基本信息:
- 专利标题: Semiconductor sensor device having movable sensor structure
- 专利标题(中):具有可移动传感器结构的半导体传感器器件
- 申请号:JP2006202010 申请日:2006-07-25
- 公开(公告)号:JP2008028319A 公开(公告)日:2008-02-07
- 发明人: FURUICHI TAKAMOTO
- 申请人: Denso Corp , 株式会社デンソー
- 专利权人: Denso Corp,株式会社デンソー
- 当前专利权人: Denso Corp,株式会社デンソー
- 优先权: JP2006202010 2006-07-25
- 主分类号: H01L23/02
- IPC分类号: H01L23/02 ; G01P15/08 ; H01L29/84
摘要:
PROBLEM TO BE SOLVED: To form a structure preventing an increase of chip size per chip and obtaining adhesive strength. SOLUTION: By making the adhesive surfaces in a sensor chip 1 and a protective cap 2 to be projected-recessed surfaces 1c and 2b, the adhesive area is increased compared with that in the case of a mere plane. Thereby, the large adhesive surface can be obtained without increasing the chip size of the sensor chip 1 and the size of the protective cap 2, so as to enhance the adhesive strength between the sensor chip 1 and the protective cap 2. Moreover, a heat-resistant adhesive 3 can enter the recess of the projected-recessed surfaces 1c and 2b that are formed in the sensor chip 1 and the protective cap 2, so as to suppress the extrusion of the heat-resistant adhesive 3 to the sensor structure 1a side. COPYRIGHT: (C)2008,JPO&INPIT
摘要(中):
要解决的问题:形成防止每个芯片的芯片尺寸增加并获得粘合强度的结构。 解决方案:通过将传感器芯片1和保护盖2中的粘合剂表面设置为突出的凹入表面1c和2b,与仅仅是平面的情况相比,粘合剂面积增加。 因此,可以在不增加传感器芯片1的芯片尺寸和保护盖2的尺寸的情况下获得大的粘合表面,从而提高传感器芯片1和保护盖2之间的粘合强度。而且, 耐磨性粘合剂3可以进入形成在传感器芯片1和保护盖2中的突出凹陷表面1c和2b的凹部,以便抑制耐热粘合剂3向传感器结构1a侧的挤出 。 版权所有(C)2008,JPO&INPIT
公开/授权文献:
信息查询:
EspacenetIPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L23/00 | 半导体或其他固态器件的零部件 |
--------H01L23/02 | .容器;封接 |