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1. 发明专利

JP2013229052A Method for discontinuous type fluid flow rate switch control using pressure type flow rate control device 有权
标题翻译：使用压力类型流量控制装置的不连续流体流量开关控制方法
公开(公告)号：JP2013229052A
公开(公告)日：2013-11-07
申请号：JP2013144428
申请日：2013-07-10
申请人： Tohoku Univ , 国立大学法人東北大学 , Tokyo Electron Ltd , 東京エレクトロン株式会社 , Fujikin Inc , 株式会社フジキン
发明人： OMI TADAHIRO , NISHINO KOJI , DOI RYOSUKE , NAGASE MASAAKI , SUGITA KATSUYUKI , HIRATA KAORU , HIROSE TAKASHI , SHINOHARA TSUTOMU , IKEDA SHINICHI , YOSHIDA TOSHIHIDE , TANAKA HISASHI
IPC分类号： G05D7/00
CPC分类号： G05D7/0635 , G01F1/42 , G01F7/005 , Y10T137/0379
摘要： PROBLEM TO BE SOLVED: To maintain accuracy in flow rate control without increasing the number of switching steps in a pressure type flow rate control device such that switching flow rate ranges controls fluid flow rates.SOLUTION: The pressure type flow rate control device has fluid passages as two or more parallel fluid passages, which have orifices different in fluid flow rate property interposed therein, respectively. To control fluid flow rates in a first flow rate range, fluid in the first flow rate range is passed to an orifice in a fluid passage. To control fluid flow rates in the other plural flow rate ranges, fluid in the other respective flow rate ranges is passed to the orifice in the fluid passage to pass fluid in the first flow rate range through and orifices in fluid passages to pass fluid in the other respective flow rate ranges through. The flow rate ranges are set so that: the maximum flow rate of the first flow rate range is lower than the minimum flow rate of any other flow rate range; and the other respective flow rate ranges have different minimum flow rates and different maximum flow rates, respectively. Flow rate ranges included in neither the first flow rate range nor the other flow rate ranges are excluded from objects of flow rate control.
摘要翻译：要解决的问题：为了保持流量控制的精度，而不增加压力式流量控制装置中的切换步骤数，使得切换流量范围控制流体流量。解决方案：压力型流量控制装置具有流体通道作为两个或更多个平行的流体通道，其分别具有插入其中的流体流速特性的孔。为了在第一流量范围内控制流体流速，第一流量范围内的流体被传递到流体通道中的孔口。为了控制另外多个流量范围内的流体流量，在另一个流量范围内的流体被传递到流体通道中的孔口，以使第一流量范围内的流体通过流体通道中的孔并使流体在其他各个流量范围通过。流量范围设定为：第一流量范围的最大流量比任何其它流量范围的最小流量低; 其他各自的流量范围分别具有不同的最小流量和不同的最大流量。不包括第一流量范围和其他流量范围内的流量范围都不包括流量控制对象。

