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1. 发明申请

WO2007090465A1 TESTING DEVICES UNDER TEST BY AN AUTOMATIC TEST APPARATUS HAVING A MULTISITE PROBE CARD 审中-公开
标题翻译：通过具有多个探针卡的自动测试装置进行测试的测试装置
公开(公告)号：WO2007090465A1
公开(公告)日：2007-08-16
申请号：PCT/EP2006/050745
申请日：2006-02-08
申请人： VERIGY (SINGAPORE) PTE. LTD. , BERTONCELLI, Domenico , ARCA, Fabrizio , ERMOLLI, Stefano
发明人： BERTONCELLI, Domenico , ARCA, Fabrizio , ERMOLLI, Stefano
IPC分类号： G01R31/28
CPC分类号： G01R31/2834 , G01R31/2886 , G01R31/31901
摘要： Automated tester apparatus (10) for testing devices (W) includes a probe card (5) to establish contact (30) with the devices under test (W) under the control of prober modules. The probe card (5) is a multisite probe card including a plurality of sites exposed to site malfunctioning. The apparatus includes: - a malfunction detection module for checking malfunctioning of the sites in the multisite probe card (5), - a control module (1000) configured, if at least one site in the multisite probe card (5) is found to be malfunctioning, for continuing testing by using sites of the probe card (5) that are correctly operating. Continuing testing typically includes: - i) re-testing a set of devices that were already tested by using the site in the probe card (5) found to be malfunctioning; and - ii) testing at least one new set of devices in a lot of devices under test (W) not previously tested.
摘要翻译：用于测试设备（W）的自动测试仪器（10）包括在探测器模块的控制下与被测设备（W）建立接触（30）的探针卡（5）。探针卡（5）是包括暴露于场地故障的多个位置的多站点探针卡。该装置包括： - 故障检测模块，用于检查多站点探针卡（5）中的位置的故障; - 控制模块（1000），如果发现多站点探针卡（5）中的至少一个位置是故障，用于通过使用正确操作的探针卡（5）的位置继续测试。持续测试通常包括：i）通过使用发现有故障的探针卡（5）中的站点重新测试已经测试的一组设备; 和 - ii）在许多未经测试的设备（W）中测试至少一套新的设备。

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