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1. 发明授权

US08428336B2 Inspecting method, inspecting system, and method for manufacturing electronic devices 有权
标题翻译：检查方法，检查系统和电子设备制造方法
公开(公告)号：US08428336B2
公开(公告)日：2013-04-23
申请号：US11431709
申请日：2006-05-11
申请人： Yoko Ikeda , Junko Konishi , Hisafumi Iwata , Yuji Takagi , Kenji Obara , Ryo Nakagaki , Seiji Isogai , Yasuhiko Ozawa
发明人： Yoko Ikeda , Junko Konishi , Hisafumi Iwata , Yuji Takagi , Kenji Obara , Ryo Nakagaki , Seiji Isogai , Yasuhiko Ozawa
IPC分类号： G06K9/00
CPC分类号： G06F3/0486 , G06F2203/04803 , G06T7/0004 , G06T2200/24 , G06T2207/30148
摘要： A method for classifying defects, including: calculating feature quantifies of defect image which is obtained by imaging a defect on a sample; classifying the defect image into a classified category by using information on the calculated feature quantities; displaying the classified defect image in a region on a display screen which is defined to the classified category; adding information on the classified category to the displayed defect image; transferring the displayed defect image which is added the information on the classified category to one of the other categories and displaying the transferred defect image in a region on the display screen which is defined to the one of the other categories; and changing information on the category.
摘要翻译：一种用于对缺陷进行分类的方法，包括：通过对样品上的缺陷进行成像而获得的缺陷图像的特征量化计算; 通过使用关于计算的特征量的信息将缺陷图像分类成分类的类别; 在分类的类别的显示屏幕上的区域中显示分类的缺陷图像; 将分类类别的信息添加到所显示的缺陷图像; 将所述分类类别中的信息添加到所述其他类别中的所显示的缺陷图像，并且将所传送的缺陷图像显示在所述显示屏幕上定义为所述其他类别之一的区域中; 并更改关于该类别的信息。

2. 发明授权

US08188429B2 Scanning electron microscope for determining quality of a semiconductor pattern 失效
标题翻译：用于确定半导体图案的质量的扫描电子显微镜
公开(公告)号：US08188429B2
公开(公告)日：2012-05-29
申请号：US12184657
申请日：2008-08-01
申请人： Yasuhiko Ozawa
发明人： Yasuhiko Ozawa
IPC分类号： H01J37/28
CPC分类号： H01J37/28 , H01J37/222 , H01J2237/24475 , H01J2237/2448 , H01J2237/24592 , H01J2237/2817
摘要： Disclosed herein is a scanning electron microscope capable of determining quality of a semiconductor pattern, deformation of contact-holes, and inclination of the sidewall of the contact-holes, respectively. To that end, the scanning electron microscope includes image pickup means for picking up images of a circuit pattern formed on a semiconductor wafer on a preset condition, calculation means for comparing each of the images picked up by the image pickup means with a prestored reference image to thereby calculate a feature of the images picked up, and a computer for executing evaluation on quality of the circuit pattern on the basis of the feature calculated by the calculation means, and calculation of the feature is executed independently with reference to a secondary electron image, and each of back-scattering electron images.
摘要翻译：本文公开了能够分别确定半导体图案的质量，接触孔的变形和接触孔的侧壁的倾斜度的扫描电子显微镜。为此，扫描电子显微镜包括用于在预设条件下拍摄形成在半导体晶片上的电路图案的图像的图像拾取装置，用于将由图像拾取装置拾取的每个图像与预先存储的参考图像进行比较的计算装置从而计算拾取的图像的特征，以及计算机，用于基于由计算装置计算的特征来执行对电路图案的质量的评估，并且参考二次电子图像独立地执行特征的计算，以及每个后向散射电子图像。

3. 发明申请

US20080073526A1 Charged particle beam apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US20080073526A1
公开(公告)日：2008-03-27
申请号：US11699065
申请日：2007-01-29
申请人： Atsushi Takane , Mitsuji Ikeda , Satoru Yamaguchi , Yasuhiko Ozawa
发明人： Atsushi Takane , Mitsuji Ikeda , Satoru Yamaguchi , Yasuhiko Ozawa
IPC分类号： G01N23/00
CPC分类号： G01N23/225 , H01J2237/21 , H01J2237/2817
摘要： A charged particle beam apparatus for obtaining information of an uneven surface or a depression/protrusion of a sample by irradiating a charged particle beam to a sample having an uneven surface or a depression/protrusion at a plurality of focal positions, measuring signal emitted from the sample, and comparing profile waveforms corresponding to edge portions of the uneven surface.
摘要翻译：一种带电粒子束装置，用于通过向多个焦点位置处具有不平坦表面或凹陷/突起的样品照射带电粒子束来获得样品的不平坦表面或凹陷/突起的信息，测量从样本和比较与不平坦表面的边缘部分相对应的轮廓波形。

