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1. 发明专利

JP2009094137A Wafer holder, and semiconductor manufacturing device 审中-公开
标题翻译：过滤器和半导体制造设备
公开(公告)号：JP2009094137A
公开(公告)日：2009-04-30
申请号：JP2007260915
申请日：2007-10-04
申请人： Sei Hybrid Kk , Seiハイブリッド株式会社
发明人： ITAKURA KATSUHIRO , NAKADA HIROHIKO
IPC分类号： H01L21/683 , C23C16/458 , H01L21/205 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a wafer holder which has a fast cooling speed and temperature rising speed and is excellent in soaking property. SOLUTION: Disclosed is the wafer holder stored in a chamber to process a wafer. The wafer holder includes a placement table having a placement surface for the wafer, the main component of the material thereof being at least one kind selected from a group of Al-C, Al-SiC, Si-SiC, SiC, AlN, C, Cu and Al; a cylindrical support having lower thermal conductivity than the placement table, supporting the placement table from the side opposite to the placement surface, and airtightly coupled to the placement table; a gap portion formed between the placement table and cylindrical support; and a cooling module and a heat generating body stored in the gap portion. The placement table has thermal conductivity of ≥50 W/mK, the gap portion is isolated from the atmosphere in the chamber, and while the cooling module is provided to the placement table, the heat generating body is provided to the surface of the cooling module on the side opposite to the placement table. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供具有快速冷却速度和升温速度并且均匀性优异的晶片保持器。解决方案：公开了存储在室中以处理晶片的晶片保持架。晶片保持器包括具有用于晶片的放置面的放置台，其材料的主要成分为选自Al-C，Al-SiC，Si-SiC，SiC，AlN，C，铜和铝; 具有比放置台低的热导率的圆柱形支撑件，从与放置表面相对的一侧支撑放置台，并且气密地联接到放置台; 形成在所述放置台和圆柱形支撑件之间的间隙部分; 以及存储在间隙部分中的冷却模块和发热体。放置台具有≥50W/ mK的导热率，间隙部分与腔室中的大气隔离，并且当冷却模块设置在放置台上时，发热体被提供到冷却模块的表面在放置表相对的一侧。版权所有（C）2009，JPO＆INPIT

2. 发明专利

JP2009043589A Heater unit for semiconductor or flat panel display manufacturing-inspecting device, and device equipped with the same 审中-公开
标题翻译：用于半导体或平板显示器的加热器单元制造检测装置及其装置
公开(公告)号：JP2009043589A
公开(公告)日：2009-02-26
申请号：JP2007207658
申请日：2007-08-09
申请人： Sei Hybrid Kk , Seiハイブリッド株式会社
发明人： KITABAYASHI KEIJI , MIKUMO AKIRA , NAKADA HIROHIKO
IPC分类号： H05B3/74 , H01L21/02 , H05B3/02 , H05B3/06 , H05B3/20
摘要： PROBLEM TO BE SOLVED: To provide a heater unit excelling in thermal uniformity, and capable of preventing breakage by reducing stress applied to a tubular support body supporting a ceramic heater.
SOLUTION: A back plate 2 is mechanically connected to the ceramic heater 1 having a resistance heating element, and the back plate 2 is further mechanically connected to the tubular support body 3. A plurality of electrode terminals 4a of the resistance heating element are arranged on the back side of the ceramic heater 1, and are dividedly arranged to a plurality of concentric radial length zones along the radial direction of the ceramic heater 1, and power feed leads 4 are formed in the internal space of the tubular support body 3 from the plurality of electrode terminals 4a.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种热均匀性优异的加热器单元，并且能够通过减少施加到支撑陶瓷加热器的管状支撑体的应力来防止断裂。解决方案：背板2机械地连接到具有电阻加热元件的陶瓷加热器1，并且背板2进一步机械地连接到管状支撑体3.电阻加热元件的多个电极端子4a 布置在陶瓷加热器1的背面，并沿着陶瓷加热器1的径向方向分成多个同心的径向长度区域，并且在管状支撑体的内部空间中形成供电引线4 3从多个电极端子4a。版权所有（C）2009，JPO＆INPIT

