基本信息:
- 专利标题： 含有具有硬化性官能基之化合物的階差基板被覆組成物
- 专利标题（英）：Step-structuring substrate coating composition containing compound having curable functional group
- 专利标题（中）：含有具有硬化性官能基之化合物的阶差基板被覆组成物
- 申请号：TW107132207 申请日：2018-09-13
- 公开(公告)号：TW201921120A 公开(公告)日：2019-06-01
- 发明人： 德永光 , TOKUNAGA, HIKARU , 遠藤貴文 , ENDO, TAKAFUMI , 緒方裕斗 , OGATA, HIROTO , 橋本圭祐 , HASHIMOTO, KEISUKE , 中島誠 , NAKAJIMA, MAKOTO
- 申请人： 日商日產化學股份有限公司 , NISSAN CHEMICAL CORPORATION
- 专利权人： 日商日產化學股份有限公司,NISSAN CHEMICAL CORPORATION
- 当前专利权人： 日商日產化學股份有限公司,NISSAN CHEMICAL CORPORATION
- 代理人： 林志剛
- 优先权： 2017-175633 20170913
- 主分类号： G03F7/11
- IPC分类号： G03F7/11 ; H01L21/027
To provide a stepped substrate coating composition by which a film having a filling property and a flattening property for a pattern is formed. In this stepped substrate coating composition containing a main agent and a solvent, and which is cured by light irradiation or by heating at 30-300 DEG C during light irradiation or after light irradiation, wherein: the main agent includes compound (A), compound (B), or a mixture thereof; compound (A) is a compound containing a partial structure of formula (A-1) or formula (A-2); and compound (B) is a compound that includes at least one partial structure selected from the group consisting of partial structures represented by formulae (B-1) to (B-5), or that includes a partial structure composed of a combination of a partial structure represented by formula (B-6) and a partial structure represented by formula (B-7) or (B-8); and the content of the main agent in a solid content of the composition is 95-100 mass%.