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    • 5. 发明申请
    • Initial Wetting Auxiliary Material for a Vaporiser Body
    • 用于汽化器主体的初始润湿辅助材料
    • US20090129762A1
    • 2009-05-21
    • US11994180
    • 2006-06-30
    • Ulrich GoetzMichael Nurnberger
    • Ulrich GoetzMichael Nurnberger
    • B01D7/00C09D7/00B05D5/00
    • C23C14/20C23C14/243
    • An initial wetting auxiliary material is for applying to a vaporiser surface of an electrically heatable ceramic vaporiser body. The vaporiser body is used for operation in a physical vapour deposition (PVD) metallisation installation for vaporising aluminium. The vaporiser body contains nitrogen as a material component. The auxiliary material comprises a powder mixture which comprises (a) aluminium in powder form having a particle size which is at most 0.6 mm. The aluminium in powder form melts on the vaporiser surface after initiating the operation of the vaporiser body and reacted with the nitrogen of the vaporiser body to form an aluminium nitride layer on the vaporiser surface. The powder mixture further comprises (b) a wetting agent in powder form promoting an even and large-surface distribution of the molten aluminium on the vaporiser surface.
    • 初始润湿辅助材料用于施加到电可加热陶瓷蒸发器主体的蒸发器表面。 蒸发器主体用于在用于汽化铝的物理气相沉积(PVD)金属化装置中操作。 蒸发器体含有氮作为材料成分。 辅助材料包括粉末混合物,其包含(a)具有至多0.6mm的粒度的粉末形式的铝。 粉末形式的铝在开始蒸发器体的操作之后在蒸发器表面上熔化并与蒸发器体的氮气反应,以在蒸发器表面上形成氮化铝层。 粉末混合物还包含(b)粉末形式的润湿剂,促进熔融铝在蒸发器表面上的均匀且大的表面分布。