3. 发明专利

JP2009031117A Heating/cooling module 审中-公开
标题翻译：加热/冷却模块
公开(公告)号：JP2009031117A
公开(公告)日：2009-02-12
申请号：JP2007195354
申请日：2007-07-27
申请人： Sei Hybrid Kk , Seiハイブリッド株式会社
发明人： KIHARA FUMIYUKI , MIKUMO AKIRA , NATSUHARA MASUHIRO , NAKADA HIROHIKO
IPC分类号： G01R31/26 , H01L21/02 , H01L21/66 , H05B3/10 , H05B3/74
摘要： PROBLEM TO BE SOLVED: To provide a heating/cooling module which will not be damaged, even if it is heated or cooled in a short time, whereby a heating amount of a heater for heating a semiconductor chip mounted thereon can be increased.
SOLUTION: This heating/cooling module comprises a ceramics heater 1 for heating an object to be processed mounted thereon, a cooling mechanism 3 for cooling the ceramics heater 1, and a support body 2 placed between the ceramics heater 1 and the cooling mechanism 3. The support body 2 is so configured that a heater-side support body 2a and a cooling mechanism-side support body 2b, made of different materials, are combined. Interposer layers 4, 4 which is to be constituted of a soft material with thermal conductivity of 1 W/mK or larger are, preferably, interposed in between the heater-side support body 2a and the cooling mechanism-side support body 2b and in between the cooling mechanism-side support body 2b and the cooling mechanism 3, respectively.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：即使在短时间内加热或冷却也能够提供不会损坏的加热/冷却模块，从而可以增加用于加热安装在其上的半导体芯片的加热器的加热量。解决方案：该加热/冷却模块包括用于加热安装在其上的被处理物体的陶瓷加热器1，用于冷却陶瓷加热器1的冷却机构3和放置在陶瓷加热器1和冷却之间的支撑体2 支撑体2构成为，由不同材料构成的加热器侧支撑体2a和冷却机构侧支撑体2b组合。由导热率为1W / mK以上的软质材料构成的插入层4,4优选设置在加热器侧支撑体2a和冷却机构侧支撑体2b之间，冷却机构侧支撑体2b和冷却机构3。版权所有（C）2009，JPO＆INPIT

4. 发明专利

JP2008271003A Radio-wave lens antenna device 审中-公开
标题翻译：无线电波导天线设备
公开(公告)号：JP2008271003A
公开(公告)日：2008-11-06
申请号：JP2007109023
申请日：2007-04-18
申请人： Sei Hybrid Kk , Seiハイブリッド株式会社
发明人： TERAOKA KANJI , KURODA MASATOSHI , NAITO HAJIME
IPC分类号： H01Q15/23 , H01Q1/12 , H01Q3/14 , H01Q3/18
摘要： PROBLEM TO BE SOLVED: To provide a radio-wave lens antenna device, in which when adding a primary radiator or adjusting the position of the primary radiator, its position adjusting can be performed readily and surely, without displacing the primary radiator which has been set prior to position adjustment for reducing the burden imposed on the installation operation of the primary radiator and improving the efficiency in the installation operation.
SOLUTION: There is provided the radio-wave lens antenna device which comprises a hemisphere Luneberg lens, a radio-wave reflecting plate which reflects radio waves in combination with the Luneberg lens, two or more primary radiators arranged at a focal point of the Luneberg lens, and masts which supports each of the two or more primary radiators. In the radio-wave lens antenna device, each of the masts is fixed independently to the radio-wave reflecting plate in a holding portion positioned at a rotary support point with one axis, passing through a lens center, defined as a common axis of rotation.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决的问题：提供一种无线电波透镜天线装置，其中当添加一次辐射器或调节一次辐射器的位置时，可以容易且可靠地执行其位置调整，而不会使主辐射器已经设置在位置调整之前，以减轻对一次辐射器的安装操作的负担，并且提高了安装操作的效率。解决方案：提供了一种无线电波透镜天线装置，其包括半球Luneberg透镜，反射无线电波与Luneberg透镜组合的无线电波反射板，两个或更多个主辐射器布置在焦点 Luneberg透镜和支撑两个或更多个主辐射器中的每一个的桅杆。在无线电波透镜天线装置中，每个桅杆独立地固定在位于具有一个轴的旋转支撑点的保持部中，通过被定义为公共旋转轴线的透镜中心的无线电波反射板。版权所有（C）2009，JPO＆INPIT

