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1. 发明申请

WO2004006021A2 OPTICAL DEVICE COMPRISING AN LIGHT SOURCE 审中-公开
标题翻译：带照明光源的光学设备
公开(公告)号：WO2004006021A2
公开(公告)日：2004-01-15
申请号：PCT/EP0306397
申请日：2003-06-18
申请人： ZEISS CARL SMT AG , BADER DIETER , RENG NORBERT , WANGLER JOHANNES
发明人： BADER DIETER , RENG NORBERT , WANGLER JOHANNES
IPC分类号： G02B19/00 , G02B27/00 , G03F7/20 , H01L21/027
CPC分类号： G03F7/70141 , G03F7/70116
摘要： The invention relates to an optical device for illuminating an object of which an image should be formed with the aid of corresponding optics. The inventive device comprises a light source (210), which is arranged in the vicinity of or in an pupillary plane of illuminating optics and which produces an illuminating light beam. The illuminating optics are placed between the light source (210) and the object. The illuminating light beam used during an illumination cycle is composed of a number individual beams in two dimensions and in a matrix-like manner. The inventive device also comprises a control device (220) for selectively producing (216, 217) the individual beams. The selection ensues in such a manner that the shape of the illuminating light beam can be predetermined by the respectively produced individual beams. This enables the rapid and variable adjustment of illumination settings adapted to the respective imaging requirements.
摘要翻译：光学装置被用于照亮通过相应的光学器件成像的物体。它具有布置在照明光学系统的光瞳平面附近或其中的照明光源（210），其产生照明光束。照明光学器件布置在照明光源（210）和物体之间。照明循环中使用的照明光束由多个单独的束以矩阵状的二维方式构成。此外，提供控制装置（220）用于单束的选择性生成（216,217）。选择以这样的方式进行，即照明光束的形状可以通过在每种情况下产生的单独的束来预先确定。这允许快速和可变地调整适合于相应成像要求的照明设置。

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