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1. 发明申请

WO1995028624A1 STABILIZED PRESSURE SENSOR 审中-公开
标题翻译：稳定压力传感器
公开(公告)号：WO1995028624A1
公开(公告)日：1995-10-26
申请号：PCT/SE1995000425
申请日：1995-04-18
申请人： CECAP AB , HALLBERG, Nils, Gunno , JONSSON, Staffan
发明人： CECAP AB
IPC分类号： G01L09/12
CPC分类号： G01L9/0075
摘要： A capacitive sensor element (1') for pressure sensors comprises a house part (3') based on electrically isolating materials such as glass ceramic material and the house part (3') has on an interior surface one capacitor plate (9). An opposite capacitor plate (11) is attached to one side of a diaphragm (7) of an electrically isolating material, which on its other side has an electrically conductive shielding layer (21) that is intended to be connected to ground. The capacitor plates (9, 11) form an electrical capacitor, the capacitance of which is changed when the distance between the plates vary. A second electrically conductive shielding layer (17) is surrounded by the material in the house part (3'), between a shielding plate (15) and a thick support plate (13) at some distance from the one capacitor plate and it has a significantly larger extension laterally than this plate. Also this layer (17) is intended to be connected to ground. By arranging this interior ground plane (17) near the capacitor plates (9, 11) they are ensured a uniform electrical surrounding for reduction of the influence of stray capacitances. Further, the thick support plate (13) gives the house part a good mechanical stability.
摘要翻译：用于压力传感器的电容传感器元件（1'）包括基于电绝缘材料（例如玻璃陶瓷材料）的房屋部分（3'），并且房屋部分（3'）在内表面上具有一个电容器板（9）。相对的电容器板（11）附接到电绝缘材料的隔膜（7）的一侧，其另一侧具有旨在与地连接的导电屏蔽层（21）。电容器板（9,11）形成电容器，当电容器板的距离变化时，其电容发生变化。第二导电屏蔽层（17）在房屋部分（3'）中的材料之间，在距离一个电容器板一定距离处的屏蔽板（15）和厚支撑板（13）之间包围，并且其具有比该板横向显着更大的延伸。此外，该层（17）旨在连接到地面。通过将该内部接地平面（17）布置在电容器板（9,11）附近，它们确保了均匀的电气周围，以减少杂散电容的影响。此外，厚的支撑板（13）给予房屋部分良好的机械稳定性。

2. 发明申请

WO1993020423A1 A DEVICE WITH BONDED CONDUCTIVE AND INSULATING SUBSTRATES AND METHOD THEREFOR 审中-公开
标题翻译：具有粘结导电和绝缘基板的器件及其方法
公开(公告)号：WO1993020423A1
公开(公告)日：1993-10-14
申请号：PCT/US1993002417
申请日：1993-03-17
申请人： MOTOROLA, INC.
发明人： MOTOROLA, INC. , CHEN, Shiuh-Hui , ROSS, Carl , TOMASELLO, Roseann, M. , BRANDES, Anita, G.
IPC分类号： G01L09/12
CPC分类号： G01L9/0073 , G01L9/0042 , Y10T29/43
摘要： A device with bonded and conductive substrates is disclosed. This device includes a conductive substrate (509) having an electrically insulating layer (515) disposed on a portion thereon. An electrically conductive layer (519) is disposed on the electrically insulating layer (515). Then an insulating substrate (101) having a first surface (103) and an opposing second surface (105) with an electrically conductive coating (516) disposed on a portion thereon is provided. Finally, the insulating substrate (101) is bonded to the electrically conductive layer (519).
摘要翻译：公开了具有粘合和导电基底的器件。该装置包括具有设置在其上的部分上的电绝缘层（515）的导电基板（509）。导电层（519）设置在电绝缘层（515）上。然后提供具有设置在其上的部分上的具有导电涂层（516）的第一表面（103）和相对的第二表面（105）的绝缘基板（101）。最后，将绝缘基板（101）接合到导电层（519）上。

