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    • 1. 发明申请
    • CATHODE HEAD WITH FOCAL SPOT CONTROL
    • 阴影头与焦点控制
    • WO2005077069A2
    • 2005-08-25
    • PCT/US2005/004139
    • 2005-02-09
    • VARIAN MEDICAL SYSTEMS TECHNOLOGIES, INC.
    • SMITH, Ricky
    • H01J29/46H01J29/70H01J35/00H01J35/06H01J35/08H01J35/10H01J35/14H01J35/22H01J35/30H05G1/52
    • H01J35/06H01J35/14
    • A cathode head (200) is provide that is suitable for use in an x-ray device (100) that includes an anode (300) having a target surface (304) configured and arranged to receive electrons emitted by the cathode head (200). The cathode head (200) may be constructed of magnetic or non-magnetic material and includes an emitter structure (202) carrying a filament (204) that defines a longitudinal axis about which is disposed one or more magnetic elements such as coils (208). The filament (204) is configured and arranged to emit an electron beam that defines a focal spot on the target surface (304) of the anode (300). The magnetic coil, or coils (208), disposed about the longitudinal axis defined by the filament (204) generate a magnetic field that enables control of the location of the focal spot on the target surface of the anode.
    • 提供一种阴极头(200),其适用于包括阳极(300)的x射线装置(100),所述阳极(300)具有配置和布置成接收由阴极头(200)发射的电子的目标表面(304) 。 阴极头(200)可以由磁性或非磁性材料构成,并且包括承载限定纵向轴线的细丝(204)的发射体结构(202),围绕所述纵向轴设置一个或多个磁性元件,例如线圈(208) 。 灯丝(204)被配置和布置成发射限定阳极(300)的目标表面(304)上的焦点的电子束。 围绕由灯丝(204)限定的纵向轴线设置的电磁线圈(208)产生磁场,其能够控制焦斑在阳极的目标表面上的位置。
    • 3. 发明申请
    • X-RAY TUBE
    • X射线管
    • WO2017028473A1
    • 2017-02-23
    • PCT/CN2016/000463
    • 2016-08-18
    • SIEMENS X-RAY VACUUM TECHNOLOGY LTD.
    • CHENG, RubaiFREUDENBERGER, JörgFRITZLER, AnjaLIU, Canbin
    • H01J35/02H01J35/22
    • H01J35/101H01J35/105H01J2235/1208
    • An X-ray tube (100) comprises a rotor shaft (106); a rotor seat (108), which is an integral structure, electrically conductive and thermally insulating, and connected to the rotor shaft in a fixed manner; a bearing (104), which is connected in a fixed manner to the rotor seat. The X-ray tube increases the radiative cooling capability of the anode, and reduces the thermal effect on the rotor and bearing. The anode can be used at a high temperature, so that the entire anode can be made of TZM molybdenum alloy with no need for graphite brazing. Compared with X-ray tubes having fixed-anode, the X-ray tube has a relatively high short-time pulse power and small size, and compared with large-size rotary tubes, has a relatively high continuous power.
    • X射线管(100)包括转子轴(106); 转子座(108),其是整体结构,导电和隔热,并以固定的方式连接到转子轴上; 轴承(104),其以固定的方式连接到转子座。 X射线管增加了阳极的辐射冷却能力,降低了转子和轴承的热效应。 阳极可以在高温下使用,使得整个阳极可以由不需要石墨钎焊的TZM钼合金制成。 与具有固定阳极的X射线管相比,X射线管具有相对较高的短时脉冲功率和小尺寸,与大尺寸旋转管相比,具有相对较高的连续功率。
    • 4. 发明申请
    • DIGITAL X-RAY CAMERA
    • 数码X射线摄像机
    • WO2006101468A1
    • 2006-09-28
    • PCT/US2005/005454
    • 2005-03-21
    • ARIBEX, INC.TURNER, D., Clark
    • TURNER, D., Clark
    • H05G1/10H01J35/00H01J35/22H01J35/32
    • A61B6/14A61B6/508A61B6/548
    • Portable x-ray devices and methods for using such devices are described. The devices have an x-ray tube powered by an integrated power system. The x-ray tube is shielded with a low-density insulating material containing a high-Z substance. The devices can also have an integrated display component. With these components, the size and weight of the x-ray devices can be reduced and the portability of the devices enhanced. The x-ray devices also have an x-ray detecting means that is not structurally attached to the device and therefore is free standing. Consequently, the x-ray devices can also be used as a digital x-ray camera. The portable x-ray devices are especially useful for applications where portability is an important feature such as in field work, remote operations, and mobile operations such as nursing homes, home healthcare, or teaching classrooms. This portability feature can be particularly useful in multi-suite medical and dental offices where a single x-ray device can be used as a digital x­ray camera in multiple offices instead of requiring a separate device in every office.
