基本信息:
- 专利标题： 광학식 막두께계 및 광학식 막두께계를 구비한 박막 형성장치
- 专利标题（英）：Optical film thickness meter and thin film forming apparatus provided with optical film thickness meter
- 专利标题（中）：光学薄膜厚度计和薄膜成型设备配有光学薄膜厚度计
- 申请号：KR1020127002789 申请日：2010-06-29
- 公开(公告)号：KR101317536B1 公开(公告)日：2013-10-15
- 发明人： 사이교쿠요 , 히나타요헤이 , 오타키요시유키 , 지앙유송
- 申请人： 신크론 컴퍼니 리미티드
- 申请人地址： *-*, Minato Mirai *-chome, Nishi-ku, Yokohama-shi, Kanagawa, JAPAN
- 专利权人： 신크론 컴퍼니 리미티드
- 当前专利权人： 신크론 컴퍼니 리미티드
- 当前专利权人地址： *-*, Minato Mirai *-chome, Nishi-ku, Yokohama-shi, Kanagawa, JAPAN
- 代理人： 서종완
- 优先权： JPJP-P-2009-158798 2009-07-03
- 国际申请： PCT/JP2010/061041 2010-06-29
- 国际公布： WO2011001968 2011-01-06
- 主分类号： G01B11/06
- IPC分类号： G01B11/06 ; C23C14/54
The high precision provide a thin film forming apparatus including the possible optical film thickness meter and an optical film thickness meter for measuring the optical thickness and the spectral characteristics as. Based optical film thickness of the emitter 11 and the reflection mirror 17, a light receiver 19, and spectrometer 20 groups plate (實 基板) about consists, measured light incident direction to (S) on the opposite side, and a reflecting mirror (17) substantially perpendicular to the reflecting surface is disposed about the optical axis of measurement light. In addition, the plate group (S) is excreted has a predetermined slope angle (α) to the optical axis of measurement light. Measuring light (outgoing light and reflected light) is transmitted to the plate group (S) 2 times, it is possible to increase the amount of change in the transmittance (amount of light), the film can improve the control accuracy of the thickness measurement. In addition, it is possible to prevent the occurrence of measurement error due to the difference of the transmission position, Further, since no longer detect the measuring board at a given pass through the path can measure the light not transmitted twice receiver 19 side, with high accuracy can be the measurement of the film thickness and the optical spectral characteristics.
公开/授权文献:
- KR1020120052270A 광학식 막두께계 및 광학식 막두께계를 구비한 박막 형성장치 公开/授权日：2012-05-23
信息查询:
EspacenetIPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01B | 长度、厚度或类似线性尺寸的计量；角度的计量；面积的计量；不规则的表面或轮廓的计量 |
| ------G01B11/00 | 以采用光学方法为特征的计量设备 |
| --------G01B11/02 | .用于计量长度、宽度或厚度 |
| ----------G01B11/06 | ..用于计量厚度 |