5. 发明专利

JP2008109458A Radio wave lens antenna device 审中-公开
标题翻译：无线电波浪天线设备
公开(公告)号：JP2008109458A
公开(公告)日：2008-05-08
申请号：JP2006291226
申请日：2006-10-26
申请人： Jsat Corp , Sei Hybrid Kk , Seiハイブリッド株式会社 , ジェイサット株式会社
发明人： HATSUDA TAKESHI , IMAI KATSUYUKI , KURODA MASATOSHI , KIDO HIDEAKI , SASAKI MANABU , KAWASAKI KENICHIRO
IPC分类号： H01Q1/42 , H01Q1/02 , H01Q3/14 , H01Q19/06
摘要： PROBLEM TO BE SOLVED: To provide a radio wave lens antenna device comprising a function which can obtain sufficient efficiency in transmitting and receiving radio waves and avoids signal attenuation caused by snow accumulation. SOLUTION: In the radio wave lens antenna device 50, when the radius of a Luneberg lens 1 is defined as R, and when a distance from the center of the Luneberg lens 1 to a cover member 5 is defined as R 1 , a relation being R 1 is established. When a distance between an optional point A of a reflecting plate 2 separated upward from the center of the Luneberg lens 1 by a distance (a) and a main body part 7 of the cover member 5 in a plane horizontal to the ground 21, going through the optional point A while the reflecting plate 2 is erected perpendicularly to the ground 21 is defined as R A , and when a distance between an optional point B of the reflecting plate 2 separated from the center of the Luneberg lens 1 vertically upward by a distance (b) longer than the distance (a) and the main body part 7 of the cover member 5 in the plane horizontal to the ground 21, going through the optional point B is defined as R B , a relation being R A B is established. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种无线电波透镜天线装置，其包括能够在发送和接收无线电波方面获得足够的效率并避免由积雪引起的信号衰减的功能。解决方案：在无线电波透镜天线装置50中，当Luneberg透镜1的半径被定义为R时，并且当从Luneberg透镜1的中心到盖构件5的距离被定义为R 1 ，建立了R 1 的关系。当反射板2的可选点A从Luneberg透镜1的中心向上分离距离（a）和盖构件5的主体部分7在与地面21水平的平面中的距离通过可选点A，而将反射板2垂直于地面21竖立定义为R A ，并且当反射板2的可选点B与中心的距离 Lonsberg透镜1垂直向上延伸距离（a）的距离（b）和覆盖构件5的主体部分7在与地面21平行的平面中经过可选点B被定义为R B ，建立一个关系为R B 。版权所有（C）2008，JPO＆INPIT

6. 发明专利

JP2009126750A Method for producing polycrystal transparent ceramic substrate, and method for producing spinel substrate 审中-公开
标题翻译：生产多晶透明陶瓷基材的方法及其生产方法
公开(公告)号：JP2009126750A
公开(公告)日：2009-06-11
申请号：JP2007304258
申请日：2007-11-26
申请人： Sei Hybrid Kk , Seiハイブリッド株式会社 , Sumitomo Electric Ind Ltd , 住友電気工業株式会社
发明人： YOSHIMURA MASASHI , NAKAYAMA SHIGERU , FUJII AKITO
IPC分类号： C04B35/443 , C04B41/80 , C04B41/87
CPC分类号： C04B41/87 , C04B35/443 , C04B41/009 , C04B41/4529 , C04B2111/80 , G02F1/1303 , G02F2201/38 , C04B41/5055 , C04B41/5027 , C04B41/5041 , C04B35/00
摘要： PROBLEM TO BE SOLVED: To provide an inexpensive production method for polycrystal transparent ceramic substrates, e.g. used for the transparent substrates of liquid crystal projectors. SOLUTION: The method for producing a polycrystal transparent ceramic substrate comprises: a stage where a ceramic body formed so as to be a prescribed shape is sintered so as to produce a polycrystal transparent ceramic sintered compact; a stage where the polycrystal transparent ceramic sintered compact is cut so as to produce a plurality of polycrystal transparent ceramics cut bodies; a stage where the cut faces of the polycrystal transparent ceramic cut bodies are polished so as to produce polycrystal transparent ceramic polished bodies; and a stage where the polycrystal transparent ceramic polished bodies are subjected to AR (anti-reflection) coating so as to produce polycrystal transparent ceramic coated bodies. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了提供廉价的多晶透明陶瓷基板的制造方法，例如，用于液晶投影机的透明基板。＆lt; P＆gt;解决方案：多晶透明陶瓷基板的制造方法包括：烧结形成为规定形状的陶瓷体以制造多晶透明陶瓷烧结体的阶段; 切割多晶透明陶瓷烧结体以制造多个多晶透明陶瓷切割体的阶段; 对多晶透明陶瓷切割体的切割面进行抛光以制造多晶透明陶瓷抛光体的阶段; 以及多晶透明陶瓷抛光体经受AR（抗反射）涂层以制备多晶透明陶瓷涂层体的阶段。版权所有（C）2009，JPO＆INPIT