2. 发明专利

JP2006031498A Flow control method of clustered fluid and flow control apparatus for clustered fluid to be used therefor 有权
标题翻译：用于其所使用的聚集流体的流体流量和流量控制装置的流量控制方法
公开(公告)号：JP2006031498A
公开(公告)日：2006-02-02
申请号：JP2004210967
申请日：2004-07-20
申请人： Fujikin Inc , Tohoku Univ , Tokyo Electron Ltd , 国立大学法人東北大学 , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： OMI TADAHIRO , SUGIYAMA KAZUHIKO , MIZUSAWA KANEYOSHI , TAKAHASHI EIJI , UNO TOMIO , NISHINO KOJI , DOI RYOSUKE , IKEDA SHINICHI , NAGASE MASAAKI
IPC分类号： G05D7/06
摘要： PROBLEM TO BE SOLVED: To attain flow control with high precision of a clustered fluid such as a hydrogen fluoride gas to be supplied to a vacuum chamber or the like with respect to a flow rate range of 3-300SCCM by using a compression flow controller.
SOLUTION: The flow control method for the clustered fluid to use the compression flow controller which operates as Q=KP
1 (where K is a constant) a flow rate Q of a gas circulating through an orifice in a state that gas pressure P
1 on an orifice upstream side and gas pressure P
2 on an orifice downstream side are held equal to or below a critical pressure ratio of the gas. In the method, by warming the compression flow controller up to a temperature at 40°C or higher or adding a dilution gas to the clustered fluid to make it equal to or lower than partial pressure, association of molecules is dissociated and the clustered fluid put into a single molecular state is later circulated through the orifice.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了通过使用压缩方式相对于3-300SCCM的流量范围来获得要供应到真空室等的诸如氟化氢气体的聚集流体的高精度的流量控制流量控制器解决方案：聚集流体使用压缩流量控制器的流量控制方法，该压缩流量控制器作为Q = KP 1 （其中K是常数），循环通过孔口上游侧的气体压力P 1 的孔口和孔口下游侧的气体压力P 2 保持在等于或低于加油站。在该方法中，通过将压缩流量控制器加热至40℃以上的温度，或者向聚集流体添加稀释气体使其等于或低于分压，使分子的缔合解离，聚集的液体放置进入单一分子状态后来循环通过孔口。版权所有（C）2006，JPO＆NCIPI

3. 发明专利

JP2007004644A Flow rate range variable flow control device 有权
标题翻译：流量范围可变流量控制装置
公开(公告)号：JP2007004644A
公开(公告)日：2007-01-11
申请号：JP2005185845
申请日：2005-06-27
申请人： Fujikin Inc , Tohoku Univ , Tokyo Electron Ltd , 国立大学法人東北大学 , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： OMI TADAHIRO , SAITO MASAHITO , HINO SHOICHI , SHIMAZU TSUTOMU , MIURA KAZUYUKI , NISHINO KOJI , NAGASE MASAAKI , SUGITA KATSUYUKI , HIRATA KAORU , DOI RYOSUKE , HIROSE TAKASHI , SHINOHARA TSUTOMU , IKEDA SHINICHI , IMAI TOMOKAZU , YOSHIDA SHUNEI , TANAKA HISASHI
IPC分类号： G05D7/00 , G01F1/00 , G01F1/42 , G01F1/48 , G01F1/684 , G01F7/00
CPC分类号： G05D7/0641 , G01F1/363 , G01F1/6842 , G01F1/6847 , G01F5/005 , G01F7/005 , G05D7/0635 , G05D7/0647 , G05D23/1927 , Y10T137/0379 , Y10T137/7759 , Y10T137/776 , Y10T137/8593 , Y10T137/86734 , Y10T137/86815 , Y10T137/87265 , Y10T137/87314 , Y10T137/8741 , Y10T137/87499 , Y10T137/87684
摘要： PROBLEM TO BE SOLVED: To miniaturize a flow control device and to reduce the facility cost by enabling accurate flow control of a fluid in a further wide flow area by use of one flow control device. SOLUTION: The pressure type flow control device is adapted to calculate the flow rate of a fluid passing through an orifice 8 using an orifice upstream pressure P 1 and/or an orifice downstream pressure P 2 as Qc=KP 1 (K is a proportionality factor) or Qc=KP 2 m (P 1 -P 2 ) n (K is a proportionality factor, and m and n are constant numbers). In this pressure type flow control device, a fluid passage between the downstream side of a control valve and a fluid supplying conduit is formed of at least two or more parallel fluid passages, and orifices differed in fluid flow characteristic are interposed in the parallel fluid passages, respectively. The fluid in a small flow area is distributed to one orifice in flow control of the fluid in the small flow area, and the fluid in a large flow area is switchingly distributed to the other orifice in flow control of the fluid in the large flow area. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：通过使用一个流量控制装置，能够在更宽的流动区域中对流体进行精确的流量控制，从而使流量控制装置小型化并降低设备成本。解决方案：压力型流量控制装置适于计算通过孔口上游压力P 1 和/或孔口下游压力P 2 作为Qc = KP 1 （K是比例因子）或Qc = KP 2 m（SP （K是比例因子，m和n是常数）。在该压力式流量控制装置中，控制阀的下游侧与流体供给管道之间的流体通路由至少两个以上的平行流体通路形成，并且流体流动特性不同的孔插入到并联流体通路，分别。小流量区域中的流体在小流量区域中的流体的流动控制中分配到一个孔口，并且在大流量区域中的流体的流量控制中，大流量区域中的流体被切换地分配到另一个孔口。版权所有（C）2007，JPO＆INPIT

