基本信息:
- 专利标题: 반도체 칩
- 专利标题(英):Semiconductor chip
- 专利标题(中):半导体芯片
- 申请号:KR1020100057512 申请日:2010-06-17
- 公开(公告)号:KR1020110137524A 公开(公告)日:2011-12-23
- 发明人: 김종훈 , 서민석 , 한권환 , 서민석 , 양승택
- 申请人: 에스케이하이닉스 주식회사
- 申请人地址: 경기도 이천시 부발읍 경충대로 ****
- 专利权人: 에스케이하이닉스 주식회사
- 当前专利权人: 에스케이하이닉스 주식회사
- 当前专利权人地址: 경기도 이천시 부발읍 경충대로 ****
- 代理人: 강성배
- 主分类号: H01L21/60
- IPC分类号: H01L21/60 ; H01L21/66
摘要:
PURPOSE: A semiconductor chip is provided to test whether a penetrating electrode and a circuit layer are electrically connected or not by arranging a test pad part which is connected to the penetrating electrode and the circuit layer on the other side of a semiconductor substrate. CONSTITUTION: A semiconductor chip body comprises a semiconductor substrate and a circuit layer(114). The semiconductor substrate has one side and the other side which faces to the one side. The circuit layer is formed on the one side of the semiconductor substrate. A penetrating electrode is formed in order to pass through the one side from the other side of the semiconductor substrate. A test pad part tests whether the circuit layer is normally operated or not and whether the penetrating electrode and the circuit layer are electrically connected or not.
摘要(中):
目的:提供一种半导体芯片,用于通过布置连接到半导体衬底的另一侧上的穿透电极和电路层的测试焊盘部分来测试穿透电极和电路层是否电连接。 构成:半导体芯片主体包括半导体衬底和电路层(114)。 半导体衬底具有一侧,另一侧面向一侧。 电路层形成在半导体衬底的一侧上。 形成穿透电极以从半导体衬底的另一侧穿过一侧。 测试焊盘部分测试电路层是否正常工作,以及穿透电极和电路层是否电连接。
公开/授权文献:
- KR101142339B1 반도체 칩 公开/授权日:2012-05-17
信息查询:
EspacenetIPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L21/00 | 专门适用于制造或处理半导体或固体器件或其部件的方法或设备 |
--------H01L21/02 | .半导体器件或其部件的制造或处理 |
----------H01L21/027 | ..未在H01L21/18或H01L21/34组中包含的为进一步的光刻工艺在半导体之上制作掩膜 |
------------H01L21/50 | ...应用H01L21/06至H01L21/326中的任一小组都不包含的方法或设备组装半导体器件的 |
--------------H01L21/60 | ....引线或其他导电构件的连接,用于工作时向或由器件传导电流 |