基本信息:
- 专利标题： 기판 검사 장치 및 방법
- 专利标题（英）：Method and apparatus for inspecting a substrate
- 专利标题（中）：基板检查设备和方法
- 申请号：KR1020150106001 申请日：2015-07-27
- 公开(公告)号：KR101750521B1 公开(公告)日：2017-07-03
- 发明人： 서승애 , 이연희 , 안원미 , 이혜인 , 이종휘
- 申请人： 주식회사 고영테크놀러지
- 申请人地址： 서울특별시 금천구 가산디지털*로 **, **층 **층 (가산동, 한라시그마밸리)
- 专利权人： 주식회사 고영테크놀러지
- 当前专利权人： 주식회사 고영테크놀러지
- 当前专利权人地址： 서울특별시 금천구 가산디지털*로 **, **층 **층 (가산동, 한라시그마밸리)
- 代理人： 장덕순; 김봉섭
- 主分类号： G01B11/24
- IPC分类号： G01B11/24 ; G01B11/25 ; G01B11/26 ; G01N21/88 ; G06T7/00 ; G06T7/60 ; H01L21/66
The substrate inspection apparatus and method for displaying a part is disclosed in the three-dimensional inspection of the substrate. The substrate inspection apparatus displays an image of the components located inside the measurement of interest inspected area of the substrate or substrate and the measurement region on the display unit. Image of the part displayed in the display unit may be represented by the reference direction is determined in advance. The base direction and the real part is a difference in the direction disposed on the substrate is displayed on the display in the form of figures or graphics. Alternatively, the image and the real image of the arrangement of the component parts, as the reference direction, and at the same time displayed on the screen, the user can switch the display of the image using a toggle button.
公开/授权文献:
- KR1020170013070A 기판 검사 장치 및 방법 公开/授权日：2017-02-06
信息查询:
EspacenetIPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01B | 长度、厚度或类似线性尺寸的计量；角度的计量；面积的计量；不规则的表面或轮廓的计量 |
| ------G01B11/00 | 以采用光学方法为特征的计量设备 |
| --------G01B11/24 | .用于计量轮廓或曲率 |