专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2004011181A3 METHOD AND APPARATUS FOR REMOVING MINUTE PARTICLE(S) FROM A SURFACE 审中-公开
标题翻译：用于从表面去除一分钟颗粒的方法和设备
公开(公告)号：WO2004011181A3
公开(公告)日：2004-05-13
申请号：PCT/US0319878
申请日：2003-07-25
申请人： UNIV ARKANSAS , ALLEN SUSAN DAVIS , KUDRYASHOV SERGEY I
发明人： ALLEN SUSAN DAVIS , KUDRYASHOV SERGEY I
IPC分类号： B08B7/00 , B08B7/04 , B23K20060101
CPC分类号： B08B7/0035 , B08B7/0042
摘要： Methods and apparatus for removing minute particle(s) from a substrate. The methods include arranging an energy transfer medium having a predetermined thickness under and around one or more particle(s) to be removed, and irradiating the energy transfer medium and/or the surface of the substrate with pulsed energy, wherein the predetermined thickness of the energy transfer medium is selected so that viscous and other drag forces within the energy transfer medium are sufficient to cause the one or more particle(s) to be removed from the surface of the substrate. The apparatus include a tailored energy transfer medium application unit configured to control application of an energy transfer medium onto the surface of a substrate, and a tailored energy source that irradiates the energy transfer medium and/or the substrate with a tailored energy pulse or pulses, wherein the energy transfer medium application unit controls application of the energy transfer medium in accordance with a dimension of at least one of the particle(s).
摘要翻译：从基材上去除微小颗粒的方法和设备。该方法包括将具有预定厚度的能量传递介质布置在待移除的一个或多个颗粒之下和周围，并且利用脉冲能量照射能量传输介质和/或衬底的表面，其中预定厚度的能量传递介质被选择为使得能量传递介质内的粘滞力和其他拖曳力足以使得一个或多个颗粒从基底的表面移除。该设备包括定制的能量传递介质施加单元和定制的能量源，该能量转移介质施加单元被配置为控制将能量传递介质施加到衬底的表面上，该能量源用定制的能量脉冲照射能量传递介质和/或衬底，其中所述能量传递介质施加单元根据所述一个或多个颗粒中的至少一个的尺寸来控制所述能量传递介质的施加。

IPRDB

热门服务

关于我们

友情链接

联系方式