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    • 2. 发明申请
    • SCANNER FOR PROBE MICROSCOPY
    • 扫描仪用于探针显微镜
    • WO2006060052A1
    • 2006-06-08
    • PCT/US2005/032871
    • 2005-09-13
    • THE REGENTS OF THE UNIVERSITY OF CALIFORNIAHANSMA, Paul, K.FANTNER, GeorgKINDT, Johannes, H.
    • HANSMA, Paul, K.FANTNER, GeorgKINDT, Johannes, H.
    • G12B21/22G12B21/24
    • G01Q10/04
    • A scanner for probe microscopy that avoids low resonance frequencies and accounts better for piezo nonlinearities. The scanning probe microscope comprises a probe, a housing, at least two actuators, each coupled to the housing, and a support. The actuators are orthogonally arranged linear stacks of flat piezos in push-pull configuration. The scanner is a 2D scanner having a support frame with x and y axes, and a member for supporting a sample for a probe, the scanner comprising a flexure and flexure coupled cross­-conformed piezos arranged along x and y axes. Expansion of the piezos is measured by two strain gauges disposed to measure the differential motion of two opposed actuators. The strain gauges are preferably arranged to compensate for ambient temperature changes, and two strain gauges of identical type are disposed on each actuator to magnify the strain signal.
    • 用于探针显微镜的扫描仪,可避免低共振频率,更好地考虑压电非线性。 扫描探针显微镜包括探针,壳体,至少两个致动器,每个致动器联接到壳体和支撑件。 致动器是按推拉配置的平面压电体的正交布置的线性堆叠。 该扫描器是具有带x和y轴的支撑框架的2D扫描器,以及用于支撑用于探针的样本的构件,该扫描器包括沿着x和y轴布置的挠曲和弯曲耦合的交叉配合的压电体。 通过两个应变仪来测量压电体的扩展,这两个应变计用于测量两个相对的致动器的差动运动。 应变计优选地布置成补偿环境温度变化,并且相同类型的两个应变计布置在每个致动器上以放大应变信号。
    • 6. 发明申请
    • COMBINED SCANNING PROBE AND SCANNING ENERGY MICROSCOPE
    • 组合扫描探测和扫描能量显微镜
    • WO1996030927A1
    • 1996-10-03
    • PCT/US1996003721
    • 1996-03-20
    • THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
    • THE REGENTS OF THE UNIVERSITY OF CALIFORNIAHANSMA, Paul, K.WALTERS, Deron, A.HILNER, Paul, E.
    • H01J37/26
    • G02B21/0028G01Q30/025Y10S977/869
    • A combined scanning probe and scanning energy microscope, in which the same scanning system is used for both the scanning probe and scanning energy images. A sample is translated substantially along a horizontal plane either between or below the probe (14) of a scanning probe microscope and the objective (12) of a scanning energy microscope. The probe (14) collects topographic or other information. The objective (12) focuses a fixed beam of energy to a small spot (16) on the sample, then collects energy from the same spot and transmits it to a detector (18). A vertical translator (22) connected to the probe (14) or sample support (10) provides the vertical motion necessary to maintain them in close proximity. The images produced by the two microscopes are in substantial direct registration with each other. The invention is exemplified by a combined atomic force and confocal laser scanning microscope with a translated sample.
    • 组合的扫描探针和扫描能量显微镜,其中扫描探针和扫描能量图像都使用相同的扫描系统。 样本在扫描探针显微镜的探针(14)和扫描能量显微镜的物镜(12)之间或之下基本上沿水平面平移。 探头(14)收集地形或其他信息。 目标(12)将固定的能量束聚焦到样品上的小点(16)上,然后从同一点收集能量并将其传输到检测器(18)。 连接到探头(14)或样品支架(10)的垂直平移器(22)提供了使其保持紧密的必要的垂直运动。 由两个显微镜产生的图像相互直接对准。 本发明通过具有翻译样品的组合原子力和共聚焦激光扫描显微镜来举例说明。
    • 7. 发明申请
    • METHOD AND APPARATUS FOR PERFORMING NEAR-FIELD OPTICAL MICROSCOPY
    • 用于执行近场光学显微镜的方法和装置
    • WO1996005531A1
    • 1996-02-22
    • PCT/US1995009779
    • 1995-08-01
    • THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
    • THE REGENTS OF THE UNIVERSITY OF CALIFORNIAHILLNER, Paul, E.RADMACHER, ManfredHANSMA, Paul, K.
    • G02B21/00
    • G01Q60/22Y10S977/862
    • A near-field optical microscope and method of microscopy in which a probe including a flexible cantilever (3) having a sharp tip (10) is positioned in proximity to a sample (15). In one embodiment, a region (14) of the sample is irradiated with light, and one or more portions (21) of this region are caused to fluoresce. A quenching element (13) is provided at the tip (10) of the probe to quench the fluorescence of these portions within the region (14). The amount of quenching is determined while the sample is scanned to produce a high resolution image of the irradiated region (14) of the sample. In another embodiment, the fluorescence imparted to one or more portions of the irradiated region is enhanced by the interaction of an optically active element (13) disposed at the tip portion (10) of the cantilever probe which provides for sharper images with greater signal-to-noise ratios. The near-field optical microscopes according to the present invention can also be used to measure the reflection/transmission or absorption characteristics from a sample region within a distance of one wavelength of light away from the sample surface. The microscopes also include means for producing a relative scanning motion between the sample and the probe such as by raster scanner or circular scanning, for example.
    • 近场光学显微镜和显微镜方法,其中包括具有尖锐尖端(10)的柔性悬臂(3)的探针位于样品(15)附近。 在一个实施例中,用光照射样品的区域(14),并且使该区域的一个或多个部分(21)发荧光。 在探针的尖端(10)处提供淬火元件(13)以淬灭该区域(14)内的这些部分的荧光。 在扫描样品以产生样品的照射区域(14)的高分辨率图像时确定淬灭量。 在另一个实施方案中,通过设置在悬臂探头的尖端部分(10)处的光学活性元件(13)的相互作用,赋予被照射区域的一个或多个部分的荧光增强,其提供更清晰的图像, 信噪比。 根据本发明的近场光学显微镜还可以用于从远离样品表面的一个波长的光的距离内的样品区域测量反射/透射或吸收特性。 显微镜还包括用于例如通过光栅扫描器或圆形扫描在样品和探针之间产生相对扫描运动的装置。