基本信息:
- 专利标题: 光干渉計測装置
- 专利标题(英):OPTICAL INTERFERENCE MEASURING DEVICE
- 申请号:JP2020042765 申请日:2020-03-12
- 公开(公告)号:JP2021143938A 公开(公告)日:2021-09-24
- 发明人: 木村 和哉 , 早川 雅之 , 森野 久康 , 長崎 裕介
- 申请人: オムロン株式会社
- 申请人地址: 京都府京都市下京区塩小路通堀川東入南不動堂町801番地
- 专利权人: オムロン株式会社
- 当前专利权人: オムロン株式会社
- 当前专利权人地址: 京都府京都市下京区塩小路通堀川東入南不動堂町801番地
- 代理人: 特許業務法人秀和特許事務所
- 主分类号: G01B11/00
- IPC分类号: G01B11/00 ; G01B9/02
To provide an optical interference measuring device of a multichannel type at low cost without incurring an increase in device size.SOLUTION: A first return light received by a first measurement head is guided to a detector via a first optical path and a fiber coupler, and a second return light received by a second measurement head is guided to a detector via a second optical path and a fiber coupler. The optical path length D1 from the fiber coupler to the tip of the first measurement head, the optical path length D2 from the fiber coupler to the tip of the second measurement head, the maximum optical path length R1max in the measurement range of the first measurement head, the optical path length S1 of first reference light interfered with the first return light, and the optical path length S2 of second reference light interfered with the second return light are set so as to satisfy the relationship D1+R1max-S1
信息查询:
EspacenetIPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01B | 长度、厚度或类似线性尺寸的计量;角度的计量;面积的计量;不规则的表面或轮廓的计量 |
------G01B11/00 | 以采用光学方法为特征的计量设备 |