日：1995-11-21
申请号：JP9987894
申请日：1994-05-13
申请人： HITACHI LTD , HITACHI AUTOMOTIVE ENG
发明人： HANZAWA KEIJI , MATSUMOTO MASAHIRO , SUZUKI MASAYOSHI , ICHIKAWA NORIO , SUGISAWA YUKIKO , HORIE JUNICHI , OGASAWARA YUJI
IPC分类号： G01P15/125 , G12B17/02
摘要： PURPOSE:To detect a capacitance variation signal of a capacitive acceleration sensor highly accurately while reducing the scale of electromagnetic shield and suppressing the effect of disturbance. CONSTITUTION:An acceleration detecting element 2 comprises a movable electrode 6 displaceable depending on the acceleration, and fixed electrodes 7, 8 disposed oppositely to both sides of the movable electrode respectively 6. An electronic element 2 comprises a capacitance detecting part, etc. Electromagnetic shields 20, 21 are laminated on the insulating members 10, 11 of the detecting element 2. A ground conductor pattern 31 is formed on a substrate 32 while covering the detecting element 2 and the IC 50 on the rear side thereof and bonded to the electromagnetic shield 21 through a conductive adhesive 30.

9. 发明专利

JPH07191055A CAPACITIVE ACCELERATION SENSOR 失效
公开(公告)号：JPH07191055A
公开(公告)日：1995-07-28
申请号：JP33100393
申请日：1993-12-27
申请人： HITACHI LTD , HITACHI AUTOMOTIVE ENG
发明人： SUZUKI MASAYOSHI , SASAYAMA TAKAO , HANZAWA KEIJI , ICHIKAWA NORIO , HORIE JUNICHI , SUGISAWA YUKIKO , OGASAWARA YUJI
IPC分类号： G01P1/02 , G01P15/125
摘要： PURPOSE:To easily draw out fixed electrodes by providing dielectric bodies (glass plates) between a mobile electrode and the fixed electrodes. CONSTITUTION:An acceleration sensor is provided with a silicon plate in which a mobile electrode 5 is formed as a weight which is displaced in accordance with acceleration and fixed electrodes 24 and 25 which are provided opposite to the electrode 5. Glass plates 22 and 23 are provided between the mobile electrode 5 and fixed electrodes 24 and 25 as dielectric bodies. A mobile electrode section is composed of the electrode 5, a beam 14 supporting the electrode 5, and weight fixing sections 20 and 21. When the gaps between the electrode (weight) 5 and glass plates 22 and 23 change due to impressed acceleration, the capacitance between the fixed electrodes 24 and 25 changes. Therefore, the acceleration can be recognized from the magnitude of the change.

10. 发明专利

JPH07174779A METHOD FOR DIAGNOSING ACCELERATION SENSOR AND SENSOR CONTROLLER 失效
公开(公告)号：JPH07174779A
公开(公告)日：1995-07-14
申请号：JP32246593
申请日：1993-12-21
申请人： HITACHI LTD , HITACHI AUTOMOTIVE ENG
发明人： OGASAWARA YUJI , SUZUKI MASAKI , HANZAWA KEIJI , ICHIKAWA NORIO , SUGISAWA YUKIKO , HORIE JUNICHI
IPC分类号： G01P21/00 , G01P15/00
摘要： PURPOSE:To provide a method for diagnosing acceleration sensor and sensor controller of a low cost and high reliability which is capable of diagnosing both abnormality and normality of backup sensor without complicating the structure of the sensor controller. CONSTITUTION:An electronic sensor 2 in a controller 1 inputs the electric signal of acceleration level detected in the normal time to a microcomputer 3. Also, from the voltage change in a resistor 9 connected in series to the contact 7 of a backup sensor 5, on-off signal of the contact 7 is input to the microcomputer 3. The microcomputer 3 compares the design function level of the backup sensor 5 and the acceleration level for the on-off motion of the contact 7 to diagnose the normality and abnormality of the backup sensor 5. If it is normal, a driver 4 actuates, current flows from a battery 8 to a squib 6 and the swell of air bag is confirmed.

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