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1. 发明申请

WO2007059227A2 TECHNIQUE FOR PROVIDING A SEGMENTED ELECTROSTATIC LENS IN AN ION IMPLANTER 审中-公开
标题翻译：在离子植入物中提供分离的静电镜的技术
公开(公告)号：WO2007059227A2
公开(公告)日：2007-05-24
申请号：PCT/US2006044374
申请日：2006-11-15
申请人： VARIAN SEMICONDUCTOR EQUIPMENT
发明人： RADOVANOV SVETLANA B , RENAU ANTHONY , BUFF JAMES STEVE
CPC分类号： H01J37/12 , H01J37/3171
摘要： A technique for providing a segmented electrostatic lens in an ion implanter is disclosed. In one particular exemplary embodiment, the technique may be realized as an electrostatic lens for use in an ion implanter. The lens may comprise an entrance electrode biased at a first voltage potential, wherein an ion beam enters the electrostatic lens through the entrance electrode. The lens may also comprise an exit electrode biased at a second voltage potential, wherein the ion beam exits the electrostatic lens through the exit electrode. The lens may further comprise a suppression electrode located between the entrance electrode and the exit electrode, the suppression electrode comprising a plurality of segments that are independently biased to manipulate an energy and a shape of the ion beam.
摘要翻译：公开了一种在离子注入机中提供分段静电透镜的技术。在一个特定的示例性实施例中，该技术可以被实现为用于离子注入机的静电透镜。透镜可以包括偏置在第一电压电位的入口电极，其中离子束通过入口电极进入静电透镜。透镜还可以包括偏置在第二电压电位的出射电极，其中离子束通过出射电极离开静电透镜。透镜还可以包括位于入射电极和出射电极之间的抑制电极，所述抑制电极包括独立地偏置以操纵离子束的能量和形状的多个段。

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