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    • 1. 发明申请
    • Initial Wetting Auxiliary Material for a Vaporiser Body
    • 用于汽化器主体的初始润湿辅助材料
    • US20090129762A1
    • 2009-05-21
    • US11994180
    • 2006-06-30
    • Ulrich GoetzMichael Nurnberger
    • Ulrich GoetzMichael Nurnberger
    • B01D7/00C09D7/00B05D5/00
    • C23C14/20C23C14/243
    • An initial wetting auxiliary material is for applying to a vaporiser surface of an electrically heatable ceramic vaporiser body. The vaporiser body is used for operation in a physical vapour deposition (PVD) metallisation installation for vaporising aluminium. The vaporiser body contains nitrogen as a material component. The auxiliary material comprises a powder mixture which comprises (a) aluminium in powder form having a particle size which is at most 0.6 mm. The aluminium in powder form melts on the vaporiser surface after initiating the operation of the vaporiser body and reacted with the nitrogen of the vaporiser body to form an aluminium nitride layer on the vaporiser surface. The powder mixture further comprises (b) a wetting agent in powder form promoting an even and large-surface distribution of the molten aluminium on the vaporiser surface.
    • 初始润湿辅助材料用于施加到电可加热陶瓷蒸发器主体的蒸发器表面。 蒸发器主体用于在用于汽化铝的物理气相沉积(PVD)金属化装置中操作。 蒸发器体含有氮作为材料成分。 辅助材料包括粉末混合物,其包含(a)具有至多0.6mm的粒度的粉末形式的铝。 粉末形式的铝在开始蒸发器体的操作之后在蒸发器表面上熔化并与蒸发器体的氮气反应,以在蒸发器表面上形成氮化铝层。 粉末混合物还包含(b)粉末形式的润湿剂,促进熔融铝在蒸发器表面上的均匀且大的表面分布。
    • 3. 发明申请
    • Resistance-heated vaporizer boat
    • 电阻加热蒸发船
    • US20060223020A1
    • 2006-10-05
    • US10541329
    • 2003-12-19
    • Ulrich GoetzRob Lattimer
    • Ulrich GoetzRob Lattimer
    • C21D9/00
    • C23C14/26C23C14/243
    • Resistance-heated ceramic vaporizer boat (10) comprising an elongated vaporizer body having an upper side (1) and a lower side (2) being parallel to each other, and the vaporizer body having plane lateral side surfaces (3) being non-parallel to each other, wherein each of said lateral side surfaces (3) is inclined by an angle of 45° with respect to the upper side (1). Preferably, the end portions at the longitudinal ends of the vaporizer body are reduced, at the lower side (2) thereof, to a predetermined partial thickness (t), whereby a cavity at the upper side (1) of the vaporizer body can be omitted.
    • 电阻加热的陶瓷蒸发器船(10)包括具有彼此平行的上侧(1)和下侧(2)的细长的蒸发器主体,并且所述蒸发器主体具有平面侧面(3)不平行 彼此相对,其中每个所述横向侧表面(3)相对于上侧(1)倾斜45°的角度。 优选地,蒸发器体的纵向端部处的端部在其下侧(2)处被减小到预定的部分厚度(t),由此,蒸发器主体的上侧(1)处的空腔可以是 省略
    • 4. 发明授权
    • Piston consisting of finest grain carbon and method for producing the same
    • 由最优质的碳素组成的活塞及其制造方法
    • US06604501B1
    • 2003-08-12
    • US09763100
    • 2001-02-16
    • Ulrich GoetzRainer Hegermann
    • Ulrich GoetzRainer Hegermann
    • C04B35528
    • C04B35/528F02F3/00F02F7/0087F05C2201/021F05C2253/16
    • The invention concerns a piston of finest grain carbon, having a bending strength of at least 100 MPa, a bending elongation >0.8%, an average interlayer distance c/2 5 nm and a heat conductivity of at least 10 W/mK, and a method for its production comprising: a) compacting of a polyaromatic mesophase powder to almost its final shape; b) heating of the green product at ambient pressure under a non-oxidizing atmosphere to a temperature of between 900 to 1300° C. and maintenance at this temperature; c) high-temperature treatment, thereby heating up to a temperature between 1400 and 2400° C. and holding this temperature for between 2 and 20 hours; d) cooling down of the shaped form to an ambient temperature at less than 4 K/min, and a polyaromatic mesophase powder for the production of such a piston, characterized by a) a portion of quinoline-insoluble components of ≧85 weight %; b) a portion of toluene-insoluble components of ≧90 weight %; wherein c) a shaped form produced from the powder after sintering up to 1000° C. has a mass residue of more than 90 weight % of the mass before sintering.