    • 描述了便携式x射线装置及其使用方法。 这些设备具有由集成电力系统供电的x射线管。 X射线管用含有高Z物质的低密度绝缘材料屏蔽。 这些设备还可以具有集成的显示组件。 利用这些部件,可以减小x射线装置的尺寸和重量,并且增强装置的便携性。 X射线装置还具有不结构地附接到装置的X射线检测装置,因此是独立的。 因此,X射线设备也可以用作数字X射线摄像机。 便携式x射线设备对于可移植性是重要功能的应用特别有用,例如在现场工作,远程操作和移动操作(例如养老院,家庭医疗保健或教学教室)中。 这种便携式功能在多套件医疗和牙科诊所中特别有用,其中单个X射线设备可用作多个办公室的数字X射线摄像机,而不是在每个办公室中都需要单独的设备。
    • 6. 发明申请
    • CATHODE HEAD WITH FOCAL SPOT CONTROL
    • 阴极头与焦点控制
    • WO2005077069A3
    • 2005-10-06
    • PCT/US2005004139
    • 2005-02-09
    • VARIAN MED SYS TECH INC
    • SMITH RICKY
    • H01J29/46H01J29/70H01J35/00H01J35/06H01J35/08H01J35/10H01J35/14H01J35/22H01J35/30H05G1/52
    • H01J35/06H01J35/14
    • A cathode head (200) is provide that is suitable for use in an x-ray device (100) that includes an anode (300) having a target surface (304) configured and arranged to receive electrons emitted by the cathode head (200). The cathode head (200) may be constructed of magnetic or non-magnetic material and includes an emitter structure (202) carrying a filament (204) that defines a longitudinal axis about which is disposed one or more magnetic elements such as coils (208). The filament (204) is configured and arranged to emit an electron beam that defines a focal spot on the target surface (304) of the anode (300). The magnetic coil, or coils (208), disposed about the longitudinal axis defined by the filament (204) generate a magnetic field that enables control of the location of the focal spot on the target surface of the anode.
    • 提供适用于包括具有被配置和布置为接收由阴极头(200)发射的电子的目标表面(304)的阳极(300)的x射线装置(100)的阴极头(200) 。 阴极头(200)可以由磁性或非磁性材料构成,并且包括承载限定纵向轴线的灯丝(204)的发射器结构(202),围绕所述纵向轴线设置一个或多个磁性元件,例如线圈(208) 。 灯丝(204)被配置和布置成发射限定阳极(300)的目标表面(304)上的焦斑的电子束。 围绕由灯丝(204)限定的纵向轴线设置的一个或多个线圈(208)产生磁场,该磁场能够控制焦点在阳极的目标表面上的位置。
    • 8. 发明申请
    • INTEGRAL CATHODE
    • 整体阴道
    • WO02015220A1
    • 2002-02-21
    • PCT/US2001/024620
    • 2001-08-07
    • H01J35/06H01J35/14H01J35/00H01J1/02H01J1/15H01J19/08H01J21/00H01J35/10H01J35/22H01J35/24H01J35/26H01J35/28H01J35/32
    • H01J35/06H01J35/14H01J2235/10
    • An integral cathode (200) for use with x-ray devices (102). The integral cathode (200) includes an emitter (202) made of a refractory metal such as tungsten, preferably doped with rhenium to afford malleability during constructions and assembly. The integral ctahode (200) also includes a support cartridge (204), preferably composed of an electrically non-conductive material such as ceramic, in which the emitter (202) is received. The support cartridge (204) electrically isolates the cathode (200) from the other components and structures of the x-ray device (102). Additionally, the support cartridge (204) serves to impose, and maintain, a parbolic curve in the emitter (202). The parabolic form of the emitter (202) naturally shapes an electron beam by causing electrons discharged from the emitter to converge at a focal spot (106). In this way, both the emission and focusing functions of the cathode (200) are integrated and performed by a single part.
