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1. 发明申请

WO2007092499A3 METHOD OF FORMING GATED, SELF-ALIGNED MICRO-STRUCTURES AND NANO-STRUCTURES 审中-公开
标题翻译：形成选通，自对准微结构和纳米结构的方法
公开(公告)号：WO2007092499A3
公开(公告)日：2007-12-27
申请号：PCT/US2007003256
申请日：2007-02-05
申请人： UNIV WAYNE STATE , BAIRD RONALD J , GEORGIEV DANIEL G , AVRUTSKY IVAN , NEWAZ GOLAM , AUNER GREGORY W
发明人： BAIRD RONALD J , GEORGIEV DANIEL G , AVRUTSKY IVAN , NEWAZ GOLAM , AUNER GREGORY W
IPC分类号： H01J1/02 , H01L21/00
CPC分类号： H01J9/025 , B82Y10/00 , H01J1/3044 , Y10T428/24802
摘要： Methods of forming a gated, self-aligned nano-structures for electron extraction are disclosed. One method of forming the nano-structure comprises irradiating a first surface of a thermally conductive laminate to melt an area across the first surface of the laminate. The laminate comprises a thermally conductive film and a patterned layer disposed on the first surface of the film. The patterned layer has a pattern formed therethrough, defining the area for melting. The film is insulated at a second surface thereof to provide two-dimensional heat transfer laterally in plane of the film. The liquid density of the film is greater than the solid density thereof. The method further comprises cooling the area inwardly from the periphery thereof to form the nano-structure having an apical nano-tip for electron emission centered in an electrically isolated aperture that serves as a gate electrode to control electron extraction in a gated field emitter device.
摘要翻译：公开了形成用于电子提取的门控自对准纳米结构的方法。一种形成纳米结构的方法包括照射导热层压材料的第一表面以熔化层压材料的第一表面上的区域。该层压板包括导热膜和设置在膜的第一表面上的图案化层。图案化层具有穿过其形成的图案，限定用于熔化的区域。该膜在其第二表面处被绝缘以在膜的平面内侧向地提供二维热传递。该膜的液体密度大于其固体密度。该方法进一步包括从其周边向内冷却该区域以形成具有用于电子发射的顶端纳米尖端的纳米结构，该顶端纳米尖端以电隔离孔隙为中心，该电隔离孔隙用作门电极以控制门控场发射器装置中的电子提取。

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