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    • 4. 发明申请
    • SUBSTRATE PROCESSING CHAMBER WITH OFF-CENTER GAS DELIVERY FUNNEL
    • 带中心气体输送机的基板加工室
    • WO2010036999A3
    • 2010-08-12
    • PCT/US2009058557
    • 2009-09-28
    • APPLIED MATERIALS INCMERRY NIRNGUYEN SON T
    • MERRY NIRNGUYEN SON T
    • H01L21/205H01L21/00
    • C23C16/45544C23C16/45502C23C16/45563
    • Methods and apparatus for processing substrates are disclosed herein. The process chamber includes a chamber body, a substrate support pedestal, a pump port and a gas injection funnel. The chamber body has an inner volume and the substrate support pedestal is disposed in the inner volume of the chamber body. The pump port is coupled to the inner volume and is disposed off-center from a central axis of the substrate support pedestal. The pump port provides azimuthally non-uniform pumping proximate to a surface of the substrate support pedestal and creates localized regions of high pressure and low pressure within the inner volume during use. The gas injection funnel is disposed in a ceiling of the chamber body and opposite the substrate support pedestal. The gas injection funnel is offset from the central axis of the substrate support pedestal and is disposed in a region of low pressure.
    • 本文公开了处理衬底的方法和设备。 处理室包括室主体,基板支撑基座,泵口和气体注入漏斗。 腔体具有内部体积,并且衬底支撑基座设置在腔体的内部体积中。 泵口连接到内部体积并且设置在离基板支撑基座的中心轴线偏心的位置。 泵端口提供靠近基板支撑基座的表面的方位不均匀的泵送,并且在使用期间在内部体积内产生高压和低压的局部区域。 气体注入漏斗设置在室主体的顶部并与衬底支撑基座相对。 气体注入漏斗偏离衬底支撑基座的中心轴线并且设置在低压区域中。