发明专利
JP2006031498A Flow control method of clustered fluid and flow control apparatus for clustered fluid to be used therefor
有权
基本信息:
- 专利标题： Flow control method of clustered fluid and flow control apparatus for clustered fluid to be used therefor
- 专利标题（中）：用于其所使用的聚集流体的流体流量和流量控制装置的流量控制方法
- 申请号：JP2004210967 申请日：2004-07-20
- 公开(公告)号：JP2006031498A 公开(公告)日：2006-02-02
- 发明人： OMI TADAHIRO , SUGIYAMA KAZUHIKO , MIZUSAWA KANEYOSHI , TAKAHASHI EIJI , UNO TOMIO , NISHINO KOJI , DOI RYOSUKE , IKEDA SHINICHI , NAGASE MASAAKI
- 申请人： Fujikin Inc , Tohoku Univ , Tokyo Electron Ltd , 国立大学法人東北大学 , 東京エレクトロン株式会社 , 株式会社フジキン
- 专利权人： Fujikin Inc,Tohoku Univ,Tokyo Electron Ltd,国立大学法人東北大学,東京エレクトロン株式会社,株式会社フジキン
- 当前专利权人： Fujikin Inc,Tohoku Univ,Tokyo Electron Ltd,国立大学法人東北大学,東京エレクトロン株式会社,株式会社フジキン
- 优先权： JP2004210967 2004-07-20
- 主分类号： G05D7/06
- IPC分类号： G05D7/06
摘要：
PROBLEM TO BE SOLVED: To attain flow control with high precision of a clustered fluid such as a hydrogen fluoride gas to be supplied to a vacuum chamber or the like with respect to a flow rate range of 3-300SCCM by using a compression flow controller.
SOLUTION: The flow control method for the clustered fluid to use the compression flow controller which operates as Q=KP
1 (where K is a constant) a flow rate Q of a gas circulating through an orifice in a state that gas pressure P
1 on an orifice upstream side and gas pressure P
2 on an orifice downstream side are held equal to or below a critical pressure ratio of the gas. In the method, by warming the compression flow controller up to a temperature at 40°C or higher or adding a dilution gas to the clustered fluid to make it equal to or lower than partial pressure, association of molecules is dissociated and the clustered fluid put into a single molecular state is later circulated through the orifice.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要（中）：
SOLUTION: The flow control method for the clustered fluid to use the compression flow controller which operates as Q=KP
1 (where K is a constant) a flow rate Q of a gas circulating through an orifice in a state that gas pressure P
1 on an orifice upstream side and gas pressure P
2 on an orifice downstream side are held equal to or below a critical pressure ratio of the gas. In the method, by warming the compression flow controller up to a temperature at 40°C or higher or adding a dilution gas to the clustered fluid to make it equal to or lower than partial pressure, association of molecules is dissociated and the clustered fluid put into a single molecular state is later circulated through the orifice.
COPYRIGHT: (C)2006,JPO&NCIPI
要解决的问题：为了通过使用压缩方式相对于3-300SCCM的流量范围来获得要供应到真空室等的诸如氟化氢气体的聚集流体的高精度的流量控制 流量控制器 解决方案：聚集流体使用压缩流量控制器的流量控制方法，该压缩流量控制器作为Q = KP 1 （其中K是常数），循环通过 孔口上游侧的气体压力P 1 的孔口和孔口下游侧的气体压力P 2 保持在等于或低于 加油站。 在该方法中，通过将压缩流量控制器加热至40℃以上的温度，或者向聚集流体添加稀释气体使其等于或低于分压，使分子的缔合解离，聚集的液体放置 进入单一分子状态后来循环通过孔口。 版权所有（C）2006，JPO＆NCIPI
公开/授权文献:
信息查询:
EspacenetIPC结构图谱:
| G | 物理 |
| --G05 | 控制；调节 |
| ----G05D | 非电变量的控制或调节系统 |
| ------G05D7/00 | 流量控制 |
| --------G05D7/06 | .以使用电装置为特征的 |