基本信息:
- 专利标题: 光阻圖案形成方法
- 专利标题(英):Resist pattern forming method
- 专利标题(中):光阻图案形成方法
- 申请号:TW106102380 申请日:2017-01-23
- 公开(公告)号:TW201736970A 公开(公告)日:2017-10-16
- 发明人: 星野学 , HOSHINO, MANABU
- 申请人: 日本瑞翁股份有限公司 , ZEON CORPORATION
- 专利权人: 日本瑞翁股份有限公司,ZEON CORPORATION
- 当前专利权人: 日本瑞翁股份有限公司,ZEON CORPORATION
- 代理人: 洪澄文
- 优先权: 2016-016596 20160129
- 主分类号: G03F7/039
- IPC分类号: G03F7/039 ; G03F7/20 ; G03F7/32
The purpose of the present invention is to form a resist pattern with sufficient clarity using a resist composition that includes a polymer, said resist composition being able to suppress the occurrence of resist pattern collapse when used as a main-chain scission positive resist. This resist pattern forming method is characterized by including: a step in which a resist film is formed using a positive resist composition that includes a polymer, said polymer having a monomer unit (A) expressed by general formula (1) and a monomer unit (B) expressed by general formula (2), at least one of said monomer unit (A) and said monomer unit (B) having one or more fluorine atoms; an exposure step; and a development step, wherein the development is performed using a developing fluid with a surface tension of 17mN/m or less.