3. 发明申请

WO1992010731A1 PRESSURE TRANSMITTER WITH STRESS ISOLATION DEPRESSION 审中-公开
标题翻译：压力分离器压力传感器
公开(公告)号：WO1992010731A1
公开(公告)日：1992-06-25
申请号：PCT/US1991008697
申请日：1991-11-20
申请人： ROSEMOUNT INC.
发明人： ROSEMOUNT INC. , DEAN, Michael, J. , MATTISON, Lee, Ann , KROUTH, Terrance, F.
IPC分类号： G01L09/12
CPC分类号： G01L19/0645 , G01L9/0072 , G01L13/025
摘要： A pressure transmitter (10) has a pressure transducer (12) in a transmitter housing (14). The transmitter housing (14) includes a groove or a notch (20) defining a flexure closely proximate a housing outer rim (24). The outer rim (24) receives a large clamping force from a flange (16) and is deflectable about the flexure for reducing transmission of axial and radial components of the clamping force from the housing outer rim (24) to the transducer (12), which forces can cause distortions to the pressure transducer (12). Unevenly distributed clamping forces caused by differential thermal expansion of the flange (16), bolts (26) and housing (14), are isolated from the transducer (12), thereby reducing measurement errors. Further, transmission of hysteretic radial forces from the transmitter housing (14) to the transducer (12) caused by friction when the flange (16) slides across the pressure transmitter housing (14), each having different thermal coefficients of expansion, is also reduced. Several types of pressure transducers (12) including capacitive cell transducers can be in the transmitter housing (14) for providing a pressure output indicative of line and differential pressure.

4. 发明申请

WO1989010546A1 CAPACITIVE PRESSURE SENSOR 审中-公开
标题翻译：电容式压力传感器
公开(公告)号：WO1989010546A1
公开(公告)日：1989-11-02
申请号：PCT/US1989001188
申请日：1989-03-23
申请人： ALLIED-SIGNAL INC.
发明人： ALLIED-SIGNAL INC. , SHKEDI, Zvi , LIPS, Donald, C. , McCORMACK, William, H.
IPC分类号： G01L09/12
CPC分类号： G01L19/02 , G01L9/0075
摘要： A capacitive pressure sensor (10) comprises: a housing (12) including first and second spaced apart diaphragms (114, 116), matched in compliance to vibrate and deflect in substantial unison in response to vibratory and acceleration forces; said first diaphragm (114) being an outer pressure responsive diaphragm, movably cooperating with said housing to bound a reference-pressure chamber (106, 108) within which is movably disposed said second diaphragm (116), which carries on its surface facing said first diaphragm (114) a first pair of spaced apart planar electrodes (52, 54) each having a predetermined geometric shape, and a first planar shield electrode (56) having a portion (58) circumscribing said first pair of electrodes (52, 54) and a cross bar portion (60) interposing between said first pair of electrodes; said first diaphragm (114) carrying on its surface facing said second diaphragm (116) a second pair of spaced apart planar electrodes (92, 94) each having said predetermined geometric shape; said first pair of electrodes (52, 54) and said second pair of electrodes (92, 94) being congruent to define a respective pair of variable capacitors, having substantially identical value and varying in capacitance value simultaneously in union as said first diaphragm (114) moves in response to external fluid pressure, whereby said variable capacitors remain of substantially identical value in response to external fluid pressure acting on said sensor, and said capacitance values being substantially immune from said vibration and acceleration forces.
摘要翻译：电容式压力传感器（10）包括：壳体（12），包括第一和第二隔开的隔膜（114,116），其符合振动和响应于振动和加速力基本上一致地偏转; 所述第一隔膜（114）是外部压力响应隔膜，与所述壳体可移动地配合以结合基准压力室（106,108），所述基准压力室可移动地设置在所述第二隔膜（116）上，所述第二隔膜隔膜（114）分别具有预定几何形状的第一对隔开的平面电极（52,54）以及具有限定所述第一对电极（52,54）的部分（58）的第一平面屏蔽电极（56）和插入在所述第一对电极之间的横杆部分（60）; 所述第一隔膜（114）在其面对所述第二隔膜（116）的表面上承载具有所述预定几何形状的第二对隔开的平面电极（92,94）所述第一对电极（52,54）和所述第二对电极（92,94）一致地限定相应的一对可变电容器，其具有与所述第一隔膜（114）同时并联的电容值基本相同的值）响应于外部流体压力移动，由此所述可变电容器响应于作用在所述传感器上的外部流体压力而保持基本相同的值，并且所述电容值基本上不受所述振动和加速力的影响。

