基本信息:
- 专利标题: 반송 지그에 플렉시블 기판을 장착하는 장치
- 专利标题(英):Carrier jig for flexible substrate and mounting device for flexible substrat on the carrier jig
- 专利标题(中):用于柔性基座的承载件和用于运输工具上的柔性基座的安装装置
- 申请号:KR1020130040487 申请日:2013-04-12
- 公开(公告)号:KR1020140124026A 公开(公告)日:2014-10-24
- 发明人: 이권진 , 김동일 , 이명우 , 최갑수 , 한규용 , 황현덕 , 유달현 , 박우철 , 이훈조
- 申请人: (주)에스티아이 , 삼성전기주식회사
- 申请人地址: 경기도 안성시 공도읍 봉기길 *
- 专利权人: (주)에스티아이,삼성전기주식회사
- 当前专利权人: (주)에스티아이,삼성전기주식회사
- 当前专利权人地址: 경기도 안성시 공도읍 봉기길 *
- 代理人: 남진우; 김재섭; 배철우; 조영철
- 主分类号: H01L21/673
- IPC分类号: H01L21/673 ; H01L21/677 ; B65G49/06 ; H01L51/56
The present invention relates to a base plate of a window frame shape, a plurality of magnets embedded in the base plate and installed, and pressing means which are coupled by a hinge to the base plate, clamping the top of the flexible substrate mounted by the magnet force, was provided on the base plate exposed to the bottom surface of the pressing means, by the insertion of the external clamping of the control pin includes a hole so as to rotate the pressing means upwardly. The present invention can be fixed with no deflection of the flexible substrate by using a magnet to the conveying jig, the generation of a foreign matter is prevented, since maintained by the magnetic force fixed state of the flexible substrate, a yield reduction due to the foreign matter in the processing of a flexible substrate there is an effect that can be prevented.
公开/授权文献:
- KR101525661B1 반송 지그에 플렉시블 기판을 장착하는 장치 公开/授权日:2015-06-04