会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 5. 发明申请
    • SEMICONDUCTOR WAFER CONTAINER CLEANING APPARATUS
    • 半导体晶圆容器清洗装置
    • WO02017355A3
    • 2002-05-02
    • PCT/US2001/041085
    • 2001-06-20
    • H01L21/304B08B3/02B08B3/12B08B9/08B08B9/32H01L21/00B08B5/02
    • H01L21/67051B08B3/12B08B9/0861B08B9/32
    • A cleaning system for cleaning boxes (52) or containers used to carry semiconductor wafers and other flat articles, has box holder assemblies (50)and a box door holder assembly (300) attached to a rotor (36) within an enclosure (38). Upper and lower hooks (96, 108, 314, 316) on the box holder and box door holder assemblies hold boxes (52) and doors (325) as the rotor spins. Liquid spray manifolds (406) have one or more spray nozzles (430) that spray at an angle toward or away from the direction of rotation of the rotor, or an angle up or down, rather than straight at the boxes in the box holder assemblies. Improved spray coverage and cleaning is achieved. Boxes and their doors, such as front opening unified pods (FOUP), are both efficiently cleaned and handled.
    • 用于清洁盒子(52)或用于承载半导体晶片和其他扁平物品的容器的清洁系统具有连接到外壳(38)内的转子(36)上的盒子保持器组件(50)和盒子门保持器组件(300) 。 当转子旋转时,盒子支架和盒子门支架组件上的上部和下部钩子(96,108,314,316)保持盒子(52)和门(325)。 液体喷射歧管(406)具有一个或多个喷射喷嘴(430),喷射喷嘴以朝向或远离转子旋转方向的角度或以角度向上或向下喷射,而不是直接在盒子保持器组件 。 改善了喷涂覆盖和清洁效果。 箱子和它们的门,例如前开式统一舱(FOUP),都被有效地清洁和处理。