5. 发明申请

WO1989010545A2 CAPACITIVE PRESSURE SENSOR 审中-公开
标题翻译：电容式压力传感器
公开(公告)号：WO1989010545A2
公开(公告)日：1989-11-02
申请号：PCT/US1989001187
申请日：1989-03-23
申请人： ALLIED-SIGNAL INC.
发明人： ALLIED-SIGNAL INC. , ARABIA, F., Gene , SHKEDI, Zvi , BRANDT, Randy, L.
IPC分类号： G01L09/12
CPC分类号： G01L9/125
摘要： A pressure sensor (10) includes a pair of capacitors (C1, C2), at least one of which is variable responsive to an applied fluid pressure (DELTAP) to predictably change capacitance value. A tuned oscillator circuit (14) having an inductive impedance includes the variable capacitor and simulates a resonant inductive-capacitive circuit not including an inductor. The tuned circuit (14) oscillates to provide a signal with a period which is a function of the variable capacitance value, and of the applied fluid pressure. Additional elements are provided for precise measurement of the variable signal, correction for temperature effects, correction of measurement aberrations, and production of an output signal in a preferred format.
摘要翻译：的压力传感器（10）包括一对电容器（C1，C2），其中至少一个根据流体压力（按DeltaP）的应用是可变的，以改变的可预测的值电容。具有电感性阻抗的调谐振荡器电路（14）包括可变电容器并且模拟不具有电感器的电感性容性谐振电路。调谐电路（14）振荡以产生其周期是可变电容值和施加的流体压力的函数的信号。附加元件允许精确测量可变信号，校正温度效应，校正测量像差，并以优选格式生成输出信号。

6. 发明申请

WO1983000925A1 PRESSURE SENSOR COMPRISED OF A MEMBRANE-SHAPED FRONT FACE CYLINDRICAL CAVITY 审中-公开
标题翻译：压电传感器由膜形前壁圆柱体
公开(公告)号：WO1983000925A1
公开(公告)日：1983-03-17
申请号：PCT/EP1982000183
申请日：1982-08-27
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ... , KOSCHKE, Peter , NOVAK, Pavel
发明人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ...
IPC分类号： G01L09/12
CPC分类号： A61B5/6864 , A61B5/031 , G01L9/0072 , Y10S128/903
摘要： Le senseur de pression décrit est constitué par une cavité cylindrique (21) dont la face frontale a la forme d'une membrane (23), et par un oscillateur (29). La fréquence du signal de l'oscillateur fournit une mesure de la pression qui agit sur la membrane; ce signal (32) est transmis par rayonnement radio et peut être traité à l'aide d'un récepteur approprié muni d'un compteur de fréquence ou analogue. L'alimentation s'effectue à l'aide d'une batterie (31) incorporée ou par irradiation. En vue de mesurer la pression intracrânienne, le senseur de pression est implanté dans l'os crânien (11) par l'entremise d'une douille spéciale de raccord (18).

7. 发明申请

WO1982001250A1 CAPACITIVE PRESSURE TRANSDUCER WITH ISOLATED SENSING DIAPHRAGM 审中-公开
标题翻译：具有隔离感应膜片的电容式压力传感器
公开(公告)号：WO1982001250A1
公开(公告)日：1982-04-15
申请号：PCT/US1981001329
申请日：1981-10-02
申请人： ROSEMOUNT INC
发明人： ROSEMOUNT INC , FRICK R
IPC分类号： G01L09/12
CPC分类号： G01L13/025 , G01L9/0072
摘要： Un transducteur de capacitance possede une chambre centrale (53, 55) avec un diaphragme conducteur (36) dispose a l'interieur pour separer la chambre en au moins deux parties (53 et 55), dont au moins l'une possede un conducteur electrique (61, 63) pour former en combinaison avec le diaphragme au moins un condensateur de detection variable, et ou au moins une partie de la chambre est couplee par un passage (28, 30) pour communiquer avec un isolateur (16a, 16b) ayant une chambre isolante (27, 29) et un diaphragme isolant (22, 24) qui, en combinaison avec le diaphragme conducteur, enferme un fluide sensiblement incompressible de telle sorte que lorsque la pression est appliquee sur un cote expose du diaphragme isolant (22, 24), le diaphragme conducteur (36) soit force de s'incliner et de changer ainsi la capacitance de detection. La configuration des isolants (16a, 16b), espacee par rapport aux condensateurs detecteurs, et d'autres facteurs decrits dans cette invention, elimine les contraintes mecaniques et thermiques indesirables, ameliorant ainsi la reponse des detecteurs capacitifs a la pression.
摘要翻译：电容换能器具有中心室，其中设置有导电隔膜以将腔室分隔成至少两个部分，至少一个部分具有布置在其上的电导体以与隔膜结合形成至少一个可变传感器电容器，并且其中在腔室的至少一部分通过通道连接，以与具有隔离器室和隔离膜的隔离器连通，该隔离器与隔离隔膜结合，导电隔膜与基本上不可压缩的流体结合，使得当压力施加到隔离隔膜的暴露侧时，促使导电膜片偏转，从而改变传感器电容。与传感器电容器间隔开的隔离器的结构以及本文公开的其它因素消除了不必要的机械和热应力，从而改善了电容传感器对压力的响应。

