基本信息:
- 专利标题: 基于PECVD的石墨烯薄膜镀膜设备及方法
- 专利标题(英):Graphene thin film coating device and method based on PECVD
- 申请号:CN201610514142.9 申请日:2016-06-30
- 公开(公告)号:CN106011798A 公开(公告)日:2016-10-12
- 发明人: 朱建明 , 李金清
- 申请人: 肇庆市科润真空设备有限公司
- 申请人地址: 广东省肇庆市端州大道
- 专利权人: 肇庆市科润真空设备有限公司
- 当前专利权人: 北京沁襄辰科技有限公司
- 当前专利权人地址: 100027 北京市朝阳区工人体育场东路甲2号7层701室06号
- 代理机构: 广州市华学知识产权代理有限公司
- 代理人: 谢静娜; 裘晖
- 主分类号: C23C16/54
- IPC分类号: C23C16/54 ; C23C16/26 ; C23C16/509
The invention discloses a graphene thin film coating device and method based on PECVD. The device comprises a plurality of vacuum chambers which are linearly arranged and a flexible base material conveying mechanism which penetrates the multiple vacuum chambers; the multiple vacuum chambers comprise the unwinding chamber, the multiple coating chambers and the winding chamber which are all sequentially connected; each coating chamber is internally provided with a radio frequency toward-target device; the radio frequency toward-target devices in the multiple coating chambers form a plasma enhanced chemical vapor deposition system; an air partitioning chamber is arranged between any two adjacent coating chambers; and the unwinding chamber, the winding chamber, the coating chambers and the air portioning chambers are externally connected with a high-vacuum exhausting system. According to the method, vacuumizing is performed on the vacuum chambers till the vacuum degree reaches a set value; then a flexible base material is released by the unwinding chamber and conveyed into the coating chambers, and a graphene film is deposited on the surface of the flexible base material through a PECVD method; and finally, the graphene film is conveyed into the winding chamber to be wound. The graphene thin film coating device and method based on PECVD are uniform in coating, and the film layer manufactured on the surface of the flexible base material is high in purity.
公开/授权文献:
- CN106011798B 基于PECVD的石墨烯薄膜镀膜设备及方法 公开/授权日:2018-10-23
