Solution (31) the efficiency of immobilization to solute solid phase surface molecule which is dissolved as (32) (1) is improved while and the spread of the solution (31) on the solid surface (1) and reliably suppressed, it offers the possibility to surface chemical processing equipment for fine patterning the miniaturization of the immobilized area. Apparatus of the present invention, one end opening (11a), a first conduit and the other end communicates with the liquid supply means (14) and (11), the first conduit thereof (11) opening (11a) one end so as to surround the periphery is open (12a) of, together with a second conduit communicating (12) to the other end of the liquid suction means (16), first, second conduit thereof (11 , 12 an opening (11a, 12a) of) a structure provided with a moving mechanism for relatively moving the solid surface and (1) a patterned object (21), opening of the first conduit (11) while discharging the patterning solution (31) from (11a), with the second conduit (12) surrounding the liquid phase an opening (12a) from the solution (31) of (2) or gas phase present in the surrounding by sucking, bleeding to prevent the solution (31) into all directions, to allow the surface chemical treatment of a fine pattern.