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1. 发明申请

WO2004068501A3 PROBE FOR AN OPTICAL NEAR FIELD MICROSCOPE AND METHOD FOR PRODUCING THE SAME 审中-公开
标题翻译：探头的光学近场显微镜和方法及其
公开(公告)号：WO2004068501A3
公开(公告)日：2004-11-04
申请号：PCT/EP0314555
申请日：2003-12-18
申请人： FRAUNHOFER GES FORSCHUNG , BRANDENBURG ALBRECHT , KUENZEL CHRISTA , EBERHARD DIETMAR
发明人： BRANDENBURG ALBRECHT , KUENZEL CHRISTA , EBERHARD DIETMAR
IPC分类号： B81B1/00 , B81B3/00 , G01Q60/22 , G12B21/06 , G12B21/02 , G21B21/02
CPC分类号： G01Q60/22
摘要： The invention relates to a probe for an optical near field microscope, said probe comprising a tip which is formed on a self-contained carrier, and to a method for producing the same. The aim of the invention is to provide a probe for an optical near field microscope and a method for the production thereof, whereby the probe has a tip with a very small aperture diameter and can thus be produced in a reproducible manner, according to a simple, advantageously controllable method. To this end, the inventive probe is characterised in that the probe tip is embodied as a complete structure which is applied to a planar surface of the carrier, and the inventive method comprises the following steps: a transparent layer is applied to a substrate, the thickness of the transparent layer corresponding to at least the height of the probe tip; the transparent layer is masked in at least one region of the probe tip; and the transparent layer is etched, forming the probe tip.
摘要翻译：本发明涉及一种探针用于光学近场显微镜，其包括被一个悬臂梁构成的探针尖端，以及它们的制备的方法。本发明的目的，一种用于光学近场显微镜和方法的探针，以提供它们的，具有非常小的孔直径的探针尖端的探针，并且可以因此可重复地在一个简单的，有利的控制的工艺制造的制剂。该目的是通过一个通用的探针，其特征在于，探针尖端形成为一个完整的结构，其被施加到载体的平坦表面关于探针实现。该目的是利用方面取得一种用于根据本发明通过包括以下步骤的方法制造探针的光学近场显微镜：在衬底上沉积透明层，其中厚度至少为所述探针针尖的高度对应的所述透明层的; 在探针尖端的区域中的至少所述透明层的掩蔽; 和下方形成探头尖端蚀刻透明层。

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