7. 发明专利

JP2009063941A Far-infrared camera lens, lens unit, and imaging apparatus 审中-公开
标题翻译：红外相机镜头，镜头单元和成像设备
公开(公告)号：JP2009063941A
公开(公告)日：2009-03-26
申请号：JP2007233493
申请日：2007-09-10
申请人： Sei Hybrid Kk , Seiハイブリッド株式会社 , Sumitomo Electric Ind Ltd , 住友電気工業株式会社
发明人： IZUMI TATSUYA
IPC分类号： G02B13/14 , G02B3/00 , G02B9/16 , G02B13/18
CPC分类号： G02B13/146 , G02B13/18 , G02B27/0037 , G02B27/4211 , G02B27/4216
摘要： PROBLEM TO BE SOLVED: To provide a far-infrared camera lens which is for a vehicle, small and inexpensive, and has a back focus of 6 mm or more and to provide a lens unit and an imaging apparatus which use the lens unit. SOLUTION: The far-infrared camera lens includes three lenses formed of ZnS. A first lens is a biconvex lens, a second lens is a negative meniscus or biconcave lens, and a third lens is a positive meniscus lens. A diffraction surface is formed in either surface of a lens. When a total focal distance f of the lens system is 10 to 30 mm and a focal distance f 12 of the first and second lenses is 20 to 70 mm, 1≤f 12 /f≤3 is satisfied. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种小型且便宜的车辆的远红外相机镜头，并且具有6mm以上的后焦距，并且提供使用镜头的镜头单元和成像装置单元。
解决方案：远红外相机镜头包括由ZnS形成的三个透镜。第一透镜是双凸透镜，第二透镜是负弯月面或双凹透镜，第三透镜是正弯月形透镜。在透镜的任一表面上形成衍射面。当第一和第二透镜的透镜系统的总焦距f为10至30mm，焦点距离f 12 为20至70mm时，1≤f 12 /f≤3。版权所有（C）2009，JPO＆INPIT

