发明专利
JPH03188938A METHOD AND DEVICE FOR FORMING THIN FILM OF INORGANIC POLYMER AND APPLIED PRODUCT THEREOF
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基本信息:
- 专利标题： METHOD AND DEVICE FOR FORMING THIN FILM OF INORGANIC POLYMER AND APPLIED PRODUCT THEREOF
- 申请号：JP18145490 申请日：1990-07-11
- 公开(公告)号：JPH03188938A 公开(公告)日：1991-08-16
- 发明人： OISHI TOMOJI , TAKAHASHI KEN , NAKAZAWA TETSUO , TANAKA SHIGERU , MITSUYOSHI TADAHIKO
- 申请人： HITACHI LTD
- 专利权人： HITACHI LTD
- 当前专利权人： HITACHI LTD
- 优先权： JP18145490 1990-07-11; JP21135689 1989-08-18
- 主分类号： C01B13/14
- IPC分类号： C01B13/14 ; B01J13/00 ; B01J19/12 ; C01B13/10 ; C01B13/32 ; C01B17/20 ; C01B33/12 ; C01G15/00 ; C01G19/02 ; C01G23/04 ; C01G30/00 ; C03C17/22 ; C03C17/25 ; C03C25/10 ; C07F19/00 ; F02B75/02 ; G02B1/11 ; G02B1/111 ; G02B1/14 ; G11B7/26 ; H01B3/10 ; H01G2/12 ; H01G4/10 ; H01G4/33 ; H01L21/3105 ; H01L21/316 ; H01L21/3205 ; H01L23/29 ; H01L23/31 ; H05B33/10 ; H05B33/12 ; H05B33/14 ; H05B33/22 ; H05K1/03
摘要：
PURPOSE:To form a thin film of an inorg. polymer by irradiating an aq. soln. of an organometallic compd. having a low mol. wt. with electromagnetic waves having specified wavelength, coating a substrate with the soln. contg. a formed prepolymer and drying the soln. CONSTITUTION:An aq. soln. of an organometallic compd. having a low mol. wt. is irradiated with electromagnetic waves contg. a component having specified wavelength required to break the bond of the metal atom and org. group of the organometallic compd. By this irradiation, the hydrolysis or thiolysis of the compd. is accelerated and a metal oxide or metal sulfide prepolymer is formed in the soln. A substrate is coated with the resulting prepolymer soln. and this soln. is dried to form a thin film of an inorg. polymer. Optical energy such as excimer laser light is suitable for use as the electromagnetic waves.
公开/授权文献:
- JPH0832304B2 公开/授权日：1996-03-29
信息查询:
EspacenetIPC结构图谱:
| C | 化学；冶金 |
| --C01 | 无机化学 |
| ----C01B | 非金属元素；其化合物 |
| ------C01B13/00 | 氧；臭氧；一般氧化物或氢氧化物 |
| --------C01B13/14 | .制备一般氧化物或氢氧化物的方法 |