4. 发明专利

JP2012033188A Variable flow rate range type flow control device 有权
标题翻译：可变流量范围流量控制装置
公开(公告)号：JP2012033188A
公开(公告)日：2012-02-16
申请号：JP2011219478
申请日：2011-10-03
申请人： Fujikin Inc , Tohoku Univ , Tokyo Electron Ltd , 国立大学法人東北大学 , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： OMI TADAHIRO , SIATO MASAHITO , HINO SHOICHI , SHIMAZU TSUYOSHI , MIURA KAZUYUKI , NISHINO KOJI , NAGASE MASAAKI , SUGITA KATSUYUKI , HIRATA KAORU , DOI RYOSUKE , HIROSE TAKASHI , SHINOHARA TSUTOMU , IKEDA SHINICHI , IMAI TOMOKAZU , YOSHIDA TOSHIHIDE , TANAKA HISASHI
IPC分类号： G05D7/06
摘要： PROBLEM TO BE SOLVED: To miniaturize a flow control device and reduce equipment cost by enabling a single flow control device to highly accurately control a wider flow rate range of fluids.SOLUTION: In a pressure type flow rate control device which calculates a flow rate of a fluid flowing through an orifice using either pressures at an upstream side of the orifice Pand at a downstream side of the orifice or at least the pressure at the upstream side of the orifice P, a fluid passage between the downstream side of a first valve 2 of the pressure type flow rate control device and a fluid supply pipe conduit 5 is bifurcated into two parallel fluid passages, one fluid passage 5c provided with a second valve 34 and a first orifice 8c and the other fluid passage 5g provided with no valve and a second orifice 8a. The one fluid passage 5c is controlled by an opening and closing of the second valve 34 and allows the fluid in a large flow rate range to flow to the first orifice 8c. The other fluid passage 5g is continuous all the time and allows the fluid in a small flow rate range to flow to the second orifice 8a.
摘要翻译：要解决的问题：通过使单个流量控制装置能够高精度地控制流体的更宽的流量范围，来使流量控制装置小型化并降低设备成本。解决方案：在压力式流量控制装置中，使用压力在孔口P 1 的上游侧计算流过孔口的流体的流量，以及在孔口的下游侧或孔口的上游侧的压力至少为压力类型的第一阀2的下游侧之间的流体通路流量控制装置和流体供给管道5分成两个平行的流体通道，一个流体通道5c设置有第二阀34和第一孔口8c，另一个流体通道5g没有设置阀和第二孔口8a。通过第二阀34的打开和关闭来控制一个流体通道5c，并允许大流量范围内的流体流向第一孔口8c。另一个流体通道5g始终是连续的，并允许流体在小流量范围内流到第二孔口8a。版权所有（C）2012，JPO＆INPIT