8. 发明专利

JP2008294016A Ceramics substrate and semiconductor manufacturing apparatus provided with the same 审中-公开
标题翻译：陶瓷基板和半导体制造设备
公开(公告)号：JP2008294016A
公开(公告)日：2008-12-04
申请号：JP2007134930
申请日：2007-05-22
申请人： Sei Hybrid Kk , Seiハイブリッド株式会社 , Sumitomo Electric Ind Ltd , 住友電気工業株式会社
发明人： NATSUHARA MASUHIRO , AWAZU TOMOYUKI
IPC分类号： H01L21/205 , C23C16/44 , H01L21/02 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a ceramic substrate for a semiconductor manufacturing apparatus, especially a shower substrate, wherein the connection structure of electrodes is greatly improved so as to enhance throughput of a semiconductor process.
SOLUTION: The ceramics substrate 1 is arranged within the chamber of a semiconductor manufacturing apparatus, and a conductor 2 is embedded inside itself. It is provided with an electrode member 3 for external terminal connection that is connected with the conductor 2, a conductive cover member 4 that is connected with the electrode member 3 and covers the same, and an O-ring 5 that prevents the electrode member 3 covered with the cover member 4 from being exposed to an atmosphere within the chamber. The electrode member 3 and the ceramics substrate 1, and the electrode member 3 and the cover member 4 are mechanically joined with each other by screws, respectively.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决的问题：提供一种用于半导体制造装置的陶瓷基板，特别是喷淋基板，其中电极的连接结构大大提高，以提高半导体工艺的生产率。解决方案：陶瓷基板1布置在半导体制造装置的腔室内，导体2嵌入其内部。设置有与导体2连接的用于外部端子连接的电极部件3，与电极部件3连接并覆盖电极部件3的导电性盖部件4和防止电极部件3的O形环5 被覆盖件4覆盖以暴露在室内的气氛中。电极构件3和陶瓷基板1以及电极构件3和盖构件4分别通过螺钉彼此机械地接合。版权所有（C）2009，JPO＆INPIT

9. 发明专利

JP2008182129A Wafer holder for semiconductor manufacturing device, method of manufacturing same, and semiconductor manufacturing device on which same is mounted 有权
标题翻译：用于半导体制造装置的制造方法，制造方法及其安装的半导体制造装置
公开(公告)号：JP2008182129A
公开(公告)日：2008-08-07
申请号：JP2007015684
申请日：2007-01-26
申请人： Sei Hybrid Kk , Seiハイブリッド株式会社 , Sumitomo Electric Ind Ltd , 住友電気工業株式会社
发明人： NATSUHARA MASUHIRO , AWAZU TOMOYUKI
IPC分类号： H01L21/205 , H01L21/683 , H05H1/46
摘要： PROBLEM TO BE SOLVED: To provide a wafer holder that generates uniform plasma on a wafer, and forms a uniform thickness film on the entire surface of the wafer meeting the recent semiconductor microfabrication. SOLUTION: This invention relates to the wafer holder wherein a high frequency generating electrode is buried in a ceramics sintered body, and a distance between the high frequency generating electrode and a wafer mounting surface is not definite. The indefinite distance means that the distance from the high frequency generating electrode to a wafer mounting surface may be long or short in a direction from a center of the wafer mounting surface to an end thereof. COPYRIGHT: (C)2008,JPO&INPIT

10. 发明专利

JP2008180770A Infrared optical component and method for manufacturing infrared optical component 审中-公开
标题翻译：红外光学元件和制造红外光学元件的方法
公开(公告)号：JP2008180770A
公开(公告)日：2008-08-07
申请号：JP2007012420
申请日：2007-01-23
申请人： Sei Hybrid Kk , Seiハイブリッド株式会社 , Sumitomo Electric Ind Ltd , 住友電気工業株式会社
发明人： UENO TOMOYUKI , HASEGAWA MIKITO
IPC分类号： G02B1/00 , G02B3/00 , G02B5/22
摘要： PROBLEM TO BE SOLVED: To provide an infrared optical component for reducing environment load by reducing the cost of coating, and to provide a method for manufacturing the infrared optical component.
SOLUTION: The infrared optical component 10 includes a base substance 11 and a coating film 12. The base substance 11 includes zinc sulfide. The coating film 12 is formed on the base substance 11 and comprises oxide including zinc. The method of manufacturing the infrared optical component 10 includes: a process for preparing the base substance 11 including zinc sulfide; and a process for heat-treating the base substance for 0.1-30 hours in a temperature range of 500-750°C in an oxidation atmosphere containing oxygen of 1-98%.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：解决的问题：通过降低涂布成本来提供用于减少环境负荷的红外光学部件，并提供一种红外光学部件的制造方法。解决方案：红外光学部件10包括基体11和涂膜12.基体11包括硫化锌。涂膜12形成在基体11上并且包括含锌的氧化物。制造红外光学部件10的方法包括：制备包含硫化锌的基础物质11的方法; 以及在含有1-98％的氧的氧化气氛中，在500-750℃的温度范围内热处理该基础物质0.1-30小时的方法。版权所有（C）2008，JPO＆INPIT

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