基本信息:
- 专利标题： SUBSTRATE TRANSFER APPARATUS
- 专利标题（中）：基板传送装置
- 申请号：US13462908 申请日：2012-05-03
- 公开(公告)号：US20120219390A1 公开(公告)日：2012-08-30
- 发明人： Katsushi Kishimoto , Yusuke Fukuoka , Hiroyuki Tadokoro , Yusuke Ozaki
- 申请人： Katsushi Kishimoto , Yusuke Fukuoka , Hiroyuki Tadokoro , Yusuke Ozaki
- 申请人地址： JP OSAKA
- 专利权人： SHARP KABUSHIKI KAISHA
- 当前专利权人： SHARP KABUSHIKI KAISHA
- 当前专利权人地址： JP OSAKA
- 优先权： JP2008-201876 20080805
- 主分类号： B65G65/00
- IPC分类号： B65G65/00
摘要：
A substrate transfer apparatus comprising: a plurality of floating-transfer guide plates adjacent to each other with a space therebetween, each of the guide plates having a substrate-placing surface on which a substrate is to be placed, and a plurality of floating-gas ejecting holes for floating the substrate with use of a gas; a gas supplying source for supplying the floating gas to the respective guide plates; and an arm for transferring the floated substrate from the guide plate, from which the substrate is to be transferred, to the adjacent guide plate to which the substrate is to be transferred, wherein the substrate-placing surface of the guide plate to which the substrate is to be transferred is situated lower than the substrate-placing surface of the guide plate from which the substrate is to be transferred.
摘要（中）：
一种基板传送装置，包括：彼此相邻的多个浮动传送导向板，其间具有空间，每个导板具有其上将放置基板的基板放置表面，以及多个浮动导电板 排出用于使用气体漂浮基板的孔; 气体供给源，用于将浮动气体供给到各个导向板; 以及用于将浮动的基板从基板被转印的导向板传送到要被转印的基板的相邻引导板的臂，其中基板的基板放置表面与基板 要被转印的位置低于从基板被转印的导向板的基板放置表面。
IPC结构图谱:
| B | 作业；运输 |
| --B65 | 输送；包装；贮存；搬运薄的或细丝状材料 |
| ----B65G | 运输或贮存装置，例如装载或倾斜用输送机；车间输送机系统；气动管道输送机 |
| ------B65G65/00 | 装载或卸载 |