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1. 发明申请

WO2010111229A1 OPTICAL MEMS CHEMICAL SENSOR ARRAY 审中-公开
标题翻译：光学MEMS化学传感器阵列
公开(公告)号：WO2010111229A1
公开(公告)日：2010-09-30
申请号：PCT/US2010/028248
申请日：2010-03-23
申请人： THE GOVERNMENT OF THE UNITED STATES OF AMERICA, as represented by THE SECRETARY OF THE NAVY , PRUESSNER, Marcel, W. , STIEVATER, Todd, H. , RABINOVICH, William, S.
发明人： PRUESSNER, Marcel, W. , STIEVATER, Todd, H. , RABINOVICH, William, S.
IPC分类号： G01P21/00
CPC分类号： G01N21/75 , G01B9/02004 , G01B9/02051 , G01B2290/25 , G01G3/165 , G01N21/17 , G01N29/036 , G01N2021/757 , G01N2291/0256
摘要： A change in mass of a microbridge in a mass sensor can be sensed by applying a time-varying amplitude modulated electrostatic force to excite the microbridge into resonance at the frequency of amplitude modulation. An optical energy is then transmitted at a wavelength close to a resonant wavelength of a Fabry-Perot microcavity, which is formed by etching a movable reflective mirror into a region of the microbridge and by etching a fixed reflective mirror in a region spaced apart from the microbridge. The two mirrors are interconnected by an optical waveguide. The movable mirror and fixed mirror reflect the optical energy to a receiver, and a change in the Fabry-Perot microcavity' s reflectivity is interferometrically determined. The change in reflectivity indicates a change in the microbridge' s resonant frequency due to increased mass of the microbridge resulting from sorption of a target chemical by a layer of chemoselective material deposited on the microbridge.
摘要翻译：可通过施加时变幅度调制的静电力来感测质量传感器中的微桥质量的变化，以便在调幅频率下将微桥激发成谐振。然后以接近于Fabry-Perot微腔的谐振波长的波长传输光能，该法是通过将可移动反射镜蚀刻到微桥的区域中形成的，并且通过在与微桥。两个反射镜通过光波导相互连接。可移动镜和固定镜将光能反射到接收器，并且法布里 - 珀罗微腔的反射率的变化被干涉地确定。反射率的变化表明由于通过沉积在微桥上的化学选择材料层吸附目标化学物而导致的微桥的质量增加，微桥的谐振频率发生变化。

2. 发明申请

WO2017151843A1 CHIP-SCALE TWO-DIMENSIONAI OPTICAL PHASED ARRAY WITH SIMPLIFIED CONTROLS 审中-公开
标题翻译：芯片级二维光学相控阵的简化控制
公开(公告)号：WO2017151843A1
公开(公告)日：2017-09-08
申请号：PCT/US2017/020325
申请日：2017-03-02
申请人： THE GOVERNMENT OF THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF THE NAVY NAVAL
发明人： PRUESSNER, Marcel, W. , RABINOVICH, William, S. , MAHON, Rita , GOETZ, Peter, G.
IPC分类号： G02B26/10 , G02B26/06 , G02B26/08
摘要： A device includes an -optical splitter comprising a plurality of splitter outputs. The splitter outputs are out of phase and include a non-uniform phase front The device Includes a one- dimensional phase compensation array communicating with the optical splitter. The phase compensation array receives the non-uniform phase front and outputs a uniform phase front The phase compensation array includes a- plurality of array outputs. The device includes a tunable linear gradient phase shifter communicating with said phase compensation array to impart a linearly- varying phase shift across said plurality of array outputs, thereby steering a beam along a first angle- in a first plane. The device includes a waveguide grating out-coupler communicating with said linear gradient phase shifter, and a Uniterm phase shifter communicating with, the waveguide grating out-coupler. The uniform phase shifter steers the flat phase front along a second angle in a second plane perpendicular to said first plane.
摘要翻译：一种设备包括包括多个分路器输出的光分路器。分离器输出相位相反，包括非均匀的相位正面该器件包括一个与分光器通信的一维相位补偿阵列。相位补偿阵列接收非均匀相位前沿并输出均匀相位前沿。相位补偿阵列包括多个阵列输出。该装置包括与所述相位补偿阵列通信的可调谐线性梯度移相器，以在所述多个阵列输出端上施加线性变化的相移，由此在第一平面中沿第一角度引导光束。该装置包括与所述线性梯度移相器通信的波导光栅输出耦合器以及与波导光栅输出耦合器通信的Uniterm移相器。均匀移相器在垂直于所述第一平面的第二平面中沿第二角度转动平相前沿。

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