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    • 4. 发明申请
    • VACUUM MODULE (VARIANTS THEREOF) AND SYSTEM OF MODULES FOR APPLYING COATINGS TO A SUBSTRATE
    • 真空模块(其变体)和将涂层施加到基板的模块系统
    • WO02008484A2
    • 2002-01-31
    • PCT/EA2001/000002
    • 2001-05-22
    • C23C14/34C23C14/22C23C14/50C23C14/56H01J9/46
    • H01J9/46C23C14/22C23C14/50C23C14/56H01J2209/015
    • A module and variants thereof for vacuum deposition of thin-film multi-layer coatings on substrates are described. A module system for applying coatings to the substrates, e.g. CRT and flat displays, is used for deposition of different thin-films to substrates of different sizes. A vacuum module for applying coatings to a substrate comprises a vacuum chamber (1) with an opening (2, 8) for positioning a substrate (3, 3'); a sealing (12, 12') member and a processing device (5) for applying coatings; a valve gate (6) mounted in the plane parallel to the said opening to separate the processing device from the opening. A processing device from the opening. A processing device-transporting mechanism moves reciprocally parallel to the substrate surface. A system of modules comprises several modules having a common evacuation system (27, 28, 29) and a common evacuation control system, a common handling device-control system for automatically positioning and removing the substrates. Several modules are disposed within the operation zone of one common manipulator.
    • 描述了用于在基片上真空沉积薄膜多层涂层的模块及其变体。 用于将涂层施加到基底的模块系统,例如, CRT和平板显示器用于将不同薄膜沉积到不同尺寸的基底上。 用于将涂层施加到基底的真空模块包括具有用于定位基底(3,3')的开口(2,8)的真空室(1); 密封件(12,12')和用于涂覆涂层的加工装置(5); 安装在与所述开口平行的平面中的阀门(6),以将处理装置与开口分离。 一个从开口处理的装置。 处理装置输送机构平行于基板表面往复运动。 模块系统包括具有共同的排气系统(27,28,29)和公共排气控制系统的多个模块,用于自动定位和移除基板的通用操纵装置控制系统。 几个模块设置在一个常见的操作器的操作区域内。
    • 7. 发明申请
    • VACUUM MODULE FOR APPLYING COATINGS
    • 用于涂料的真空模块
    • WO0208484A3
    • 2002-07-04
    • PCT/EA0100002
    • 2001-05-22
    • SHYRYPAU ULADZIMIRLEUCHUK MIKALAIKHAKHLOU ALIAKSANDRMARYSHEV SERGEI
    • SHYRYPAU ULADZIMIRLEUCHUK MIKALAIKHAKHLOU ALIAKSANDRMARYSHEV SERGEI
    • C23C14/34C23C14/22C23C14/50C23C14/56H01J9/46C23C14/04
    • H01J9/46C23C14/22C23C14/50C23C14/56H01J2209/015
    • A module and variants thereof for vacuum deposition of thin-film multi-layer coatings on substrates are described. A module system for applying coatings to the substrates, e.g. CRT and flat displays, is used for deposition of different thin-films to substrates of different sizes. A vacuum module for applying coatings to a substrate comprises a vacuum chamber (1) with an opening (2, 8) for positioning a substrate (3, 3'); a sealing (12, 12') member and a processing device (5) for applying coatings; a valve gate (6) mounted in the plane parallel to the said opening to separate the processing device from the opening. A processing device from the opening. A processing device-transporting mechanism moves reciprocally parallel to the substrate surface. A system of modules comprises several modules having a common evacuation system (27, 28, 29) and a common evacuation control system, a common handling device-control system for automatically positioning and removing the substrates. Several modules are disposed within the operation zone of one common manipulator.
    • 描述了用于在基片上真空沉积薄膜多层涂层的模块及其变体。 用于将涂层施加到基底的模块系统,例如, CRT和平板显示器用于将不同薄膜沉积到不同尺寸的基底上。 用于将涂层施加到基底的真空模块包括具有用于定位基底(3,3')的开口(2,8)的真空室(1); 密封件(12,12')和用于涂覆涂层的加工装置(5); 安装在与所述开口平行的平面中的阀门(6),以将处理装置与开口分离。 一个从开口处理的装置。 处理装置输送机构平行于基板表面往复运动。 模块系统包括具有共同的排气系统(27,28,29)和公共排气控制系统的多个模块,用于自动定位和移除基板的通用操纵装置控制系统。 几个模块设置在一个常见的操作器的操作区域内。