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    • 8. 发明授权
    • Self-alignment manufacturing method of the microlens and the aperture using in optical devices
    • 微透镜的自对准制造方法和光学器件中使用的孔径
    • US07259034B2
    • 2007-08-21
    • US11052875
    • 2005-02-09
    • Yi ChiuWen Syang HsuYu-Ru Chang
    • Yi ChiuWen Syang HsuYu-Ru Chang
    • H01L21/00
    • H01L27/14685H01L27/14627H01L31/02327
    • The present invention discloses a self-alignment manufacturing method of a microlens and an aperture using in an optical device. The method manufactures the aperture and the circular opening in the opaque film on a transparent substrate, and utilizes the self-alignment backside exposure technology to precisely integrate the aperture and the microlens made by macromolecule material without any combination step. The claimed method is simpler than conventional technology and can precisely align and integrate the microlens and the aperture with a continuous batch manufacture. Since the aperture and the circular opening are concentric circles and formed in same step, the microlens and the aperture can be precisely aligned with the backside exposure. The claimed invention can effectively improve the optical resolution and efficiency of the optical access and measurement devices.
    • 本发明公开了一种在光学装置中使用的微透镜和孔径的自对准制造方法。 该方法在透明基板上制造不透明膜中的孔径和圆形开口,并利用自对准背面曝光技术精确地将孔径和由大分子材料制成的微透镜整合,而无需任何组合步骤。 要求保护的方法比常规技术简单,并且可以通过连续批量制造精确对准和整合微透镜和孔。 由于光圈和圆形开口是同心圆并且在同一步骤中形成,因此微透镜和光圈可以与背面曝光精确对准。 所要求保护的发明可以有效地提高光学接入和测量装置的光学分辨率和效率。