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    • 8. 发明授权
    • Microwave plasma torch having discretely positioned gas injection holes
and method for generating plasma
    • 具有离散定位的气体注入孔的微波等离子体焰炬和产生等离子体的方法
    • US5734143A
    • 1998-03-31
    • US546834
    • 1995-10-23
    • Toru KawaseYoshinobu NaganoTadashi KimuraYoshikazu YoshidaShinichi Mizuguchi
    • Toru KawaseYoshinobu NaganoTadashi KimuraYoshikazu YoshidaShinichi Mizuguchi
    • H05H1/30H05H1/34B23K10/00
    • H01J37/32229H05H1/30H05H2001/3468H05H2001/3478
    • The microwave plasma torch of the invention includes: a vacuum container having an evacuating apparatus; a coaxial waveguide including an inner conductor and an outer conductor, a first end portion of the coaxial waveguide being connected with a microwave supplying apparatus for supplying a microwave and a second end portion of the coaxial waveguide being connected with the vacuum container, thereby introducing the microwave supplied from the microwave supplying apparatus into the vacuum container along a waveguide axis of the coaxial waveguide; and a gas supplying apparatus for injecting a gas into the vacuum container along a plurality of injection axes. In the microwave plasma torch, at least two of the plurality of injection axes do not cross the waveguide axis in the second end portion, and do not exist in a plane vertical to the waveguide axis, and a ratio of a diameter of the inner conductor to a diameter of the outer conductor in a vicinity of the second end portion decreases from the first to the second end portion along the waveguide axis.
    • 本发明的微波等离子体焰炬包括:具有排气装置的真空容器; 包括内导体和外导体的同轴波导,同轴波导的第一端部与用于提供微波的微波供给装置和与真空容器连接的同轴波导的第二端部连接,从而将 微波从微波供给装置沿着同轴波导的波导轴供给到真空容器内; 以及用于沿多个喷射轴将气体喷射到真空容器中的气体供给装置。 在微波等离子体焰炬中,多个喷射轴中的至少两个不在第二端部中穿过波导轴线,并且不存在于垂直于波导轴线的平面中,并且内部导体的直径 在第二端部附近的外导体的直径沿着波导轴从第一端部向第二端部减小。