5. 发明专利

JP2013077710A Vaporizer 有权
标题翻译：蒸气器
公开(公告)号：JP2013077710A
公开(公告)日：2013-04-25
申请号：JP2011216885
申请日：2011-09-30
申请人： Tohoku Univ , 国立大学法人東北大学 , Fujikin Inc , 株式会社フジキン
发明人： OMI TADAHIRO , SHIRAI YASUYUKI , NAGASE MASAAKI , YAMASHITA SATORU , HIDAKA ATSUSHI , DOI RYOSUKE , NISHINO KOJI , IKEDA SHINICHI , HIRAO YOSHIYUKI
IPC分类号： H01L21/205 , C23C16/448
CPC分类号： C23C16/4481
摘要： PROBLEM TO BE SOLVED: To provide a vaporizer that can stabilize behavior of pressure in the vaporizer.SOLUTION: A vaporizer includes: a chamber with an inlet and an outlet; a heater to heat the inside of the chamber; a partition structure 13 that is disposed in the chamber and divides a liquid material in the chamber into a plurality of sections; and fluid communication parts 20 that are disposed at lower parts of the partition structure 13 and permit a fluid communication between the individual sections divided by the partition structure 13. The partition structure has lattice-like, honeycomb-like, mesh-like, or pipe-like partitions.
摘要翻译：要解决的问题：提供可以稳定蒸发器中的压力行为的蒸发器。蒸发器包括：具有入口和出口的室; 用于加热室内部的加热器; 分隔结构13，其设置在所述室中并将所述室中的液体材料分成多个部分; 和流体连通部20，其配置在分隔结构体13的下部并允许由分隔结构13分隔的各个部分之间的流体连通。分隔结构具有格子状，蜂窝状，网状或管状像分区。版权所有（C）2013，JPO＆INPIT

6. 发明专利

JP2007057474A Gasket type orifice and pressure type flow control device using the same 有权
标题翻译：垫圈型式和压力型流量控制装置使用它
公开(公告)号：JP2007057474A
公开(公告)日：2007-03-08
申请号：JP2005245804
申请日：2005-08-26
申请人： Fujikin Inc , Tohoku Univ , 国立大学法人東北大学 , 株式会社フジキン
发明人： OMI TADAHIRO , NISHINO KOJI , DOI RYOSUKE , IKEDA SHINICHI , NAGASE MASAAKI , HIRATA KAORU , SUGITA KATSUYUKI , SHINOHARA TSUTOMU , HIROSE TAKASHI , IMAI TOMOKAZU , YOSHIDA SHUNEI , TANAKA HISASHI
IPC分类号： G01F1/42 , G05D7/06
CPC分类号： F16K27/003 , F16L55/02718 , G01F1/36 , G01F15/001 , G01F15/005 , G05D7/0635
摘要： PROBLEM TO BE SOLVED: To easily switch, without decomposition and fabrication of a pressure type flow control device, orifices in the device and to easily switch controlled flow rates. SOLUTION: The flow inlet of a valve body 23 of a control valve 2 and a mounting block 39 on the flow inlet, and the flow outlet of the valve body 23 and a mounting block 43 on the outlet are respectively connected dissociatably and airtightly. Thus, a flow passage is formed so that gas flows through the control valve 2. A gasket type orifice 38 of the device A is inserted to fit attachably and detachably between a gasket type orifice insertion hole 42c on the outlet of the valve body 23 and a gasket type orifice insertion hole 43b of the mounting block 43 on the outlet. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了容易地在不分解和制造压力式流量控制装置的情况下切换装置中的孔口并且容易地切换受控的流量。解决方案：控制阀2的阀体23和流入口上的安装块39的流入口以及阀体23的流出口和出口上的安装块43分别分别连接和气密性。因此，形成流路，使得气体流过控制阀2.装置A的垫圈型孔38被插入以可装卸地安装在阀体23的出口上的垫圈型孔插入孔42c和出口上的安装块43的垫圈型孔插入孔43b。版权所有（C）2007，JPO＆INPIT