8. 发明申请

WO1997033146A1 PRESSURE SENSOR MODULE 审中-公开
标题翻译：压力传感器模块
公开(公告)号：WO1997033146A1
公开(公告)日：1997-09-12
申请号：PCT/JP1997000717
申请日：1997-03-07
申请人： HOKURIKU ELECTRIC INDUSTRY CO., LTD. , HAYASHI, Kazutaka , NAKAO, Satoshi , TANAKA, Kiyoshi , TANIGAMI, Hideki , ISHIKAWA, Hideto , MOTOKI, Yoshimitsu
发明人： HOKURIKU ELECTRIC INDUSTRY CO., LTD.
IPC分类号： G01L09/12
CPC分类号： G01L9/0075
摘要： A pressure sensor module capable of preventing the application of a high pressure to a connector and moreover, capable of reducing the size by reducing the number of components. A flange portion (3g) is disposed at the proximal end portion of a connector main body (3a). An engagement ring-like recess portion (4b) is disposed in a ring-like support member (4) made of a material more difficult to undergo deformation at a high pressure than the connector main body (3a). The ring-like support member (4) is fitted over the outside of the connector main body (3a) so as to engage the flange portion (3g) with the engagement ring-like recess portion (4b). One of the end faces (4a) of the ring-like support member (4) is brought into contact with an insulating substrate (5a) on the pressure non-sensing side of a pressure sensing device (5) outwardly of the proximal portion of the connector main body (3a). A cylindrical engagement portion (7g1) of a housing (7) is curled in such a manner as to wrap the outer edge portion of the end face (4c) of the ring-like support member (4) and the housing (7) and the ring-like support member (4) are engaged.
摘要翻译：一种压力传感器模块，其能够防止对连接器施加高压，并且还能够通过减少部件的数量来减小尺寸。在连接器主体（3a）的基端部配置有凸缘部（3g）。接合环形凹部（4b）设置在由比连接器主体（3a）高的压力下难以发生变形的材料制成的环状支撑部件（4）中。环状支撑构件（4）装配在连接器主体（3a）的外侧，从而将凸缘部（3g）与接合环状凹部（4b）接合。环状支撑构件（4）的一个端面（4a）与位于压力感测装置（5）的非压力侧的绝缘基板（5a）接触，该绝缘基板连接器主体（3a）。壳体（7）的圆柱形接合部分（7g1）以包围环状支撑构件（4）和壳体（7）的端面（4c）的外边缘部分的方式卷曲，并且环形支撑构件（4）接合。

