To provide an indirect heating vapor deposition source capable of reducing the amount of deposition of a deposit to an outer liner.SOLUTION: An indirect heating vapor deposition source 21 for heating a vessel (a liner 22) charged with a vapor deposition material 4 by thermo-electrons emitted from an electron source 6 to heat and evaporate the vapor deposition material 4 includes an outer liner 31, an inner liner 32, the electron source 6 and a reflector 23. The inner liner 32 is arranged on the inner side of the outer liner 31 and is charged with the vapor deposition material 4; the electron source 6 supplies electrons for heating the outer liner by electron bombardment; and the reflector 23 is arranged between the inner liner 32 and the outer liner 31 and reflects radiant heat emitted from the outer liner 31.SELECTED DRAWING: Figure 2