基本信息:
- 专利标题： 광축주사 과정을 제거한 공초점 현미경 및 초점검출 방법
- 专利标题（英）：Confocal microscope eliminated z-axis scanning and method for detecting a focus
- 专利标题（中）：共焦显微镜消除的Z轴扫描和检测聚焦的方法
- 申请号：KR1020100020597 申请日：2010-03-09
- 公开(公告)号：KR1020110101537A 公开(公告)日：2011-09-16
- 发明人： 김재완 , 김종안 , 강주식 , 진종한
- 申请人： 한국표준과학연구원
- 申请人地址： 대전 유성구 가정로 ***(가정동, 한국표준과학연구원)
- 专利权人： 한국표준과학연구원
- 当前专利权人： 한국표준과학연구원
- 当前专利权人地址： 대전 유성구 가정로 ***(가정동, 한국표준과학연구원)
- 代理人： 특허법인 웰
- 主分类号： G02B21/00
- IPC分类号： G02B21/00 ; G01B11/06 ; G02B27/16
The present invention to solve this problem is to detect the focus position prior to the one of the measurement data by removing the optical axis of a confocal scanning process provides a confocal microscope removing the optical scanning process to restore the three-dimensional shape. Confocal optical scanning process to remove the present invention is a microscope, with a confocal microscope including a plurality of photodetectors; Using a plurality of light detected through the confocal microscope characterized in that the processing unit is configured to detect the focal position. The method comprising: a focus detection method in the processing section sets the optical axis position of the plurality of photodetectors; Detecting the amount of light by using a plurality of photodetectors in the optical axis position; By using the detected amount of light it is set at the optical axis position and the optical axis position of the optical detector characterized by consisting of a step of detecting the focusing position of the measurement specimen. According to the present invention, 3-D by conventional ball by removing the optical scanning process of focusing the microscope, so detecting the focus position by one of the measurement data and the reduced time for detecting the focus position of the measurement sample, reduces the time for detecting the focus the time to restore the shape is reduced. In addition, due to the optical scanning process by removing the optical scanning process it can be an accurate measurement to minimize the physical impact on the confocal microscope.
公开/授权文献:
- KR101091111B1 광축주사 과정을 제거한 공초점 현미경 및 초점검출 방법 公开/授权日：2011-12-09