    • 一种用于x射线装置(102)的整体式阴极(200)。 整体阴极(200)包括由诸如钨的难熔金属制成的发射器(202),优选地掺杂有铼,以在构造和组装期间提供延展性。 积分灯(200)还包括支撑筒(204),其优选地由诸如陶瓷的非导电材料构成,其中接收发射器(202)。 支撑筒(204)将阴极(200)与X射线装置(102)的其它部件和结构电隔离。 另外,支撑筒(204)用于施加并保持发射器(202)中的双曲线。 发射器(202)的抛物线形状通过使从发射极排出的电子在焦点(106)会聚而自然地形成电子束。 以这种方式,阴极(200)的发射和聚焦功能都被整合并由单个部分执行。
    • 9. 发明申请
    • X-RAY TUBE
    • X射线管
    • WO00052797A1
    • 2000-09-08
    • PCT/RU2000/000063
    • 2000-02-28
    • H01J35/20H01J17/20H01J35/22H01S35/20H01S17/20
    • H01J35/22
    • The present invention relates to an X-ray tube structure for obtaining a high anode current output within a predetermined range of working voltages. The anode current output can be increased by neutralising the negative volumetric charge of the electrons emitted by the cathode using the positive ions from a gas which is inert relative to the cathode material. The positive ions are generated in the cathode-anode gap of the X-ray tube by the ionising interaction between the flow of electrons and the gas molecules moving from the cathode to the anode. The X-ray tube of the present invention includes a cathode and an anode arranged in a working volume filled with a gas which is inert relative to the cathode material at a pressure of up to (0.001 DIVIDED 0.5)P. The pressure P is selected in the left branch of a Paschen's curve according to the maximal voltage value at the anode and to the cathode-anode distance of the X-ray tube. This structure provides for a high anode current output, can be easily manufactured and also increases the service duration of the cathode and the anode due to the convection cooling mechanism in the rarefied gas, which is particularly important during pulse-mode operation.
    • 本发明涉及一种用于在预定工作电压范围内获得高阳极电流输出的X射线管结构。 可以通过使用来自相对于阴极材料为惰性的气体的正离子中和阴极发射的电子的负体积电荷来增加阳极电流输出。 通过电子流和从阴极向阳极移动的气体分子之间的电离相互作用,在X射线管的阴极 - 阳极间隙中产生正离子。 本发明的X射线管包括阴极和阳极,该阴极和阳极布置成填充有气体的工作体积,该气体相对于正极材料为惰性,压力高达(0.001DIVIDED 0.5)P。 根据阳极处的最大电压值和X射线管的阴极 - 阳极距离,在Paschen曲线的左分支中选择压力P. 这种结构提供了高阳极电流输出,可以容易地制造,并且还由于稀薄气体中的对流冷却机制而增加了阴极和阳极的使用持续时间,这在脉冲模式操作期间是特别重要的。
    • 10. 发明申请
    • LASER PLASMA X-RAY GENERATOR, SEMICONDUCTOR ALIGNER HAVING THE GENERATOR, AND SEMICONDUCTOR EXPOSURE METHOD
    • 激光等离子体发射器,具有发生器的半导体对准器和半导体曝光方法
    • WO00019496A1
    • 2000-04-06
    • PCT/JP1998/004338
    • 1998-09-28
    • G03F7/20G21K5/04H05G2/00H01L21/027G21K5/02G21K5/08H01J35/22
    • H05G2/001B82Y10/00G03F7/70033G03F7/70916G21K5/04
    • A laser plasma X-ray generator which has a high X-ray conversion efficiency and produces little debris, a semiconductor aligner using the generator and a semiconductor exposure method are disclosed. In the laser plasma X-ray generator, the target to be irradiated with a laser beam is a metal oxide. The semiconductor aligner comprising such a laser plasma X-ray generator is characterized by further comprising a collecting mirror which directs X-rays generated by the plasma X-ray generator to a mask, and an X-ray convergence exposure mirror which converges the X-rays reflected by the mask and projects the X-rays onto a semiconductor wafer. In the semiconductor exposure method, X-rays generated by a laser plasma X-ray generator where the target is a metal oxide are collected, applied to a mask, and reflected by the mask, the reflected X-rays are converged, and a semiconductor mask pattern is projected onto a semiconductor wafer to expose it.
    • 公开了一种激光等离子体X射线发生器,其具有高X射线转换效率并且产生很少的碎片,使用该发生器的半导体对准器和半导体曝光方法。 在激光等离子体X射线发生器中,用激光束照射的靶是金属氧化物。 包括这种激光等离子体X射线发生器的半导体对准器的特征在于还包括将由等离子体X射线发生器产生的X射线引导到掩模的收集镜,以及X射线会聚曝光镜, 由掩模反射并将X射线投射到半导体晶片上。 在半导体曝光方法中,收集由靶被作为金属氧化物的激光等离子体X射线发生器产生的X射线,施加到掩模上并被掩模反射,反射的X射线被会聚,半导体 将掩模图案投影到半导体晶片上以使其露出。