基本信息:
- 专利标题: 가스 주입형 크랙커
- 专利标题(英):Gas injection type cracker
- 专利标题(中):燃气喷射式破碎机
- 申请号:KR1020110045822 申请日:2011-05-16
- 公开(公告)号:KR101222879B1 公开(公告)日:2013-01-18
- 发明人: 윤종만 , 조유석 , 강영진 , 송혜진
- 申请人: 주식회사 제이몬
- 申请人地址: 대전광역시 유성구 테크노*로 ** , ***(탑립동, 아이티전용벤처타운)
- 专利权人: 주식회사 제이몬
- 当前专利权人: 주식회사 제이몬
- 当前专利权人地址: 대전광역시 유성구 테크노*로 ** , ***(탑립동, 아이티전용벤처타운)
- 代理人: 김종관; 권오식; 박창희
- 主分类号: H01L31/18
- IPC分类号: H01L31/18 ; H01L31/04 ; H01L21/02
Gas injection type crackers according to an embodiment of the present invention, the gas in the lower region of the substrate 5 placed on the installed, but the gas injection type cracker 100, in the lower region of the deposition chamber 1, a susceptor (3) in the injection-type cracker gas injection type cracker 100 installing (100) by lifting upwardly a selenium or sulfur toward the substrate 5, such that the deposited film formed on the surface of the substrate 5, the selenium or crucible to sublimate the sulfur or selenium filled to the space charge in the space of the sulfur (10); Installed in the lower portion and the gas injection section 20 for injecting carrier gas for transferring the sulfur or selenium that are heated in the furnace 10 it turns to the substrate (5) of the crucible (10); The crucible installed in the 10 is moved upward to the transport gas injected from the gas injection section 20 of the gas movement division to reach the crucible (10) (30); Installed on the upper portion of the furnace 10 and transferred to the furnace 10, the selenium that is heated in a sublimation or sulfur, and the crucible 10 by the mobile Sikkim and at the same time conveying upward the conveying gas reaches the gas gas decomposing section 50 for thermal decomposition of the selenium or sulfur; And it includes the gas decomposing section 50, the gas discharge section for discharging into the substrate (5) installed on the upper portion and with the gas decomposing section 50, the selenium or the feed gas to sulfur the pyrolysis in the 70 .
公开/授权文献:
- KR1020120128175A 가스 주입형 크랙커 公开/授权日:2012-11-27