7. 发明专利

JP2005011258A Device and method for distributary supply of gas to chamber from gas supply plant equipped with flow-control device 有权
标题翻译：从配有流量控制装置的气体供应设备向气室分配供气的装置和方法
公开(公告)号：JP2005011258A
公开(公告)日：2005-01-13
申请号：JP2003177134
申请日：2003-06-20
申请人： Fujikin Inc , Tokyo Electron Ltd , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： SUGIYAMA KAZUHIKO , IKEDA SHINICHI , NISHINO KOJI , DOI RYOSUKE , UENOYAMA TOYOMI
IPC分类号： F17D1/04 , G05D7/06 , H01L21/02 , H01L21/31
CPC分类号： G05D7/00 , G05D7/0623 , G05D7/0652 , G05D7/0658 , G05D7/0664 , G05D11/132 , Y10T137/0379 , Y10T137/0396 , Y10T137/2521 , Y10T137/2529 , Y10T137/2562 , Y10T137/263 , Y10T137/2663 , Y10T137/7761 , Y10T137/8175
摘要： PROBLEM TO BE SOLVED: To accurately, quickly and divergently supply a predetermined flow rate Q of the processing gas at a desirable flow ratio Q 1 /Q 2 into a chamber from a gas supply plant equipped with a flow rate control device. SOLUTION: This device supplies the predetermined flow rate Q of the gas G divergently at a predetermined flow ratio Q 1 /Q 2 into the chamber C through a plurality of branch supply lines GL 1 , GL 2 and shower plates 3, 4 fixed to the terminals from the gas supply plant 1 equipped with the flow rate control device QCS. Opening and closing valves OV 1 , OV 2 are respectively interposed on a plurality of branch supply lines GL 1 , GL 2 . A bypass line BL 1 branched from the GL 1 in the downstream of the OV 1 , a BL 2 branched from the GL 2 in the downstream of the OV 2 , a pressure type divided flow rate controller FV connected to the BL 1 and the BL 2 , a pressure sensor PS 1 measuring the pressure in the GL 1 , and a pressure sensor PS 2 measuring the pressure in the GL 2 are interposed. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了准确地，以期望的流量比Q＆lt; SB＆gt; / Q＆lt; SB＆gt; 2＆lt; / SB＆gt;将处理气体的预定流量Q快速地和分散地供给到来自配备有流量控制装置的气体供给装置。
解决方案：该装置以预定的流量比Q / Q 2 将气体G的预定流量Q通过多个分支供应线GL 1，SB <2>和从配备有流量控制装置QCS的气体供应设备1固定到端子的淋浴板3,4。打开和关闭阀OV 1 ，OV 2 分别插入在多个分支供应管线GL 1 ，GL SB>。在OV 1 的下游从GL 1 分支的旁路管线BL 1 ，支化的BL 2 在OV 2 的下游的GL 2 中，连接到BL 1 的压力型分流量控制器FV， SB> 2 ，测量GL 1 中的压力的压力传感器PS 1 和测量插入GL 2 中的压力。版权所有（C）2005，JPO＆NCIPI

8. 发明专利

JP2004138425A Temperature measuring instrument for pressure type flow controller 有权
公开(公告)号：JP2004138425A
公开(公告)日：2004-05-13
申请号：JP2002301421
申请日：2002-10-16
申请人： Fujikin Inc , Tadahiro Omi , Tokyo Electron Ltd , 大見忠弘 , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： OMI TADAHIRO , NISHINO KOJI , MATSUMOTO ATSUSHI , DOI RYOSUKE , IKEDA SHINICHI , SUGIYAMA KAZUHIKO
IPC分类号： G01F1/42 , G01F1/50 , G01K7/18 , G01L1/22 , G01L9/00
摘要： PROBLEM TO BE SOLVED: To actualize a pressure type flow controller for controlling the rate of an orifice passing flow with high accuracy by simultaneously measuring a fluid pressure and a fluid temperature at a same point in the fluid. SOLUTION: This pressure type flow controller controls the rate of flow passing an orifice by computing Qc = K×P 1 with an upstream side pressure assumed as P 1 when the flow velocity of a fluid passing through an orifice 4 is at the velocity of sound. The controller is characterized in that an upstream side pressure sensor comprises a resistance element whose electrical resistance varies under pressure and this resistance element as the pressure sensor is simultaneously used as a temperature sensor. In this resistance element, four resistors 41a to 41d are disposed on a pressure receiving surface to form a bridge circuit using the four resistors as four sides. A constant-current power supply 43 is connected between input terminals 42a and 42b of the bridge circuit. A voltage V p between output terminals 44a and 44b is used to detect a fluid pressure P while a voltage V T between the input terminals is used to detect fluid temperature T, thus causing the resistance element to function as a pressure-temperature sensor 10. COPYRIGHT: (C)2004,JPO