4. 发明授权

US07166840B2 Method for determining depression/protrusion of sample and charged particle beam apparatus therefor 有权
标题翻译：用于确定样品和带电粒子束装置的凹陷/突起的方法
公开(公告)号：US07166840B2
公开(公告)日：2007-01-23
申请号：US11056191
申请日：2005-02-14
申请人： Atsushi Takane , Satoru Yamaguchi , Osamu Komuro , Yasuhiko Ozawa , Hideo Todokoro
发明人： Atsushi Takane , Satoru Yamaguchi , Osamu Komuro , Yasuhiko Ozawa , Hideo Todokoro
IPC分类号： G01N23/00
CPC分类号： H01J37/28 , H01J2237/2815
摘要： A method for determining a depression/protrusion, especially of a line and space pattern formed on a sample, and an apparatus therefor. A charged particle beam is scanned with its direction being inclined to the original optical axis of the charged particle beam or a sample stage is inclined, broadening of a detected signal in a line scanning direction of the charged particle beam is measured, the broadening is compared with that when the charged particle beam is scanned with its direction being parallel to the original optical axis of the charged particle beam, and a depression/protrusion of the scanned portion is determined on the basis of increase/decrease of the broadening.
摘要翻译：用于确定凹陷/突起的方法，特别是用于形成在样本上的线和空间图案及其装置。扫描带电粒子束的方向与带电粒子束的原始光轴倾斜，或者样品台倾斜，测量带电粒子束的扫描方向上的检测信号的变宽，比较加宽其中当带电粒子束的扫描方向平行于带电粒子束的原始光轴时，并且基于增宽的增加/减小来确定扫描部分的凹陷/突起。

5. 发明授权

US07068834B1 Inspecting method, inspecting system, and method for manufacturing electronic devices 有权
标题翻译：检查方法，检查系统和电子设备制造方法
公开(公告)号：US07068834B1
公开(公告)日：2006-06-27
申请号：US09452149
申请日：1999-12-01
申请人： Yoko Ikeda , Junko Konishi , Hisafumi Iwata , Yuji Takagi , Kenji Obara , Ryo Nakagaki , Seiji Isogai , Yasuhiko Ozawa
发明人： Yoko Ikeda , Junko Konishi , Hisafumi Iwata , Yuji Takagi , Kenji Obara , Ryo Nakagaki , Seiji Isogai , Yasuhiko Ozawa
IPC分类号： G06K9/00
CPC分类号： G06F3/0486 , G06F2203/04803 , G06T7/0004 , G06T2200/24 , G06T2207/30148
摘要： The present invention has an analyzing unit including an image detection device for producing a plurality of images of a workpiece, a storage for storing detected images produced by the image detection device, and a display having a screen with a first area for displaying a plurality of detected images stored in the storage and a plurality of second areas for classifying the detected images according to features of the detected images, whereby the plurality of detected images are moved on the screen from the first area to selected second areas to classify the plurality of detected images in the second areas.
摘要翻译：本发明具有一种分析单元，包括用于产生工件的多个图像的图像检测装置，用于存储由图像检测装置产生的检测图像的存储器以及具有用于显示多个图像的第一区域的屏幕的显示器检测存储在存储器中的图像和多个第二区域，用于根据检测到的图像的特征对检测到的图像进行分类，由此多个检测图像在屏幕上从第一区域移动到选定的第二区域，以对多个检测到的图像进行分类图像在第二个区域。

6. 发明申请

US20050109937A1 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US20050109937A1
公开(公告)日：2005-05-26
申请号：US10933342
申请日：2004-09-03
申请人： Satoru Yamaguchi , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
发明人： Satoru Yamaguchi , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
IPC分类号： H01L21/66 , G01N23/04 , G01Q10/00 , G01Q20/00 , G01Q30/02 , G01Q30/04 , G21K7/00 , H01J37/22 , H01J37/28 , G01N23/00
CPC分类号： H01J37/28 , G01N23/04 , G01N23/225 , G06T7/74 , G06T2207/10056 , G06T2207/30148 , H01J37/222 , H01J2237/2817
摘要： An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.
摘要翻译：本发明的目的是提供一种用于减少与检查定位或输入操作相关的处理的扫描电子显微镜，从而以高速度高精度地运行。为了实现上述目的，本发明提供了一种扫描电子显微镜，其具有基于预先登记的图案来识别期望位置的功能，该扫描电子显微镜包括用于设置关于图案种类的信息的装置，多个部分之间的间隔构成图案的部分，以及构成图案的部分的尺寸，以及基于由相关装置获得的信息形成由多个部分组成的图案图像的装置。

