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    • 1. 发明申请
    • DEVICE FOR MEASURING A FLUID
    • WO2023012720A1
    • 2023-02-09
    • PCT/IB2022/057265
    • 2022-08-04
    • PIETRO FIORENTINI S.P.A.
    • CAODURO, NicolaZAMPIERI, Nevio
    • G01F1/66G01F1/667G01F1/7082G01F1/40G01F1/684G01F1/692G01F1/7084G01F1/7086G01F15/00
    • Device (1) for measuring a fluid, preferably a gas, in particular of the type suitable for measuring the flow rate of gas or liquid circulating within a pipe and through the device itself, comprising: - a containment structure (7) which is provided with a first opening (9) for the inlet of the fluid inside it and a second opening (11) for the outlet of the fluid, - said containment structure (7) being configured to define inside it a path (2) for the fluid between said first opening (9) and said second opening (11), said path (2) comprising: - an internal tubular section (4) which develops in a substantially rectilinear way along a longitudinal axis X and which is in fluid communication with said first opening (9) for the inlet of the fluid, or with said second opening (11 ) for the inlet fluid outlet, - at least one external chamber (3) which is positioned around said tubular section (4) and which is in fluid communication with said second opening (11) for the fluid outlet, or with said first opening (9) for inlet of the fluid, - said at least one external chamber (3) being fluidly connected with said internal tubular section (4) in correspondence with an area of the internal tubular section (4) which is opposite to that in correspondence with which said tubular section is in fluid communication with said first opening (9) for the fluid inlet, or with said second opening (11) for the fluid outlet, - sensor means (5) configured to detect a quantity of the flow of said fluid that passes through said internal tubular section (4), said device being characterized in that said containment structure (7) comprises: - a first body (30) in which said first opening (9) and said second opening (11) are formed and which is configured to be mechanically connected between an upstream pipe and a downstream pipe that are external to said device (1), - a second body (31) in which said sensor means (5) are mounted, and also characterized in that: said internal tubular section (4) which extends substantially rectilinearly along the longitudinal axis X is defined and / or formed partly in said first body (30) and partly in said second body (31), said at least one external chamber (3) being defined and / or formed, at least in part, in said second body (31).
    • 8. 发明申请
    • 流量センサおよびそれを用いた真空吸着装置およびチップマウンタ
    • 流量传感器和真空吸尘装置和使用它的芯片安装
    • WO2015008324A1
    • 2015-01-22
    • PCT/JP2013/069256
    • 2013-07-16
    • 株式会社日立製作所
    • 小出 晃池田 裕
    • G01F1/684G01F1/692G01P5/12
    • G01F1/684G01F1/692G01P5/12
    •  本発明は、微小な管径を有する管路内の流体の流量を計測可能な流量センサを提供することを目的とする。配管内に配置され配管内の流体の流速を計測する流量センサ1に、上記配管内の主流路から計測対象流体を取り込む少なくとも1つ以上の屈曲点を有する取り込み流路9を設け、この取り込み流路9が、上記配管内の主流路に向かい開口する流体取り入れ口7と計測流体を上記配管内へ戻す流体戻し口8を有する。そして、上記取り込み流路9内であって、上記流体取り入れ口7から主流路に平行な領域と異なる領域に流体の流速を検出する検出部2,3を配置する。
    • 本发明的目的是提供一种流量传感器,其能够测量具有小管径的管道中的流体的流动。 设置在管道内并且用于测量管道中的流体的流速的流量传感器(1)设置有进气流路(9),其用于从主流路中吸入被测量的流体 管道并具有至少一个弯曲点。 该进气流路(9)具有向配管内的主流路开口的流体吸入口(7)和将被测量的流体返回到管路内部的流体返回口(8)。 此外,用于检测流体的流速的检测单元(2,3)设置在进气流路(9)内的与从流体进口(7)延伸的区域不同于与主流路(9)平行的区域 。
    • 9. 发明申请
    • 熱式流量計
    • 热流量计
    • WO2015004936A1
    • 2015-01-15
    • PCT/JP2014/052823
    • 2014-02-07
    • 日立オートモティブシステムズ株式会社
    • 森野 毅
    • G01F1/696G01F1/692G01P5/10G01P5/12
    • G01F1/6842G01F1/692G01F1/696
    •  汚損物が堆積した場合であっても、流量の高い検出精度を維持できる熱式流量計を得るために、本発明の熱式流量計300は、薄膜領域603が設けられた半導体部材601と、薄膜領域603に設けられて被計測気体30を加熱する発熱体608と、薄膜領域603でかつ発熱体608よりも上流側と下流側の領域における被計測気体30の流れ方向の温度差の少なくとも一方を検出する温度差検出手段と、温度差検出手段により検出した温度差に基づいて薄膜領域603の熱容量を算出する熱容量算出手段と、熱容量算出手段により算出した熱容量に基づいて薄膜領域603の熱伝導率の変化量を推測する熱伝導率変化量推測手段と、を有する。
    • 为了获得即使在由结垢物质吸附的情况下也能够保持高流量检测精度的热流量计,该热流量计(300)具有:具有薄膜区域的半导体部件(601) (603); 将被测量气体(30)加热并设置在所述薄膜区域(603)上的发热体(608)。 温度差检测单元,其检测在所述薄膜区域(603)的所述区域中位于所述薄膜区域(603)的所述被测量气体(30)的流动方向上的温度差,并且位于所述薄膜区域(603)的上游侧和/ 发热体(608); 热容量计算装置,其基于由温度差检测装置检测的温度差计算薄膜区域(603)的热容量; 以及热导率变化估计装置,其基于由热容量计算装置计算的热容量来估计薄膜区域(603)的导热率的变化量。