基本信息:
- 专利标题: 힘 상수 보정 주사탐침 현미경 및 그의 보정 방법
- 专利标题(英):Scanning probe microscopy with calibrated force constant and calibrating method thereof
- 专利标题(中):具有校准力的扫描探针显微镜及其校准方法
- 申请号:KR1020130062740 申请日:2013-05-31
- 公开(公告)号:KR101492575B1 公开(公告)日:2015-02-11
- 发明人: 강치중 , 최영진 , 박미라
- 申请人: 명지대학교 산학협력단
- 申请人地址: 경기도 용인시 처인구 명지로 *** (남동, 명지대학교)
- 专利权人: 명지대학교 산학협력단
- 当前专利权人: 명지대학교 산학협력단
- 当前专利权人地址: 경기도 용인시 처인구 명지로 *** (남동, 명지대학교)
- 代理人: 특허법인다울
- 主分类号: G01Q40/00
- IPC分类号: G01Q40/00
The present invention relates to a constant compensation force scanning probe microscope and the correction method, in order to achieve this object a scanning probe microscope of the present invention, the sample is a sample support unit is fixed; The probe is attached to the cantilever and a detector placed on top of the specimen support unit; And it characterized in that it comprises a calculation of the probe by using a resonance frequency of the cantilever detector when in contact with the sample calculated by said probe a force constant which can compensate for the amount of force applied to the sample. According to the invention, used to force the monomolecular measuring scanning probe microscope in the distance measurement there is applied to the contact area between the probe and sample into one of the largest variable, using the resonance frequency of the cantilever detector probe is attached to this by calculating the force constant of the force applied to the sample there is an effect that it is possible to scan a more accurate sample by applying it to the cantilever detector.
公开/授权文献:
- KR1020140141234A 힘 상수 보정 주사탐침 현미경 및 그의 보정 방법 公开/授权日:2014-12-10