    • 本发明涉及一种最细颗粒碳的活塞,其弯曲强度为至少100MPa,弯曲伸长率> 0.8%,平均层间距离c / 2 <0.35nm,c方向上的平均微晶尺寸> 5nm, 导热率至少为10W / mK,及其生产方法包括:a)将多芳族中间相粉末压实成几乎其最终形状; b)在环境压力下在非氧化性气氛下将绿色产品加热至900-1300℃的温度,并在该温度下维持; c)进行高温处理,从而加热到1400〜2400℃的温度,保持该温度2〜20小时; d)将成形形式冷却至小于4K / min的环境温度,以及用于生产这种活塞的多芳族中间相粉末,其特征在于:a)一部分喹啉不溶性组分的重量百分比为85% ; b)一部分不大于90重量%的甲苯不溶组分; 其中c)在烧结至1000℃之后由粉末产生的成形形式具有大于烧结前质量的90重量%的质量残余物。
    • 5. 发明授权
    • Vaporizer boat for metal vaporizing
    • 蒸发器用于金属蒸发
    • US06120286A
    • 2000-09-19
    • US93269
    • 1998-06-08
    • Ulrich Goetz
    • Ulrich Goetz
    • C23C14/24C21D9/00
    • C23C14/243Y10S266/90
    • The invention concerns a resistance-heated vaporizer boat for vaporizing metal. According to the invention, a reduced temperature is generated in the edge region, i.e., along the longitudinal edge of the vaporizer boat, such that there is only a very slight wetting tendency along this longitudinal edge. Consequently, the melt can be localized such that it cannot overflow over the longitudinal edges of the vaporizer boat, without a cavity necessarily having to be provided in the vaporization surface of the vaporizer boat. As a result, optimum wetting and constantly targeted vaporization of the metal upwards towards the area to be vapor-deposited are attained.
    • 本发明涉及用于蒸发金属的电阻加热蒸发器船。 根据本发明,在边缘区域,即沿着蒸发器船的纵向边缘产生降低的温度,使得沿该纵向边缘仅存在非常轻微的润湿趋势。 因此,熔体可以被定位成使得其不会在蒸发器船的纵向边缘上溢出,而不必须在蒸发器船的汽化表面中提供空腔。 结果,可获得最佳的润湿和金属向上朝向要气相沉积的区域向上蒸发。
    • 7. 发明授权
    • Resistance-heated vaporizer boat
    • 电阻加热蒸发船
    • US07471884B2
    • 2008-12-30
    • US10541329
    • 2003-12-19
    • Ulrich GoetzRob Lattimer
    • Ulrich GoetzRob Lattimer
    • B01D7/00F27B14/10
    • C23C14/26C23C14/243
    • Resistance-heated ceramic vaporizer boat (10) comprising an elongated vaporizer body having an upper side (1) and a lower side (2) being parallel to each other, and the vaporizer body having plane lateral side surfaces (3) being non-parallel to each other, wherein each of said lateral side surfaces (3) is inclined by an angle of 45° with respect to the upper side (1). Preferably, the end portions at the longitudinal ends of the vaporizer body are reduced, at the lower side (2) thereof, to a predetermined partial thickness (t), whereby a cavity at the upper side (1) of the vaporizer body can be omitted.
    • 电阻加热的陶瓷蒸发器船(10)包括具有彼此平行的上侧(1)和下侧(2)的细长的蒸发器主体,并且所述蒸发器主体具有平面侧面(3)不平行 彼此相对,其中每个所述横向侧表面(3)相对于上侧(1)倾斜45°的角度。 优选地,蒸发器体的纵向端部处的端部在其下侧(2)处被减小到预定的部分厚度(t),由此,蒸发器主体的上侧(1)处的空腔可以是 省略