基本信息:
- 专利标题： CHUCK FOR ACQUIRING A WARPED WORKPIECE
- 申请号：PCT/IL2022/050431 申请日：2022-04-28
- 公开(公告)号：WO2022234559A1 公开(公告)日：2022-11-10
- 发明人： NISHRI, Boaz , HERMAN, Ami , GURARYE, Nir , LEGERBAUM, Yaacov , BIRGER, Igor , SEGAL, Alon , GENENDER, Mart , LAUTMAN, Ronen
- 申请人： CORE FLOW LTD.
- 申请人地址： P.O.Box 68
- 专利权人： CORE FLOW LTD.
- 当前专利权人： CORE FLOW LTD.
- 当前专利权人地址： P.O.Box 68
- 代理机构： SIERADZKI, Doron
- 优先权： US17/307,002 2021-05-04
- 主分类号： H01L21/683
- IPC分类号： H01L21/683 ; H01L21/687 ; B65H3/08
摘要：
A chuck includes a chuck surface and extendible port assemblies that are distributed over the chuck surface. Each extendible port assembly includes a conduit that is connectable to a suction source and a tube that distally extends from the chuck surface, whose distal end forms a seal when in contact with a workpiece, and is collapsible by suction that is applied by the suction source after formation of the seal. A plurality of non-extendible vacuum ports are interspersed with the extendible port assemblies. At least one areal seal extends from the chuck surface and bounds a region of the chuck surface that includes at least one of the non-extendible vacuum ports, and that is configured to form an airtight seal when the areal seal is in contact with the workpiece.