9. 发明专利

JP2010204899A Fluid control device 有权
标题翻译：流体控制装置
公开(公告)号：JP2010204899A
公开(公告)日：2010-09-16
申请号：JP2009049045
申请日：2009-03-03
申请人： Fujikin Inc , Tokyo Electron Ltd , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： HIROSE JUN , TEZUKA KAZUYUKI , UCHIDA YOHEI , KOGAI MUTSUNORI , MATSUDA TAKAHIRO , DOI RYOSUKE , NISHINO KOJI , IKEDA SHINICHI
IPC分类号： G05D7/06 , C23C16/52 , H01L21/205
CPC分类号： C23C16/45561 , H01L21/67017 , Y10T137/0396
摘要： PROBLEM TO BE SOLVED: To provide a fluid control device for reducing a space as well as costs. SOLUTION: The fluid control device 1 includes a fluid control unit 2 and a fluid introduction unit 3. The fluid introduction unit 3 is divided into three and includes: a first and second inlet-side shutoff/opening units 5, 6 arranged on an inlet-side and each composed of 2×N/2 pieces of on-off valves 23; and a fluid control unit side shutoff/opening unit 7 composed of 4×M pieces of the on-off valves 23 and arranged between the first and the second inlet-side shutoff/opening units 5, 6 and the fluid control unit 2. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于减少空间以及成本的流体控制装置。流体控制装置1包括流体控制单元2和流体引入单元3.流体引入单元3被分成三部分，包括：第一和第二入口侧截止/打开单元5,6，布置成在入口侧，每个由2×N / 2个开关阀23组成; 以及由4×M个开关阀23构成并设置在第一和第二入口侧切断/打开单元5,6和流体控制单元2之间的流体控制单元侧截止/打开单元7。 P>版权所有（C）2010，JPO＆INPIT

10. 发明专利

JP2004045424A Mounting structure of pressure detector 审中-公开
公开(公告)号：JP2004045424A
公开(公告)日：2004-02-12
申请号：JP2003330204
申请日：2003-09-22
申请人： Fujikin Inc , Tadahiro Omi , Tokyo Electron Ltd , 大見忠弘 , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： OMI TADAHIRO , HIROSE TAKASHI , IDETA EIJI , IKEDA SHINICHI , DOI RYOSUKE , NISHINO KOJI , YOSHIKAWA KAZUHIRO , KAGATSUME SATORU , HIROSE JUN , FUKAZAWA KAZUO , KOIZUMI HIROSHI , NAGAOKA HIDEKI
IPC分类号： G01L19/00
摘要： PROBLEM TO BE SOLVED: To prevent fluctuation of an output characteristic or a temperature characteristic caused by distortion of a diaphragm by stress when a diaphragm type pressure detector is integrated into a conduit.
SOLUTION: In this mounting structure of the pressure detector, the pressure detector formed by fixing integrally a diaphragm base equipped with a diaphragm and a sensor base having a built-in sensor element operated by displacement of the diaphragm is inserted through a gasket into an insertion hole of a fixture body fixed on a pipe conduit or a mechanical device, and the pressure detector is pressed and fixed gastightly by a presser member inserted into the insertion hole from the upper side. In the structure, the presser member abuts on the body part upper face of the diaphragm base and the gasket abuts on the body part lower face thereof respectively, and a shallow groove is formed in a ring shape on the inside position of the abutting part with the presser member on the body part upper face and a shallow groove is formed in a ring shape on the inside position of the abutting part with the gasket on the body part lower face, and distortion generated by pressing by the presser member is absorbed by both shallow grooves.
COPYRIGHT: (C)2004,JPO

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