7. 发明授权

US06803573B2 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US06803573B2
公开(公告)日：2004-10-12
申请号：US10615864
申请日：2003-07-10
申请人： Satoru Yamaguchi , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
发明人： Satoru Yamaguchi , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
IPC分类号： H01J3728
CPC分类号： H01J37/28 , G01N23/04 , G01N23/225 , G06T7/74 , G06T2207/10056 , G06T2207/30148 , H01J37/222 , H01J2237/2817
摘要： An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.
摘要翻译：本发明的目的是提供一种用于减少与检查定位或输入操作相关的处理的扫描电子显微镜，从而以高速度高精度地运行。为了实现上述目的，本发明提供了一种扫描电子显微镜，其具有基于预先登记的图案来识别期望位置的功能，该扫描电子显微镜包括用于设置关于图案种类的信息的装置，多个部分之间的间隔构成图案的部分，以及构成图案的部分的尺寸，以及基于由相关装置获得的信息形成由多个部分组成的图案图像的装置。

8. 发明授权

US06627888B2 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US06627888B2
公开(公告)日：2003-09-30
申请号：US09792721
申请日：2001-02-23
申请人： Satoru Yamaguchi , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
发明人： Satoru Yamaguchi , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
IPC分类号： H01J3728
CPC分类号： H01J37/28 , G01N23/04 , G01N23/225 , G06T7/74 , G06T2207/10056 , G06T2207/30148 , H01J37/222 , H01J2237/2817
摘要： An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.
摘要翻译：本发明的目的是提供一种用于减少检查定位或输入操作的过程的扫描电子显微镜，从而以高精度高功能运行。为了实现上述目的，本发明提供一种扫描电子显微镜，其具有用于基于预先登记的图案来识别期望位置的功能，其包括用于设置关于图案种类的信息的装置，构成图案的多个部分之间的间隔和构成图案的部分的尺寸的装置，以及用于基于由相关装置获得的信息，形成由多个部分组成的图案图像。

9. 发明授权

US4007811A Control for elevator 失效
标题翻译：电梯控制
公开(公告)号：US4007811A
公开(公告)日：1977-02-15
申请号：US552206
申请日：1975-02-24
申请人： Yasuhiko Ozawa
发明人： Yasuhiko Ozawa
IPC分类号： B66B1/50 , B66B1/40
CPC分类号： B66B1/50
摘要： A looped strip connected to an elevator car is moved with the car and provided with floor indication cams at intervals equal to distances between adjacent landing floors. Immediately before the car already decelerated reaches a desired one of the floors, the corresponding cam engages one of two spaced switches to operate it. This instructs the car to further decelerate and the car is stopped on the desired floor upon that corresponding cam disengaging from the operated switch with the cam located between the switches in their inoperative position.
摘要翻译：连接到电梯轿厢的环形带与轿厢一起移动，并以相等于相邻着陆楼层之间的距离的间隔设置地板指示凸轮。在汽车已经减速到达期望的一个楼层之前，相应的凸轮接合两个间隔开关中的一个来操作它。这指示轿厢进一步减速，并且当相应的凸轮与操作的开关脱离时，轿厢停在所需的地板上，而位于开关之间的凸轮处于非操作位置。

10. 发明申请

US20100102224A1 CHARGED PARTICLE BEAM APPARATUS 有权
标题翻译：充电颗粒光束装置
公开(公告)号：US20100102224A1
公开(公告)日：2010-04-29
申请号：US12651209
申请日：2009-12-31
申请人： Atsushi TAKANE , Mitsuji Ikeda , Satoru Yamaguchi , Yasuhiko Ozawa
发明人： Atsushi TAKANE , Mitsuji Ikeda , Satoru Yamaguchi , Yasuhiko Ozawa
IPC分类号： G01N23/00
CPC分类号： G01N23/225 , H01J2237/21 , H01J2237/2817
摘要： A charged particle beam apparatus for obtaining information of an uneven surface or a depression/protrusion of a sample by irradiating a charged particle beam to a sample having an uneven surface or a depression/protrusion at a plurality of focal positions, measuring signal emitted from the sample, and comparing profile waveforms corresponding to edge portions of the uneven surface.
摘要翻译：一种带电粒子束装置，用于通过向多个焦点位置处具有不平坦表面或凹陷/突起的样品照射带电粒子束来获得样品的不平坦表面或凹陷/突起的信息，测量从样本和比较与不平坦表面的边缘部分相对应的轮廓波形。

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