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    • 1. 发明授权
    • Electrically programmable metal fuse
    • 电子可编程金属保险丝
    • US08421186B2
    • 2013-04-16
    • US13149108
    • 2011-05-31
    • Baozhen LiChunyan E. TianChih-Chao Yang
    • Baozhen LiChunyan E. TianChih-Chao Yang
    • H01L29/00H01L23/525H01H37/76
    • H01L23/5256G11C17/16G11C29/785H01L27/0207H01L2924/0002H01L2924/00
    • A metal electrically programmable fuse (“eFuse”) includes a metal strip, having a strip width, of a metal line adjoined to wide metal line portions, having widths greater than the metal strip width, at both ends of the metal strip. The strip width can be a lithographic minimum dimension, and the ratio of the length of the metal strip to the strip width is greater than 5 to localize heating around the center of the metal strip during programming. Localization of heating reduces required power for programming the metal eFuse. Further, a gradual temperature gradient is formed during the programming within a portion of the metal strip that is longer than the Blech length so that electromigration of metal gradually occurs reliably at the center portion of the metal strip. Metal line portions are provides at the same level as the metal eFuse to physically block debris generated during programming.
    • 金属电可编程保险丝(eFuse)包括在金属条的两端处具有与宽金属线部分相邻的金属线的具有宽度大于金属带宽度的宽度的金属带。 条带宽度可以是光刻最小尺寸,并且金属条带的长度与条带宽度的比率大于5以在编程期间定位围绕金属条的中心的加热。 加热的本地化减少了用于编程金属eFuse所需的电力。 此外,在金属带的长于Blech长度的部分内的编程期间形成逐渐的温度梯度,使得金属的电迁移在金属带的中心部分逐渐发生。 金属线部分提供与金属eFuse相同的水平,以物理阻挡编程期间产生的碎屑。
    • 2. 发明申请
    • ELECTRICALLY PROGRAMMABLE METAL FUSE
    • 电气可编程金属保险丝
    • US20120306048A1
    • 2012-12-06
    • US13149108
    • 2011-05-31
    • Baozhen LiChunyan E. TianChih-Chao Yang
    • Baozhen LiChunyan E. TianChih-Chao Yang
    • H01L23/525H01L21/02
    • H01L23/5256G11C17/16G11C29/785H01L27/0207H01L2924/0002H01L2924/00
    • A metal electrically programmable fuse (“eFuse”) includes a metal strip, having a strip width, of a metal line adjoined to wide metal line portions, having widths greater than the metal strip width, at both ends of the metal strip. The strip width can be a lithographic minimum dimension, and the ratio of the length of the metal strip to the strip width is greater than 5 to localize heating around the center of the metal strip during programming. Localization of heating reduces required power for programming the metal eFuse. Further, a gradual temperature gradient is formed during the programming within a portion of the metal strip that is longer than the Blech length so that electromigration of metal gradually occurs reliably at the center portion of the metal strip. Metal line portions are provides at the same level as the metal eFuse to physically block debris generated during programming.
    • 金属电可编程保险丝(eFuse)包括在金属条的两端处具有与宽金属线部分相邻的金属线的具有宽度大于金属带宽度的宽度的金属带。 条带宽度可以是光刻最小尺寸,并且金属条带的长度与条带宽度的比率大于5以在编程期间定位围绕金属条的中心的加热。 加热的本地化减少了用于编程金属eFuse所需的电力。 此外,在金属带的长于Blech长度的部分内的编程期间形成逐渐的温度梯度,使得金属的电迁移在金属带的中心部分逐渐发生。 金属线部分提供与金属eFuse相同的水平,以物理阻挡编程期间产生的碎屑。
    • 3. 发明授权
    • Semiconductor switching device and method of making the same
    • 半导体开关器件及其制造方法
    • US08642460B2
    • 2014-02-04
    • US13155757
    • 2011-06-08
    • Chih-Chao YangStephen A CohenBaozhen Li
    • Chih-Chao YangStephen A CohenBaozhen Li
    • H01L21/44
    • B82Y10/00H01L23/5252H01L29/413H01L2924/0002H01L2924/00
    • A switching device including a first dielectric layer having a first top surface, two conductive features embedded in the first dielectric layer, each conductive feature having a second top surface that is substantially coplanar with the first top surface of the first dielectric layer, and a set of discrete islands of a low diffusion mobility metal between the two conductive features. The discrete islands of the low diffusion mobility metal may be either on the first top surface or embedded in the first dielectric layer. The electric conductivity across the two conductive features of the switching device increases when a prescribed voltage is applied to the two conductive features. A method of forming such a switching device is also provided.
    • 一种开关装置,包括具有第一顶表面的第一介电层,嵌入在第一介电层中的两个导电特征,每个导电特征具有与第一介电层的第一顶表面基本上共面的第二顶表面,以及一组 在两个导电特征之间的低扩散迁移率金属的离散岛。 低扩散迁移率金属的离散岛可以在第一顶表面上或嵌入在第一介电层中。 当规定的电压施加到两个导电特征时,开关装置的两个导电特征的电导率增加。 还提供了一种形成这种开关装置的方法。
    • 10. 发明申请
    • Electrical Fuse With Metal Line Migration
    • 具有金属线迁移的电气保险丝
    • US20130071998A1
    • 2013-03-21
    • US13234205
    • 2011-09-16
    • Baozhen LiYan Zun LiKeith Kwong Hon WongChih-Chao Yang
    • Baozhen LiYan Zun LiKeith Kwong Hon WongChih-Chao Yang
    • H01L21/326H01L21/28H01L23/52
    • H01L23/5256H01L21/326H01L2924/0002H01L2924/00
    • An electrical fuse device is disclosed. A circuit apparatus can include the fuse device, a first circuit element and a second circuit element. The fuse includes a first contact that has a first electromigration resistance, a second contact that has a second electromigration resistance and a metal line, which is coupled to the first contact and to the second contact, that has a third electromigration resistance that is lower than the second electromigration resistance. The first circuit element is coupled to the first contact and the second circuit element coupled to the second contact. The fuse is configured to conduct a programming current from the first contact to the second contact through the metal line. Further, the programming current causes the metal line to electromigrate away from the second contact to electrically isolate the second circuit element from the first circuit element.
    • 公开了一种电熔丝装置。 电路装置可以包括熔丝装置,第一电路元件和第二电路元件。 熔丝包括具有第一电迁移电阻的第一触点,具有第二电迁移电阻的第二触点和耦合到第一触点和第二触点的金属线,其具有低于 第二次电迁移阻力。 第一电路元件耦合到第一触点,而第二电路元件耦合到第二触点。 保险丝被配置为通过金属线将编程电流从第一触点传导到第二触点。 此外,编程电流使金属线电离远离第二触点,以将第二电路元件与第一电路元件电隔离。