9. 发明申请

WO1995003534A1 HIGH LINEARITY CAPACITIVE PRESSURE SENSOR 审中-公开
标题翻译：具有高线性电容压力传感器
公开(公告)号：WO1995003534A1
公开(公告)日：1995-02-02
申请号：PCT/EP1994002318
申请日：1994-07-15
申请人： ENDRESS + HAUSER GMBH + CO.
发明人： ENDRESS + HAUSER GMBH + CO. , LÜDER, Ernst , KALLFASS, Traugott , BENZEL, Hubert , SCHAEPPERLE, Joerg
IPC分类号： G01L09/12
CPC分类号： G01L9/0072 , G01L9/0075
摘要： In a first variant of said pressure sensor, a base body (1) and a diaphragm (2) are assembled parallel to each other at a defined distance (d) from each other, forming a chamber (4) which is hermetically sealed at least at its edge. The surface of the base body on the side of the chamber carries a membrane electrode (11) that completely covers it. The surface of the diaphragm on the side of the chamber carries a reference electrode (12) which consists of an outer part (121) that extends along the edge of the chamber and whose capacity is practically pressure-independent, and of a pressure-dependent central part (123) arranged at the centre of the diaphragm and linked by a fin (122) to the outer part (121). The remaining surface of the diaphragm is covered by a measurement electrode (13) located at a constant distance from the reference electrode (12). In a circular second variant or in a rectangular third variant, the reference electrode (22 or 42) consists of an outer part (221 or 421) that extends along the edge of the chamber and whose capacity is practically pressure-independent, and of two pressure-dependent central parts (223, 223' or 423, 423') linked to the outer part (221 or 421) each by a fin (222, 222' or 422, 422'). The central parts lie each in one half of the base body, symmetrically to the centre of the diaphragm, and their marginal curve in one half of the base body is continuously and iteratively optimised. In the third variant, the reference electrode (32) differs from the second variant in that it is not symmetrical in relation to a point, but axially symmetrical in relation to a diameter of the diaphragm.
摘要翻译：在具有基体（1）和一个膜（2）（d）中该压力传感器的第一变型是在限定的距离平行组装到彼此，以形成至少在边缘腔室（4）密封，携带基体的腔室侧表面膜覆盖它们完全电极（11）。膜从沿腔室轮辋外部（121），其容量的行驶承载参考电极（12）的腔室侧的面几乎是独立的压力和从网络（122）的顺序躺在隔膜的中心连接的压力依赖性中央部分（123）组成。剩余的膜面积是从基准电极（12）覆盖的测量电极（13）的一个恒定间隔。在一个圆形的第二变体或矩形第三变型中，参比电极（22或42）包括沿着腔室轮辋外部分（221或421），其容量几乎是独立的压力运行的，并且两个，使得每个通过网络（222，222“和422，422”）相连接，依赖于压力的中心部分（223，223“和423，423”），所述点对称各自在基体与膜片中心和在基体半，并通过Iterativ-连续边缘曲线过程进行了优化。在第三变型中，第二变体的参考电极（32）的不同之处在于它不是点对称的，但轴对称地成形为膜的直径。

10. 发明申请

WO1991015742A2 PRESSURE SENSING CAPACITOR, AND TRANSDUCER 审中-公开
标题翻译：压力传感电容器和传感器
公开(公告)号：WO1991015742A2
公开(公告)日：1991-10-17
申请号：PCT/GB1991000523
申请日：1991-04-04
申请人： SHELTON, Richard, Dennis
IPC分类号： G01L09/12
CPC分类号： G01L9/0075
摘要： A pressure sensing capacitor utilising two planar layers (41, 141) of conductive material disposed substantially parallel to each other, but separated by a narrow gap. The conductive layers are formed as coatings on two imperforate insulative plates (11, 111), at least one of the plates being a diaphragm adapted to flex when subjected to a change in pressure. The diaphragm is supported by a first wall portion (20) which extends rearwardly away from the front surface of the diaphragm, and by an inwardly facing edge (22) of the peripheral portion (14) to which it is integrally connected. The capacitor can be electrically connected to electronic circuitry adapted to condition the capacitor output signal to an indication of pressure, or pressure difference, and so can be part of a transducer.
摘要翻译：一种利用导电材料的两个平面层（41,141）的压力感测电容器，所述平面层基本上彼此平行地设置，但被窄间隔分开。导电层形成为两个无孔绝缘板（11,111）上的涂层，至少一个板是适于在受到压力变化时弯曲的隔膜。隔膜由第一壁部分（20）支撑，第一壁部分（20）从隔膜的前表面向后延伸，并且与周边部分（14）的与其一体连接的向内的边缘（22）支撑。电容器可以电连接到适于将电容器输出信号调节为压力或压力差的指示的电子电路，因此可以是换能器的一部分。

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