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    • 2. 发明申请
    • HIGH-EFFICIENCY NEUTRON DETECTORS AND METHODS OF MAKING SAME
    • 高效中性探测器及其制造方法
    • WO2004040332A3
    • 2004-10-07
    • PCT/US0334436
    • 2003-10-29
    • UNIV MICHIGANMCGREGOR DOUGLAS SKLANN RAYMOND
    • MCGREGOR DOUGLAS SKLANN RAYMOND
    • G01T1/185G01T3/00G01T3/08
    • G01T1/185G01T3/00G01T3/08
    • Neutron detectors, advanced detector process techniques and advanced compound film designs have greatly increased neutron-detection efficiency. One embodiment of the detectors utilizes a semiconductor wafer with a matrix of spaced cavities filled with one or more types of neutron reactive material such as B or LiF. The cavities are etched into both the front and back surfaces of the device such that the cavities from one side surround the cavities from the other side. The cavities may be etched via holes or etched slots or trenches. In another embodiment, the cavities are different-sized and the smaller cavities extend into the wafer from the lower surfaces of the larger cavities. In a third embodiment, multiple layers of different neutron-responsive material are formed on one or more sides of the wafer. The new devices operate at room temperature, are compact, rugged, and reliable in design.
    • 中子检测器,先进的检测器工艺技术和先进的复合膜设计大大提高了中子检测效率。 检测器的一个实施例利用具有填充有一种或多种类型的中子反应性材料如10 B或6 LiF的间隔空隙矩阵的半导体晶片。 空腔被蚀刻到装置的前表面和后表面中,使得来自一侧的空腔从另一侧围绕空腔。 可以通过孔或蚀刻的槽或沟槽蚀刻空腔。 在另一个实施例中,空腔是不同尺寸的,并且较小的空腔从较大空腔的下表面延伸到晶片中。 在第三实施例中,在晶片的一侧或多侧上形成多层不同的中子响应材料。 新设备在室温下工作,结构紧凑,坚固耐用,设计可靠。