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    • 4. 发明申请
    • CHEMICAL MIXING APPARATUS, SYSTEM AND METHOD
    • 化学混合装置,系统和方法
    • WO2007008764A2
    • 2007-01-18
    • PCT/US2006/026687
    • 2006-07-10
    • TRES-ARK, INC.ANDERSON, Gary, R.FOWLER, Matt
    • ANDERSON, Gary, R.FOWLER, Matt
    • G05D11/139B01F13/1055B01F15/00207G05D11/133H01L21/67253
    • There is disclosed a system and method of formulating a batch comprising at least two chemicals. An embodiment is disclosed wherein a feedforward algorithm can be used to control the target blend. Subsequently a feedback closed loop control loop algorithm is provided for a multivariant blend. Use of this approach allows for a continuously autoreplenished and controlled blend. Also disclosed is the ability to control via feedforward and feedback algorithms a fast responding control mode that allows for the elimination of a container. This approach will allow for "one pass" blending with control. The controller implements an automated fault detection and correction system, thereby identifying necessary maintenance prior to failure. If failure does occur the signature recognition allows rapid analysis and correction thus maximizing tool availability.
    • 公开了配制包含至少两种化学品的批料的系统和方法。 公开了一个实施例,其中可以使用前馈算法来控制目标混合。 随后为多变量混合提供反馈闭环控制环路算法。 使用这种方法可以连续自动补充和控制混合。 还公开了通过前馈和反馈算法控制允许消除容器的快速响应控制模式的能力。 这种方法将允许“一次通过” 与控制混合。 控制器实施自动故障检测和纠正系统,从而在故障发生之前识别必要的维护。 如果发生故障,签名识别可以快速分析和修正,从而最大限度地提高工具可用性。
    • 8. 发明申请
    • CHEMICAL MIXING APPARATUS, SYSTEM AND METHOD
    • 化学混合装置,系统和方法
    • WO2007008767A3
    • 2007-02-15
    • PCT/US2006026691
    • 2006-07-10
    • TRES ARK INCANDERSON GARY RWOODLEY GEORGE V
    • ANDERSON GARY RWOODLEY GEORGE V
    • G05D11/13H01L21/00
    • G05D11/139B01F13/1055B01F15/00207G05D11/133H01L21/67253
    • There is disclosed a system and method of formulating a batch comprising at least two chemicals. An embodiment is disclosed wherein a feedforward algorithm can be used to control the target blend. Subsequently a feedback closed loop control loop algorithm is provided for a multivariant blend. Use of this approach allows for a continuously autoreplenished and controlled blend. Also disclosed is the ability to control via feedforward and feedback algorithms a fast responding control mode that allows for the elimination of a container. This approach will allow for "one pass" blending with control. The controller implements an automated fault detection and correction system, thereby identifying necessary maintenance prior to failure. If failure does occur the signature recognition allows rapid analysis and correction thus maximizing tool availability.
    • 公开了配制包含至少两种化学品的批料的系统和方法。 公开了一个实施例,其中可以使用前馈算法来控制目标混合。 随后为多变量混合提供反馈闭环控制环路算法。 使用这种方法可以连续自动补充和控制混合。 还公开了通过前馈和反馈算法控制允许消除容器的快速响应控制模式的能力。 这种方法将允许“一次通过”与控制混合。 控制器实施自动故障检测和纠正系统,从而在故障发生之前识别必要的维护。 如果发生故障,签名识别可以快速分析和修正,从而最大限度地提高工具可用性。
    • 9. 发明申请
    • APPARATUS AND METHOD FOR DISPENSING A PREDETERMINED AMOUNT OF FLUID
    • 用于分配预测流体量的装置和方法
    • WO01071442A1
    • 2001-09-27
    • PCT/US2001/007041
    • 2001-03-06
    • A23L2/84G05D11/13
    • A23L2/84G05D11/133
    • An apparatus and method for dispensing a predetermined amount of fluid, such as an enzyme solution, is disclosed. A supply line (26) and discharge line (38) are operatively connected to the lower discharge end of a fluid injection tube (20). An intake sensor (74) and discharge sensor (76) positioned below the intake sensor determine when fluid has reached a desired level within the injection tube (20). The fluid is supplied from a fluid supply line connected to a container of fluid (14). The discharge sensor (76) determines when a predetermined amount of fluid has been discharged from the fluid injection tube (20) into a discharge line operatively connected to the lower discharge end of the injection tube (20). A programmable logic controller (70) controls intake (32), discharge (36) and air valves (44) for controlling the filling and discharging of fluid to and from the fluid injection tube (20).
    • 公开了一种用于分配预定量的流体例如酶溶液的装置和方法。 供应管线(26)和排放管线(38)可操作地连接到流体注入管(20)的下排放端。 定位在进气传感器下方的进气传感器(74)和排出传感器(76)确定流体何时达到喷射管(20)内所需的水平。 流体从连接到流体容器(14)的流体供应管线供应。 排出传感器(76)确定预定量的流体何时已经从流体注入管(20)排出到可操作地连接到注射管(20)的下排放端的排出管线。 可编程逻辑控制器(70)控制进气(32),排放(36)和空气阀(44),用于控制流体和/或从流体注入管(20)的流出。
    • 10. 发明申请
    • ELECTRONIC PLURAL COMPONENT PROPORTIONER
    • 电子元器件分配器
    • WO01064325A1
    • 2001-09-07
    • PCT/US2001/006904
    • 2001-03-02
    • B05C11/10B01F13/10B01F15/04G05D11/00G05D11/13G05D11/02
    • B01F15/0462B01F13/1055B01F15/0237B01F2215/005G05D11/133
    • An electronic apparatus is provided for dispensing plural component materials having first and second (and optionally third) components and a desired ratio between the components. The apparatus has first and second reciprocating pumps (4), each of the pumps (4) being connected to a source of one of said components, first and second reciprocating drivers (5), each driver (5) being connected to drive one of the pumps and forming a driver-pump set, a position sensor (6) attached to each driver-pump set, each position sensor (6) outputting increments of resolution corresponding to a fixed volume being pumped by the driver-pump set to which it is connected, and a controller attached to the drivers and the position sensors to alternately move one of the driver-pump sets one said increment and the other of the driver-pump sets the product of one increment and the ratio.
    • 提供一种电子装置,用于分配具有第一和第二(和任选的第三)部件的多个部件材料和部件之间的期望比例。 该装置具有第一和第二往复泵(4),每个泵(4)连接到所述部件之一的源,第一和第二往复运动驱动器(5),每个驱动器(5)连接以驱动 泵和形成驱动器泵组,安装到每个驱动泵组的位置传感器(6),每个位置传感器(6)输出与由其驱动泵组泵送的固定体积相对应的分辨率增量 并且连接到驱动器和位置传感器的控制器交替地移动一个驱动泵组中的一个所述增量,并且驱动泵中的另一个设置一个增量和该比的乘积。